• Title/Summary/Keyword: microfabricated membrane

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Fabrication of Biomimetic MEMS Acoustic Sensor and Analysis of Its Frequency Characteristics (MEMS 기반 생체모사 음향센서 제작 및 주파수 특성 분석)

  • Hur, Shin;Jung, Young-Do;Lee, Young-Hwa;Song, Won-Joon;Kim, Wan-Doo
    • Journal of the Korean Society for Nondestructive Testing
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    • v.31 no.5
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    • pp.522-528
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    • 2011
  • Artificial basilar membranes made of PVDF(polyvinylidene fluoride) are manufactured using microfabrication processes. The mechanical behavior of PVDF artificial basilar membrane was measured to evaluate its performance as a mechanical frequency analyzer using scanning LDV(laser Doppler vibrometer). The experimental setup consists of the microfabricated artificial basilar membrane, a loud speaker connected to an amplifier for generating acoustic pressure of specific spectral pattern, and a scanning LDV with controlling unit for measuring the displacement of the membrane on the incoming acoustic stimulation. The microfabricated artificial basilar membrane was attached tightly upon a package containing a chamber which can be filled with silicone oil before placed on the experimental setup stage. The experiment results showed that the microfabricated artificial basilar membrane has a property as a mechanical frequency analyzer.

Growth of Endothelial Cells on Microfabricated Silicon Nitride Membranes for an In Vitro Model of the Blood-brain Barrier

  • Harris, Sarina G.;Shuler, Michael L.
    • Biotechnology and Bioprocess Engineering:BBE
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    • v.8 no.4
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    • pp.246-251
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    • 2003
  • The blood-brain barrier (BBB) is composed of the brain capillaries, which are lined by endothelial cells displaying extremely tight intercellular junctions. Several attempts at creating an in vitro model of the BBB have been met with moderate success as brain capillary endothelial cells lose their barrier properties when isolated in cell culture. This may be due to a lack of recreation of the in vivo endothelial cellular environment in these models, including nearly constant contact with astrocyte foot processes. This work is motivated by the hypothesis that growing endothelial cells on one side of an ultra-thin, highly porous membrane and differentiating astrocyte or astrogliomal cells on the opposite side will lead to a higher degree of interaction between the two cell types and therefore to an improved model. Here we describe our initial efforts towards testing this hypothesis including a procedure for membrane fabrication and methods for culturing endothelial cells on these membranes. We have fabricated a 1 $\mu\textrm{m}$ thick, 2.0 $\mu\textrm{m}$ pore size, and 55% porous membrane with a very narrow pore size distribution from low-stress silicon nitride (SiN) utilizing techniques from the microelectronics industry. We have developed a base, acid, autoclave routine that prepares the membranes for cell culture both by cleaning residual fabrication chemicals from the surface and by increasing the hydrophilicity of the membranes (confirmed by contact angle measurements). Gelatin, fibronectin, and a 50/50 mixture of the two proteins were evaluated as potential basement membrane protein treatments prior to membrane cell seeding. All three treatments support adequate attachment and growth on the membranes compared to the control.

A Study on the Microfabricated Clark-type Sensor for Measuring Dissolved Oxygen (용존 산소 측정용 초소형 Clark-type 센서에 대한 연구)

  • Park, Jung-Il;Chang, Jong-Hyeon;Choi, Myung-Ki;Lee, Dong-Young;Kim, Young-Mi;Pak, Jung-Ho
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.8
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    • pp.1450-1454
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    • 2007
  • This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed, fabricated, and characterized a microfabircated Clark-type oxygen sensor for measuring dissolved oxygen. The microfabricated oxygen sensor consists of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing sample solution. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential for 2 hours against a commercial Ag/AgCl electrode and a stable cyclic voltammetry curve. Selectivity, response time, and linearity of the fabricated oxygen sensor were also verified well by cyclic voltammetry and amperometry depending. The fabricated oxygen sensor showed a 90% response time of 40sec and an excellent linearity with a correlation coefficient of 0.994.

Numerical Analysis on the Design of a Thermal Mass Air Flow Sensor with Various Heating Modes (가열모드에 따른 열식 질량유량센서의 설계 해석)

  • Jeon, Hong-Kyu;Lee, Joon-Sik;Park, Byung-Kyu
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.31 no.10
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    • pp.876-883
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    • 2007
  • Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

Measurements of Thermal Characteristics for a Micro-Fabricated Thermal Mass Air Flow Sensor With Real-Time Controller (실시간 제어기를 이용한 마이크로 열식 질량공기 유량센서의 열특성 측정)

  • Park, Byung-Kyu;Lee, Joon-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.8
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    • pp.573-579
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    • 2009
  • A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

Stabilization and thermal conductivity measurement of MWCNT nanofluids by using the $3-{\omega}$ method (3-${\omega}$ 방법을 이용한 다중벽 탄소나노튜브 나노유체의 침전 안정성 및 열전도계수 측정에 관한 실험적 연구)

  • Oh, Dong-Wook;Lee, Joon-Sik
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2171-2176
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    • 2007
  • The 3-omega (3-${\omega}$) method is utilized to measure the thermal conductivity of nanofluids. A metal line heater on a silicon nitride membrane bridge structure is microfabricated by a bulk silicon etching method. Localized measurement of the thermal conductivity within the nanofluids droplet is possible by the fabricated 3-${\omega}$ sensor. Time varying AC temperature amplitudes and thermal conductivities are measured to check the stability of the nanofluids containing multi-wall carbon nanotubes (MWCNTs). Stabilities of MWCNT nanofluids prepared with different chemical treatments are compared. Acid treated MWCNT showed best dispersion stability in water while MWCNTs dispersed in water with surfactants such as Gum Arabic and Sodium dodecyl benzene sulfate showed clear sign of gravity dependence.

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Rapid detection of liposome by piezoresistive cantilever sensor (고감도 압저항 외팔보 센서를 이용한 Liposome의 검침)

  • Hyun, S.J.;Kim, H.S.;Kim, Y.J.;Jung, H.I.
    • Journal of Sensor Science and Technology
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    • v.14 no.3
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    • pp.156-159
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    • 2005
  • Liposomes are microscopic spherical vesicles that form when lipids are hydrated and have been widely used for biochemical assay, drug delivery and molecular imaging. In particular, they are well known for artificial cell membranes to study cellular functions such as cell fusions and membrane proteins. Here, we firstly report the detection of liposomes by the highly sensitive microfabricated piezoresistive cantilever sensor chip and the phosphatidylserine recognition protein C2A which is chemically immobilized on the sensor surface. The signal created from the bending motion of piezoresistive cantilever after the liposome attachment has been monitored in real time.

Progress in Nanofiltration-Based Capacitive Deionization (나노여과 기반 용량성 탈이온화의 진전)

  • Jeong Hwan Shim;Rajkumar Patel
    • Membrane Journal
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    • v.34 no.2
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    • pp.87-95
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    • 2024
  • Recent studies explore a wide array of desalination and water treatment methods, encompassing membrane processes such as reverse osmosis (RO), nanofiltration (NF), and electrodialysis (ED) to advanced capacitive deionization (CDI) and its membrane variant (MCDI). Comparative analyses reveal ED's cost-effectiveness in low-salinity scenarios, while hybrid systems (NF-MCDI, RO-NF-MCDI) show improved salt removal and energy efficiency. Novel ion separation methods (NF-CDI, NF-FCDI) offer enhanced efficacy and energy savings. These studies also highlight the efficiency of these methods in treating complex wastewater specific to various industries. Environmental impact assessments emphasize the need for sustainability in system selection. Additionally, the integration of microfabricated sensors into membranes allows real-time monitoring, advancing technology development. These studies underscore the variety and promise of emerging desalination and water treatment technologies. They provide valuable insights for enhancing efficiency, minimizing energy usage, tackling industry-specific issues, and innovating to surpass conventional method limitations. The future of sustainable water treatment appears bright, with continual advancements focused on improving efficiency, minimizing environmental impact, and ensuring adaptability across diverse applications.