• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.53-62
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• 1999

Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

• Korean Journal of Optics and Photonics
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• v.27 no.4
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• pp.133-142
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• 2016

This paper presents the design and simulation of a three-dimensional pixel-by-pixel scanning light detection and ranging (LIDAR) system with a microelectromechanical system (MEMS) scanning mirror and direct sequence optical code division multiple access (DS-OCDMA) techniques. It measures a frame with $848{\times}480$ pixels at a refresh rate of 60 fps. The emitted laser pulse waves of each pixel are coded with DS-OCDMA techniques. The coded laser pulse waves include the pixel's position in the frame, and a checksum. The LIDAR emits the coded laser pulse waves periodically, without idle listening time to receive returning light at the receiver. The MEMS scanning mirror is used to deflect and steer the coded laser pulse waves to a specific target point. When all the pixels in a frame have been processed, the travel time is used by the pixel-by-pixel scanning LIDAR to generate point cloud data as the measured result.

• Transactions of Materials Processing
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• v.11 no.2
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• pp.108-113
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• 2002

The application fields of medicine and biology are spotlighted because of the increasing concentration of health and the abundance of life. MEMS is very good solution in this fields for the concept of point of care which makes systems more useful and spread wide. This paper shows the major fabrication schemes and application fields of microelectromechanical system specially in medicine and biology fields.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.34 no.4
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• pp.1343-1351
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• 2014

Recent technological advances in wireless networks and microelectromechanical systems (MEMS) have led to the development of different types of mini-UAVs and their utilizations in various ways. This study endeavors to develop a low-cost mini-UAV with autonomous flight capability, in order to obtain geospatial information of a small or medium-sized area, and also assess its flight stability by comparing the predetermined flight paths against the actual flight paths. Based on a post-development flight test, stable flight has been proven achievable as follows: the maximum endurance speed is 1 hour, the flying distance is 50km, the horizontal accuracy of flight paths is about ${\pm}6{\sim}8m$, and the altitude accuracy is about ${\pm}8m$. Therefore, it is deemed that high-resolution images which can be utilized for geospatial information are obtainable. This indicates that a UAV flying at an altitude of 200m can acquire images across a $2km{\times}3km$ area on the ground within 25 minutes, which validates its high usability for obtaining high-solution images at low altitudes in the future.

• Journal of Power Electronics
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• v.12 no.6
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• pp.954-959
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• 2012

A hybrid switch that uses a microelectromechanical system (MEMS) switch as a gate driver of a MOSFET is applied to an energy harvesting system. The power management circuit adopting the hybrid switch provides ultralow leakage, self-referencing, and high current handling capability. Measurements show that solar energy harvester circuit utilizing the MEMS-MOSFET hybrid switch accumulates energy and charges a battery or drive a resistive load without any constant power supply and reference voltage. The leakage current during energy accumulation is less than 10 pA. The power management circuit adopting the proposed hybrid switch is believed to be an ideal solution to self-powered wireless sensor nodes in smart grid systems.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.62-66
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• 2023

With the advancement in technology and rapid increase in the demand for microelectromechanical systems (MEMS) based inertial measurement units (IMUs), high-volume production and test system remain a major challenge for the MEMS industry. To compete with the challenging market of Industry 4.0, here we developed an automatic test system to evaluate the performance of the ovenized IMU sensors as well as analyze the data. The automatic test system was developed by interfacing a commercial MEMS IMU (BMI 088) using LabVIEW. The BMI 088 was tested experimentally for long-term bias stability, ON/OFF bias repeatability, and root mean square (rms) noise. Furthermore, the data was analyzed through the developed test system. The results show that the automatic test system has improved the test time and reduced human effort. The developed automatic test system is a significant approach to MEMS research and development (R&D) to increase and improve the mass production of IMUs.

• Journal of Sensor Science and Technology
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• v.26 no.5
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• pp.366-369
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• 2017

This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Conventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the device is manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, the commercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the accessories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with the capable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spray coating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.

• Current Optics and Photonics
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• v.7 no.3
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• pp.283-296
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• 2023

An intraoral spectral domain optical coherence tomography (SD-OCT) system has been developed, using a custom-built hand-held scanner and spectrometer. The hand-held OCT probe, based on a microelectromechanical systems scanner and a self-built miniaturized drive circuit, had a field of view sufficient for dental diagnosis. The spectrometer using a fabricated f-theta lens provided the image depth required for dental diagnosis. The axial and transverse resolutions of the OCT system in air were 7.5 ㎛ and 12 ㎛ respectively. The hand-held probe could scan an area of 10 × 10 mm², and the spectrometer could image along a depth of 2.5 mm. To verify the utility of the developed OCT system, OCT images of tooth hard and soft tissues were acquired, and a user-interface program for diagnosis was developed. Early caries and microcracks that were difficult to diagnose with existing methods could be found, and the state of restoration could be observed. Measuring the depth of the gingival sulcus, distinguishing subgingival calculus, and detecting an implant under the gingiva suggested the possibility of the SD-OCT system as a diagnostic for dental soft tissues. Through the presented OCT images, the capability of the developed SD-OCT system for dental diagnosis was demonstrated.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2117-2120
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• 2004

본 논문은 UV-LIGA 공정, 후막공정을 이용한 바이오센서용 magnetic bead 분리 장치의 제작 기술개발에 관한 것이다. 최근 MEMS(microelectromechanical system) 기술을 이용한 바이오센서에 대한 연구가 활발하게 이루어지고 있다. 이러한 바이오센서 분야 중 혈액이나 다른 원하지 않는 물질을 분리해 주는 분리장치는 MEMS 기술을 이용해 구현이 매우 어려운 부분 중에 하나이다. 기존의 UV-LIGA 공정과 도금법을 이용한 마이크로 전자석 제작하여 분리장치를 제작하는 경우 제작 공정이 매우 복잡하며 매우 많은 공정비용을 요구한다. 이러한 단점을 해결하기 위해 본 논문에서는 Sr 계연의 고분자 자석과 3차원 PDMS(poly-dimethylsiloxane) 마이크로 채널 공정을 이용해 분리장치를 제작하였다. 제작된 분리장치는 $0{\sim}30{\mu}{\ell}$/min 의 속도에서 유체를 흘렸을 90% 이상의 분리 효율을 나타냈다. 개발된 분리 장치는 연재질의 PDMS 로 제작되어 일회용 바이오센서에 적용이 가능하다.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.226-229
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• 2001

현재 초소형 정밀기계(MEMS;Microelectromechanical System) 소자의 가장 큰 문제점으로 대두되고 있는 점착현상을 방지하기 위하여 불화유기박막을 증착하였다. Octafluorocyclobutane(C$_4$F$_{8}$)을 소스가스를 PECVD (Plasma Enhanced CVD)와 ICP (Inductively Coupled Plasma)를 이용하여 증착하였다. 여기에 Ar을 첨가하여 플라즈마의 반응성을 높여주었다. 형성된 불화유기박막의 나노트라이볼러지 특성을 살펴보기 위하여 AFM을 통하여 증착시킨 시편의 topography를 살펴보았다. 그리고 박막의 antiadhesion의 정도를 살펴보기 위하여 cantilever와 박막의 표면 사이에 존재하는 interaction force를 측정 하였고 AFM의 force curve mode를 이용하였다 PECVB를 이용하여 증착된 박막은 ICP를 이용한 박막보다 균일하지 못한 박막을 보였으며 attractive force가 강한 것으로 사료된다.