• Title, Summary, Keyword: microelectromechanical system

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Grid-Enabled Parallel Simulation Based on Parallel Equation Formulation

  • Andjelkovic, Bojan;Litovski, Vanco B.;Zerbe, Volker
    • ETRI Journal
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    • v.32 no.4
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    • pp.555-565
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    • 2010
  • Parallel simulation is an efficient way to cope with long runtimes and high computational requirements in simulations of modern complex integrated electronic circuits and systems. This paper presents an algorithm for parallel simulation based on parallelization in equation formulation and simultaneous calculation of matrix contributions for nonlinear analog elements. In addition, the paper describes the development of a grid interface for a parallel simulator that enables a designer to perform simulations on distant computer clusters. Performances of the developed parallel simulation algorithm are evaluated by simulation of a microelectromechanical system.

Effective Stress Modeling of Membranes Made of Gold and Aluminum Materials Used in Radio-Frequency Microelectromechanical System Switches

  • Singh, Tejinder
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.4
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    • pp.172-176
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    • 2013
  • Microelectromechanical system switches are becoming more and more popular in the electronics industry; there is a need for careful selection of the materials in the design and fabrication of switches for reliability and performance issues. The membrane used for actuation to change the state of an RF switch is made mostly using gold or aluminum. Various designs of membranes have been proposed. Due to the flexure-type structures, the design complexity increases, which makes stress analysis mandatory to validate the reliability and performance of a switch. In this paper, the effective stress and actuation voltage required for different types of fixed-fixed membranes is analyzed using finite element modeling. Effective measures are presented to reduce the stress and voltage.

마이크로 기술을 이용한 심장세포칩

  • Park, Jeong-Yeol
    • Journal of the KSME
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    • v.50 no.11
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    • pp.43-46
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    • 2010
  • 이글에서는 마이크로 기술, 특히 Microelectromechanical System(MEMS) 기술을 활용하여 심장세포의 기계적/물리적 특성 분석을 위한 심장세포용 바이오센서 및 심장세포의 기계적 힘을 이용한 심장세포 기반의 바이오 하이브리드(biohybrid) 디바이스에 대하여 소개하고자 한다.

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탄소나노튜브와 멤스 소자의 융합

  • Choe, Jeong-Uk;Kim, Jong-Baek
    • Journal of the KSME
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    • v.53 no.9
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    • pp.41-45
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    • 2013
  • 이 글에서는 탄소나노튜브와 멤스(MEMS: Microelectromechanical system) 소자의 융합 기술 및 응용 분야에 대하여 소개하고자 한다.

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Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

  • Ahmadian, Mehdi;Jafari, Kian;Sharifi, Mohammad Javad
    • ETRI Journal
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    • v.40 no.6
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    • pp.794-801
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    • 2018
  • This paper proposes a novel graphene-based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and integrated optical waveguides. The proposed accelerometer provides several advantages, such as negligible cross-axis sensitivity, appropriate linearity behavior in the operation range, a relatively broad measurement range, and a significantly wider bandwidth when compared with other important contributions in the literature. Furthermore, the functional characteristics of the proposed device are designed analytically, and are then confirmed using numerical methods. Based on the simulation results, the functional characteristics are as follows: a mechanical sensitivity of 1,019 nm/g, an optical sensitivity of 145.7 %/g, a resonance frequency of 15,553 Hz, a bandwidth of 7 kHz, and a measurement range of ${\pm}10g$. Owing to the obtained functional characteristics, the proposed device is suitable for several applications in which high sensitivity and wide bandwidth are required simultaneously.

Investigation of smart multifunctional optical sensor platform and its application in optical sensor networks

  • Pang, C.;Yu, M.;Gupta, A.K.;Bryden, K.M.
    • Smart Structures and Systems
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    • v.12 no.1
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    • pp.23-39
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    • 2013
  • In this article, a smart multifunctional optical system-on-a-chip (SOC) sensor platform is presented and its application for fiber Bragg grating (FBG) sensor interrogation in optical sensor networks is investigated. The smart SOC sensor platform consists of a superluminescent diode as a broadband source, a tunable microelectromechanical system (MEMS) based Fabry-P$\acute{e}$rot filter, photodetectors, and an integrated microcontroller for data acquisition, processing, and communication. Integrated with a wireless sensor network (WSN) module in a compact package, a smart optical sensor node is developed. The smart multifunctional sensor platform has the capability of interrogating different types of optical fiber sensors, including Fabry-P$\acute{e}$rot sensors and Bragg grating sensors. As a case study, the smart optical sensor platform is demonstrated to interrogate multiplexed FBG strain sensors. A time domain signal processing method is used to obtain the Bragg wavelength shift of two FBG strain sensors through sweeping the MEMS tunable Fabry-P$\acute{e}$rot filter. A tuning range of 46 nm and a tuning speed of 10 Hz are achieved. The smart optical sensor platform will open doors to many applications that require high performance optical WSNs.

Stress Analysis Using Finite Element Modeling of a Novel RF Microelectromechanical System Shunt Switch Designed on Quartz Substrate for Low-voltage Applications

  • Singh, Tejinder;Khaira, Navjot K.;Sengar, Jitendra S.
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.5
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    • pp.225-230
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    • 2013
  • This paper presents a novel shunt radio frequency microelectromechanical system switch on a quartz substrate with stiff ribs around the membrane. The buckling effects in the switch membrane and stiction problem are the primary concerns with RF MEMS switches. These effects can be reduced by the proposed design approach due to the stiffness of the ribs around the membrane. A lower mass of the beam and a reduction in the squeeze film damping is achieved due to the slots and holes in the membrane, which further aid in attaining high switching speeds. The proposed switch is optimized to operate in the k-band, which results in a high isolation of -40 dB and low insertion loss of -0.047 dB at 21 GHz, with a low actuation voltage of only 14.6 V needed for the operation the switch. The membrane does not bend with this membrane design approach. Finite element modeling is used to analyze the stress and pull-in voltage.

An ASIC implementation of a Dual Channel Acoustic Beamforming for MEMS microphone in 0.18㎛ CMOS technology (0.18㎛ CMOS 공정을 이용한 MEMS 마이크로폰용 이중 채널 음성 빔포밍 ASIC 설계)

  • Jang, Young-Jong;Lee, Jea-Hack;Kim, Dong-Sun;Hwang, Tae-ho
    • The Journal of the Korea institute of electronic communication sciences
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    • v.13 no.5
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    • pp.949-958
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    • 2018
  • A voice recognition control system is a system for controlling a peripheral device by recognizing a voice. Recently, a voice recognition control system have been applied not only to smart devices but also to various environments ranging from IoT(: Internet of Things), robots, and vehicles. In such a voice recognition control system, the recognition rate is lowered due to the ambient noise in addition to the voice of the user. In this paper, we propose a dual channel acoustic beamforming hardware architecture for MEMS(: Microelectromechanical Systems) microphones to eliminate ambient noise in addition to user's voice. And the proposed hardware architecture is designed as ASIC(: Application-Specific Integrated Circuit) using TowerJazz $0.18{\mu}m$ CMOS(: Complementary Metal-Oxide Semiconductor) technology. The designed dual channel acoustic beamforming ASIC has a die size of $48mm^2$, and the directivity index of the user's voice were measured to be 4.233㏈.

Stress characteristics of multilayer polysilicon for the fabrication of micro resonators (마이크로 공진 구조체 제작을 위한 다층 폴리실리콘의 스트레스 특성)

  • Choi, C.A.;Lee, C.S.;Jang, W.I.;Hong, Y.S.;Lee, J.H.;Sohn, B.K.
    • Journal of Sensor Science and Technology
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    • v.8 no.1
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    • pp.53-62
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    • 1999
  • Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

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