• Title/Summary/Keyword: microcantilevers

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Vibration Analysis of AFM Microcantilevers Using an Equivalent Stiffness Element Model (등가강성요소 모델을 이용한 AFM 마이크로캔틸레버의 진동해석)

  • Han, Dong Hee;Kim, Il Kwang;Lee, Soo Il
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.39 no.5
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    • pp.461-466
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    • 2015
  • Atomic force microscopy (AFM) is powerful tool for determining properties of samples based on interactions between the sample surface and an approaching probe tip. In this study, we modeled the interactions between the sample and the tip of the AFM microcantilever as a single nonlinear spring with an equivalent stiffness element and simulated the dynamic behaviors of the AFM microcantilevers using the finite element method (FEM) and ANSYS software. With the simulation results, we analyzed the complex dynamic responses of the AFM cantilever using proper orthogonal decomposition (POD). In addition, we compared the simulation and experimental results using the same method. Consequently, we suggest an effective method to express the interaction between the tip and sample, and we confirm that the influence of the higher order model due to the interaction between the tip and sample is increased.

Nonlinear Modeling of Dynamic AFM Using Proper Orthogonal Modes (적합직교모드를 이용한 동적모드 AFM 의 비선형 모델링)

  • Hong, Sang-Hyuk;Lee, Soo-Il
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.05a
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    • pp.379-382
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    • 2007
  • The proper orthogonal decomposition(POD) is used to the modal analysis of microcantilever of dynamic mode atomic force microscopy(AFM). The proper orthogonal modes(POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. The POMs resemble the linear normal modes(LNM) of cantilever vibrating at each resonance frequency. Some of POMs in tapping microcantilever show quite different shapes from the POMs of the resonating microcantilever. Also this POMs can be applied to model for the complex nonlinear behavior of the dynamic mode AFM microcantilevers.

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Proper Orthogonal Mode Extraction of AFM Microcantilevers in Dynamic Mode (동적모드 AFM 마이크로캔틸레버의 적합직교모드 추출)

  • Cho, Hong-Mo;Hong, Sang-Hyuk;Kwon, Won-Tae;Lee, Soo-Il
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.05a
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    • pp.264-268
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    • 2007
  • Proper orthogonal decomposition(POD) is a method for extracting bases for modal decomposition from the ensemble of signals. We verified the connection of the proper orthogonal modes(POMs) and the linear normal modes(LNMs) through MATLAB simulation for the simple cantilever and AFM microcantilever models. Using the POMs, we can analyze and model effectively the dynamic mode of AFM microcantievers.

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