• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1088-1091
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• 1997

This paper describes the characteristic of hinges on which a lever pivots within a limited angle due to the torque. The hinges are exerted by the thermally expanded actuators connected with a level through hinges. To enhance the stroke of inchworm actuator, FEM(Finite Element Method) was utilized for the characterization in view of stress displacement according to the variation of notch radius and notch width. As a result, notch width of the hinges plays an important part in improvement of micro inchworm actuator.

• 한국정밀공학회지
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• 제24권8호통권197호
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• pp.108-115
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• 2007

3D nano-scale manufacturing is an important aspect of advanced manufacturing technology. A key element in ability to view, fabricate, and in some cases operate micro-devices is the availability of tightly focused particle beams, particularly of photons, electrons, and ions. The use of ions is the only way to fabricate directly micro-/ nano-scale structures. It has been utilized as a direct-write method for lithography, implantation, and milling of functional devices. The simulation of ion beam induced physical and chemical phenomena based on sound mathematical models associated with simulation methods is presented for 3D micro-/nanofabrication. The results obtained from experimental investigation and characteristics of ion beam induced direct fabrication will be discussed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1124-1128
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• 2008

Thin-wall injection molding is associated with many advantages, including increased portability, the conserving of materials, and the reduction of the molding cycle times. In the application of the thin-wall molding, a considerable reduction of the effective flow thickness results in filling difficulty. High-frequency induction is an efficient way to overcome this filling difficulty by means of heating the mold surface by electromagnetic induction. The present study applies the induction heating to the injection molding of thinwalled micro structures with high aspect ratio. The feasibility of the proposed heating method is investigated through a numerical analysis. The estimated filling characteristics of the micro-features are investigated with variations of mold temperature and part thickness, of which results are also compared with experimental measurements.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.147-148
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• 2006

A research on scaffold fabrication has been progressed in many research groups. However, the mechanical properties of existing biodegradable materials are still not satisfactory. But, PPF (poly (propylene fumarate)) has a good mechanical property in comparison to other biodegradable materials. Nevertheless, the viscosity of the synthesized PPF is too high to fabricate structures using micro-stereolithography. Therefore, the viscosity of the resin was made low by adding the diethyl fumarate and this material could be used in micro-stereolithography apparatus. Then, a photoinitiator was added for photo crosslinking of the DEF/PPF resin. 2.5D and 3D scaffolds were fabricated our system and curing characteristics of the resin were analyzed through the experiment.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.910-911
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• 2006

We newly designed and manufactured a new arranging system for a three-dimensional artificial crystal of monosized micro particles. In this system, a robotic micro-manipulator accurately locates the spherical particle onto the lattice point, and subsequently fiber lasers micro-weld the contact points between the neighboring particles. Actually, one- and two-dimensional arrays were constructed using monosized tin particles with the diameter of 400 m. Moreover, due to optimization of the process parameters, we successfully constructed the artificial crystals of simple cubic and diamond structures. In particular, the diamond structure which can represent a large photonic band gap is expected to progress toward a practical photonic crystal device.

• Steel and Composite Structures
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• 제46권1호
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• pp.143-152
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• 2023

In this paper, static and dynamic bending of nanocomposite micro beam armed with CNTs considering agglomeration effect is studied. The structural damping is considered by Kelvin-Voigt model. The agglomeration effects are assumed using Mori-Tanaka model. The micro beam is modeled by third order shear deformation theory (TSDT). The motion equations are derived by principle of Hamilton's and energy method assuming size effects on the basis of Eringen theory. Using differential quadrature method (DQM) and Newmark method, the static and dynamic deflections of the structure are obtained. The effects of agglomeration and CNTs volume percent, damping of structure, nonlocal parameter, length and thickness of micro-beam are presented on the static and dynamic deflections of the nanocomposite structure. Results show that with increasing CNTs volume percent, the static and dynamic deflections are decreased. In addition, enhancing the nonlocal parameter yields to higher static and dynamic deflections.

• Journal of Mechanical Science and Technology
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• 제20권4호
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• JSTS:Journal of Semiconductor Technology and Science
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• 제12권2호
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• pp.219-229
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• 2012

In the course of feasibility study the necessity of implementing electrochemical methods as an inline metrology technique to characterize semiconductor nano structures for a Deep Trench Dynamic Random Access Memory (DT-DRAM) (e.g. ultra shallow junctions USJ) was discussed. Hereby, the state of the art semiconductor technology on the advantages and disadvantages of the most recently used analytical techniques for characterization of nano electronic devices are mentioned. Various electrochemical methods, their measure relationship and correlations to physical quantities are explained. The most important issue of this paper is to prove the novel usefulness of the electrochemical micro cell in the semiconductor industry.

• 한국가시화정보학회지
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• 제1권1호
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• pp.28-33
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• 2003

This paper presents the visualization method in which 3-dimensional(3D) microchannel flow can be detected using a confocal scanning microscope. By soft-lithography, we fabricated various Bio-MEMS(Micro Electro-Mechanical System) devices such as a disposable microchip for a flow cytometer and a micro-mixer, which have 3D structures. Injecting aqueous fluorescent solution in the microfluidic devices, we measured the flow in a steady state by the confocal scanning microscope. At first, we explain the principle of the confocal scanning microscope. And then we show the results from 3D visualization of microscopic flow structures using the confocal scanning microscope.

• Interaction and multiscale mechanics
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• 제4권2호
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• pp.107-122
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• 2011

Mechanical behavior in nano-sized structures differs from those in macro sized structures due to surface effect. As the ratio of surface to volume increases, surface effect is not negligible and causes size-dependent mechanical behavior. In order to identify this size effect, atomistic simulations are required; however, it has many limitations because too much computational resource and time are needed. To overcome the restrictions of the atomistic simulations and graft the well-established continuum theories, the continuum model considering surface effect, which is based on the bridging technique between atomistic and continuum simulations, is introduced. Because it reflects the size effect, it is possible to carry out a variety of analysis which is intractable in the atomistic simulations. As a part of the application examples, the homogenization method is applied to micro/nano thin films with porosity and the homogenized elastic coefficients of the nano scale thickness porous films are computed in this paper.