• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.225-229
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• 2005

We have designed micro-fuel processor system, which consists of a steam reforming area and a PROX(preferential oxidation) area. Micro-fuel processor system generates $H_2$ rich gas from a methanol. In our experiment, we have integrated micro-fuel processor system using low temperature cofired ceramics (LTCC) process because LTCC is superior to other materials principally due to their high thermal and chemical stability, simpler fabrication processes, and lower materials cost. Therefore, we have studied and integrated micro-fuel processor system containing embedded heaters, cavities, and 3D structures of micro-channel with LTCC. Also we have optimized the LTCC process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1179-1180
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• 2005

3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

• 한국정밀공학회지
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• 제20권1호
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• pp.43-49
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• 2003

In this study, micro electrochemical machining method was introduced for accomplishment the fabrication technology of functional parts and smart structures using the Ni-Ti shape memory alloy. From the experimental result, the micro part which has very fine surface could be achieved by use of micro electrochemical process with point electrode method. Concretely, the optimal performance of micro electrochemical process in Ni-Ti SMA was obtained at the condition of approximately 100% of current efficiency and high frequency pulse current. That is, much finer surface integrity and shape memory effect can be obtained at the same condition mentioned above.

• 한국정밀공학회지
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• 제27권9호
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• pp.20-25
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• 2010

The effect of micro surface structure on printing for printed electronics has been studied experimentally. The photolithography MEMS fabricationwass used to make a SU-8 molder which has micro structures on the surface, and the PDMS micro structure was fabricated by the PDMS molding method. In the aspect of printed electronics, we used silver paste conductive ink. We measured the surface energy variation on pillar microstructure. The microstructure was used to real printing experiment by a screen printing. We printed 1cm micro lines which have $30{\sim}250{\mu}m$ width, and checked the conductivity to sort out opened line pattern. Printability was defined by success probability of printed patterns and we found that the present microstructures improve the printability significantly.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.161-162
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• 2006

Micro-stereolithography technology is used for fabricating of 3-dimensional micro-structures. In some cases, this technology is more economical and simpler than MEMS and LIGA technologies based on semiconductor process. In this research, the micro-sterolithography apparatus that is more economical and simpler than current micro-stereolithography apparatus was developed. This apparatus uses UV lamp and optical fiber as a light source and tight delivery system, respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.218-222
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• 2002

Micro-EDM is generally used far machining micro holes, pockets, and 3-D structures. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDC system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters about electrode surface integrity on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of capacitance, resistance, pause time, wire feed rate, spindle rotating speed. As a result of experiments, capacitance and resistance affect electrode surface.

• 소성∙가공
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• 제11권7호
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• pp.575-580
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• 2002

To evaluate elastic and micro-failure properties of MEMS materials, the electro-statically operated test devices were designed and fabricated by micro machining technology. The test structures consist or comb drives for loading and suspending beams in testing. From the analysis of beam displacement based on elastic beam theory, elastic modulus and yield strength of Al film were measured. And, by introducing the micro notch and cyclic loading, the micro-failure was Induced and the micro-fracture toughness of Si film was evaluated. Moreover, the cycles to failure were estimated from the degradation of resonant frequency. Finally, the effects of notch on micro failure were discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.885-887
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• 2005

Recently, many three-dimensional micros-structures were fabricated using micro-stereolithography technology. However, for most conventional micro-stereolithography apparatus. an expensive laser was used as light source and complex optical systems were used. In this research. new type of micro-stereolithography apparatus which has UV lamp as light source and optical fiber as beam delivery system was developed. This apparatus is cheaper and simpler then conventional micro-stereolithography apparatus.

• 한국기계가공학회지
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• 제17권5호
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• pp.91-96
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• 2018

The oleophobic property of surfaces modified with micro-post structures are investigated for a range of micro-post diameter ($11-23{\mu}m$) and pitch ($20-40{\mu}m$). The contact angle of an oil droplet on surfaces with various micro-post dimensions was calculated using the Cassie-Baxter model and did not show a good agreement with the measured contact angle. From measurement, the micro-post with diameter of $23{\mu}m$ and pitch of $32{\mu}m$ was found to have the highest contact angle ($134.3^{\circ}$).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.