• Title/Summary/Keyword: micro-stereolithography

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Development of Large-area Two-photon Stereolithography Process for the Fabrication of Large Three-dimensional Microstructures (대면적 3 차원 마이크로 형상제작을 위한 스테이지 스캐닝 시스템을 이용한 이광자 흡수 광조형 공정 개발)

  • Lim, Tae-Woo;Son, Yong;Yi, Shin-Wook;Kong, Hong-Jin;Park, Sang-Hu;Yang, Dong-Yol
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.1
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    • pp.122-129
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    • 2008
  • Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

Investigation into direct fabrication of nano-patterns using nano-stereolithography (NSL) process (나노 스테레오리소그래피 공정을 이용한 무(無)마스크 나노 패턴제작에 관한 연구)

  • Park Sang Hu;Lim Tae-Woo;Yang Dong-Yol
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.3 s.180
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    • pp.156-162
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    • 2006
  • Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.

Development of a Three-Dimensional Barrier Embedded Kenics Micromixer by Means of a Micro-Stereolithography Technology (마이크로 광 조형기술을 이용한 3차원의 배리어가 포함된 케닉스 마이크로 믹서의 개발)

  • Lee In Hwan;Kwon Tai Hun;Cho Dong-Woo;Kim Dong Sung
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.6 s.237
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    • pp.904-912
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    • 2005
  • The flow in a microchannel is usually characterized as a low Reynolds number (Re) so that good mixing is quite difficult to be achieved. In this regard, we developed a novel chaotic micromixer, named Barrier Embedded Kenics Micromixer (BEKM). In the BEKM, the higher level of chaotic mixing can be achieved by combining two general chaotic mixing mechanisms: (i) splitting/reorientation by helical elements inside the microchannel and (ii) stretching/folding via periodically located barriers on the channel wall. The fully three-dimensional geometry of BEKM was realized by a micro-stereolithography technology, in this study, along with a Kenics micromixer and a circular T-pipe. Mixing performances of three micromixers were experimentally characterized in terms of an average mixing color intensity of phenolphthalein. Experimental results show that BEKM has better mixing performance than other two micromixers. Chaotic mixing mechanism, proposed in this study, could be integrated as a mixing component with Micro-Total-Analysis-System, Lab-on-a-chip and so on.

Fabrication of Hydrophobic Surfaces with Stereolithography (SLA을 이용한 소수성 표면 제작)

  • Hong, Sung-Ho
    • Tribology and Lubricants
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    • v.37 no.1
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    • pp.1-6
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    • 2021
  • This paper presents the experimental results of hydrophobic surfaces developed using a stereolithography-based additive-manufacturing technique. The additive manufacturing technique can be used to manufacture objects with complex geometries from computer-aided design data. Several additive manufacturing methods, such as selective laser sintering, fused deposition modeling, stereolithography apparatus (SLA), and inkjet-based system, have been developed. The SLA is a form of three-dimensional printing technology used to create prototypes, patterns, and production parts in successive layers through photochemical processes. Light causes chemical monomers and oligomers to cross-link together to form objects composed of polymers. Moreover, this method is economical for fabricating surfaces with high output resolution and quality. Here, we fabricate various surfaces using different shapes using an SLA. The surfaces with micro-patterns are fabricated for 10 cases, including the biomimetic surface. The fabricated surfaces with various micro-patterns are evaluated for hydrophobicity performance based on the static contact angle. The contact angle is measured three times for each case, and the averaged value is used. The results indicate that the arrangements in a staggered structure have a larger contact angle than those in a line when the same micro-pattern is applied. Moreover, the mimetic surfaces exhibit more hydrophobic characteristics than those of artificial micro-patterns.

Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures (이광자 광중합 공정을 이용한 3차원 미세구조물 제작기술 동향)

  • Ha, Cheol-Woo;Lim, Tae-Woo;Son, Yong;Park, Suk-Hee;Park, Sang-Hu;Yang, Dong-Yol
    • Journal of the Korean Society for Precision Engineering
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    • v.33 no.4
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    • pp.265-270
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    • 2016
  • Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.

Fabrication of the Micro-pump using Stereolithography Technology (Stereolithography 기술을 이용한 마이크로 펌프 제작)

  • Lee, Young-Tae;Seo, Hee-Don
    • Journal of Sensor Science and Technology
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    • v.10 no.4
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    • pp.232-238
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    • 2001
  • We fabricated micro-pump using stereolithography technology. The pump was fabricated using PZT for its drive and used non-movable valve of diffuser/nozzle concept. Size of the pump chamber is, $14mm{\psi}$, narrow hole of diffuser/nozzle is $0.5mm{\psi}$ and wide hole $1mm{\psi}$ and chamber depth is 1.2mm, respectively. We confirmed its operation at frequency 100Hz, supply voltage $90{\sim}250Vp-p$. As the result of the pump working measurement, when ethanol is used, the pressure head difference between inlet and outlet of the pump is about 53mm in the frequency of 100Hz, 200V of Vp-p.

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A Study on Resin flow Analysis and Free Surface forming at Micro-stereolithography using a Dynamic Pattern Generator (동적 패턴 생성기를 이용한 마이크로 광 조형 시스템에서 수지 유동 해석 및 자유표면 형성에 관한 연구)

  • Won M.H.;Choi J.W.;Ha Y.M.;Lee S.H.;Kim H.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.878-881
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    • 2005
  • A Stereolithography technology is based on stacking of sliced layer from STL file that is converted from 3-dimensional CAD data. A microstereolithography technology is evolved from conventional stereolithography to fabricate microstructures. In this technology, we have to consider influence of resin flow to make refresh surface. To generate new resin surface, stage has to be moved downward deeply and upward to desired position. At this time, resin flow affects to refresh surface of resin. And resin viscosity is the key factor in simulation of resin flow. By setting optimal refresh time for resin surface, total fabrication time is reduced and there is no damage to fabricated layers. In this research, we simulate resin flow using CFD software and derive optimal stage moving time and dwelling time.

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