• 한국기계가공학회지
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• 제13권2호
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• pp.64-72
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• 2014

In the past, prism patterns have been linear triangular shapeswith a $90^{\circ}$ angle; however, new micro prism patterns having acute angles or obtuse angles have recently been the subject of demandin the display, lighting and photovoltaic industries. Micro-cutting experiments for micro-prism patterns having $60^{\circ}$, $90^{\circ}$, and $120^{\circ}$ angles on an electroplated Ni mold were performed and it was found in this study that the specific cutting resistance increased with a decrease in the tool angles (prism pattern angles). The cause of this variation had been thought to be the increase of the ploughing force due to tip rounding and the friction force due to the edge effect. However, the depth of the cut was large enough that it was possible to neglect these effects. Therefore, this study introduced the concept of representative stress of indentation. The measured stress was varied according to the indentation depth eventhoughthetestedspecimenswereidentical ; the varied stress was termed the representative stress. According to indentation theory, the strain that the Ni mold experienced increased with a decrease in the tool angle. Based on the stress-strain relationship, higher strain means higher stress and higher specific cutting resistance. Therefore, the specific cutting resistance was higher at smaller tool angles that had higher strain and stress.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.820-823
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• 2002

MEMS structures Generally have been fabricated using surface-machining, but the interface failure between silicon substrate and evaporated thin film frequently takes place due to difference of linear coefficient of thermal expansion. Therefore this paper studied the effect of the residual stress caused by variable external loads. This study did not analyzed accurate quantity of the residual stress but trend for the effect of residual stress. Several specimens were fabricated using other material(Al, Au and Cu) and thermal load was applied. The residual stress was measured by nano-indentation using AFM. The results showed the existence of the residual stress due to thermal load. The indentation area of the thermal loaded thin film reduced about 3.5% comparing with the virgin thin film caused by residual stress. The finite element analysis results are similar to indentation test.

• 대한기계학회논문집A
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• 제26권10호
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• pp.2089-2095
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• 2002

Ceramic/metal composites have many attractive properties and great potential fur applications. Interfacial fracture properties of different layered composites are important in material integrity. Therefore, evaluation of fracture toughness at interface is required in essence. In this study, the mechanical characteristics for interface of ceramic/metal composites were investigated by indentation test of micro-hardness method. Apparent interfacial toughness of TBC system could be determined with a relation between the applied load and the length of the crack formed at the interface by indentation test.

• 한국분말재료학회지
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• 제18권1호
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• pp.64-72
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• 2011

Nondestructive instrumented indentation test is the method to evaluate the mechanical properties by analyzing load - displacement curve when forming indentation on the surface of the specimen within hundreds of micro-indentation depth. Resistance spot welded samples are known to difficult to measure the local mechanical properties due to the combination of microstructural changes with heat input. Particularly, more difficulties arise to evaluate local mechanical properties of resistance spot welds because of having narrow HAZ, as well as dramatic changed in microstructure and hardness properties across the welds. In this study, evaluation of the local mechanical properties of resistance spot welds was carried out using the characterization of Instrumented Indentation testing. Resistance spot welding were performed for 590MPa DP (Dual Phase) steels and 780MPa TRIP (Transformation Induced Plasticity) steels following ISO 18278-2 condition. Mechanical properties of base metal using tensile test and Instrumented Indentation test showed similar results. Also it is possible to measure local mechanical properties of the center of fusion zone, edge of fusion zone, HAZ and base metal regions by using instrumented indentation test. Therefore, measurement of local mechanical properties using instrumented indentation test is efficient, reliable and relatively simple technique to evaluate the tensile strength, yield strength and hardening exponent.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1537-1540
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• 2003

MEMS technology with micro scale is complete system utilized as the sensor. micro electro device. The metallization of MEMS is very important to transfer the power operating the sensor and signal induced from sensor part. But in the MEMS structures local stress concentration and deformation is often happened by geometrical shape and different constraint on the metallization. Therefore. this paper studies the effect of supporting type and thickness ratio about thin film thickness of the substrate thickness for the residual stress variation caused by thermal load in the multi-layer thin film. Specimens were made from materials such as Al, Au and Cu and uniform thermal load was applied, repeatedly. The residual stress was measured by FEA and nano-indentation using AFM. Generally, the specimen made of Al induced the large residual stress and the 1st layer made of Al reduced the residual stress about half percent than 2nd layer. Specimen made of Cu and Au being the lower thermal expansion coefficient induce the minimum residual stress. Similarly the lowest indentation length was measured in the Au_Cu specimen by nano-indentation.

• Journal of Mechanical Science and Technology
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• 제18권10호
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• pp.1772-1781
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• 2004

The mechanical as well as tribological characteristics of coating films as thin as a few nm become more crucial as applications in micro-systems grow. Especially, the amorphous carbon film has a potential to be used as a protective layer for micro-systems. In this work, quantitative evaluation of nano-indentation, scratching, and wear tests were performed on the 7nm thick amorphous carbon film using an Atomic Force Microscope (AFM). It was shown that AFM-based nano-indentation using a diamond coated tip can be feasibly utilized for mechanical characterization of ultra-thin films. Also, it was found that the critical load where the failure of the carbon film occurred was about 18${\mu}$N by the ramp load scratch test. Finally, the wear experimental results showed that the quantitative wear rate of the carbon film ranged 10$\^$-9/～10$\^$-8/ ㎣ /N cycle. These experimental methods can be effectively utilized for a better understanding the mechanical and tribological characteristics at the nano-scale.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.471-474
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• 2005

This study investigates the nano/microstructure, the aging response, and the mechanical/tribological properties of the eutectic regions in rheoformed A356 alloy-T5 parts using nano/micro-indentation and mechanical scratching, combined with optical microscopy and atomic force microscope (AFM). Most eutectic Si crystals in the A356 alloy showed a modified morphology as fine-fibers. The loading curve for the eutectic region was more irregular than that of the primary Al region due to the presence of various particles of varying strength. The aging responses of the eutectic regions in the rheoformed A356 alloys aged at $150^{\circ}C$ for different times (0, 2, 4, 8, 10, 16, 24, 36, and 72 h) were investigated. Both Victors hardness $(H_v)$ and indentation $(H_{IT})$ test results showed a similar trend of aging curves, and the peak was obtained at the same aging time of 10 h. A remarkable size-dependence of the tests was found.

• Design & Manufacturing
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• 제14권1호
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• pp.36-41
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• 2020

Recently, due to the development of MEMS technology, researches for the production of effective micro structures and shapes have been actively conducted. However, the process technology based on chemical etching has a number of problems such as environmental pollution and time problems due to multi-process. Various processes to cope with this process are being studied, and one of the mechanical etching processes is the powder blasting process. This process is a method of spraying fine particles, which has the advantage of being an effective process in manufacturing hard brittle materials. However, it is also a process that adversely affects the material surface roughness and material properties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silica glass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyze the micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. The analysis was performed for the effective processing of powder blasting.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1744-1748
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• 2007

In this study, the Johnson-Kendall-Roberts (JKR) theory was combined with the instrumented indentation technique (IIT) to evaluate work of adhesion and modulus of elastomeric polymer. Indentation test was used to obtain the load-displacement data for contacts between Tungsten Carbide indenter and elastomeric polymer. And the JKR contact model, contrived to take viscoelastic effects of polymer into account, was applied to compensate the contact area and the elastic modulus which Hertzian contact model would underestimate and overestimate, respectively. Besides, we could obtain the thermodynamic work of adhesion by considering the surface energy in this contact model. In order to define the relation between JKR contact area and applied load without optical measuring of contact area, we used the relation between applied load and contact stiffness by examining the correlation between JKR contact area and stiffness through dimensional analysis with 14 kinds of elastomeric polymer. From this work, it could be demonstrated that the interfacial work of adhesion and elastic modulus of compliant polymer can be obtained from a simple instrumented indentation testing without area measurement, and provided as the main algorithm of compliant polymer characterization.

• 한국세라믹학회지
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• 제42권8호
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• pp.537-541
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• 2005

Silicon nitride is one of the most successful engineering ceramics, owing to a favorable combination of properties, including high strength, high hardness, low thermal expansion coefficient, and high fracture toughness. However, the impact damage behavior of $Si_3N_4$ ceramics has not been widely characterized. In this study, sphere and explosive indentations were used to characterize the static and dynamic damage behavior of $Si_3N_4$ ceramics with different microstructures. Three grades of $Si_3N_4$ with different grain size and shape, fine-equiaxed, medium, and coarse-elongated, were prepared. In order to observe the subsurface damaged zone, a bonded-interface technique was adopted. Subsurface damage evolution of the specimens was then characterized extensively using optical and electron microscopy. It was found that the damage response depends strongly on the microstructure of the ceramics, particularly on the glassy grain boundary phase. In the case of static indentation, examination of subsurface damage revealed competition between brittle and ductile damage modes. In contrast to static indentation results, dynamic indentation induces a massive subsurface yield zone that contains severe micro-failures. In this study, it is suggested that the weak glassy grain boundary phase plays an important role in the resistance to dynamic fracture.