• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.383-388
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• 2005

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, Research about micro forming process to be related to multi process forming must be preceded first. Material selection and analysis about micro forming process are accomplished in this paper. And the basis research to make actual system is accomplished.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.166-171
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• 2007

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, we set the application product to a micro thin foil valve which is used in the micro pump module. The compound die set has been designed and manufactured to make two step process. The material of thin foil valve is SUS-304 and its thickness is 50$\mu$m. We can get a good forming results from micro punching experiments in this paper.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.64-67
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• 2009

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Single crystal Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height was similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.2 s.245
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• pp.157-163
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• 2006

Our research dealt with micro fabrication using micro forming process. The goal of the research was to establish the limit of forming process concerning the size of forming material and formed shape. Flat-rolled ultra thin metallic foils of pure copper(3.0 and $1.0{\mu}m$ in thickness)and stainless steel($2.5{\mu}m$ in thickness) were used for forming material. We obtained the various shapes of micro channels as using designed forming process. $12-14{\mu}m$ wide and $9{\mu}m$ deep channels were made on $3.0{\mu}m$ thick foil and $6{\mu}m$ wide and $3{\mu}m$deep channels were made on $1.0{\mu}m$ thick foil. Si wafer die for forming was fabricated by using etching technique. And the relation of etching time and die dimension was investigated for fabricating precisely die groove. For the forming, die and metal foil were vacuum packed and the forming was conducted with a cold isostatic press. The formed channels were examined in terms of their dimension, surface qualities and potential for defects. Base on the examinations, formability of ultra thin metallic foil was also discussed. Finally, we compared the forming result with simulation. The result of research showed that metal forming technology is promising to produce micro parts.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.05a
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• pp.258-262
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• 2008

Micro forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). In this study, the micro forming property was studied, using Al5083 superplastic alloy with micro grain, suitable for the micro forming process and Zr-BMG amorphous with pseudo-superplastic phenomena in the supercooled liquid state. Micro forming experiments under stastic load status showed that distortion by slip and spin of the grain system and slip inside the grain was observed in the Al5083 superplastic alloy. In case of Zr-BMG, because there is no grain, the distribution of the forming property was similar to the load distribution between punch and metal.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.254-258
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• 2009

In this paper, the low frequency vibration forming system is developed for micro-patterns formation on the metal substrate. many researchers have studied about micro-forming technologies such as micro deep drawing, press forming, forging, extrusion etc. for the formation of precise micro-patterns on the surface of metal substrates, multi-step forming process must be used to improve qualifies of the deformed patterns. Since the low frequency vibration forming system could easily deform the surface of metal substrates, several steps of multi-step forming process should be removed by using the low frequency vibration forming system. In order to find optimal process conditions, we have carried out low frequency vibration forming process with varying the vibration frequency from 110Hz to 500Hz.

• Transactions of Materials Processing
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• v.23 no.8
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• pp.507-512
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• 2014

The objective of the current investigation is to establish techniques in micro pattern forming operations of polymeric circular tubes by using hydrostatic pressing. This method was developed and successfully applied to the micro pattern forming on polymeric plates. The key idea of the new technique is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature of the polymeric substrates. The new process is thought to be a promising micro-pattern fabrication technique for two reasons; first, (hydro-) isostatic pressing ensures a uniform micro-pattern replicating condition regardless of the substrate area and thickness. Second, multiple curved substrates can be patterned at the same time. With the prototype forming machine for the new process, micro prismatic array patterns, 25um in height and 90 degrees in apex angle, were successfully made on the PMMA circular tubes with diameters of 5~40mm. These results show that this process can be also used in the micro pattern forming process on curved plates such as circular tube.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.379-382
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• 2007

The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution. This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools become smaller in size, minute inertia force and high natural frequency can be obtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffness frame, high precision actuating part, structural analysis, high precision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.193-200
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• 2007

Micro forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). Al5083 superplastic alloy with very small grains has a great advantage in achieving micro deformation under low stress due to its relatively low strength at a specific high temperature range. Micro forming of $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk Metallic glass(BMG) as a candidate material for this developing process are feasible at a relatively low stress in the supercooled liquid state without any crystallization during hot deformation. In this study, the micro formability of Al5083 superplastic alloy and bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$, was investigated with the specially designed micro vibration forming system using pyramid-shape, V-shape and U-shape micro die pattern. With these dies, micro vibration forming was conducted by varying the applied load, time. Micro formability was estimated by comparing the hight of formed shape using non-contact surface profiler system. The vibration load effect to metal flow in the micro die and improve the micro formability of Al5083 superplastic alloy and $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk Metallic glass(BMG).