• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.8 s.197
• /
• pp.108-115
• /
• 2007

3D nano-scale manufacturing is an important aspect of advanced manufacturing technology. A key element in ability to view, fabricate, and in some cases operate micro-devices is the availability of tightly focused particle beams, particularly of photons, electrons, and ions. The use of ions is the only way to fabricate directly micro-/ nano-scale structures. It has been utilized as a direct-write method for lithography, implantation, and milling of functional devices. The simulation of ion beam induced physical and chemical phenomena based on sound mathematical models associated with simulation methods is presented for 3D micro-/nanofabrication. The results obtained from experimental investigation and characteristics of ion beam induced direct fabrication will be discussed.

• Steel and Composite Structures
• /
• v.46 no.1
• /
• pp.143-152
• /
• 2023

In this paper, static and dynamic bending of nanocomposite micro beam armed with CNTs considering agglomeration effect is studied. The structural damping is considered by Kelvin-Voigt model. The agglomeration effects are assumed using Mori-Tanaka model. The micro beam is modeled by third order shear deformation theory (TSDT). The motion equations are derived by principle of Hamilton's and energy method assuming size effects on the basis of Eringen theory. Using differential quadrature method (DQM) and Newmark method, the static and dynamic deflections of the structure are obtained. The effects of agglomeration and CNTs volume percent, damping of structure, nonlocal parameter, length and thickness of micro-beam are presented on the static and dynamic deflections of the nanocomposite structure. Results show that with increasing CNTs volume percent, the static and dynamic deflections are decreased. In addition, enhancing the nonlocal parameter yields to higher static and dynamic deflections.

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.1540-1545
• /
• 2004

Measurement of concentration fields in a micro-channel is the crucial technology in the area of Lab-on-a-chip to be used for various bio-chemical applications. It is wel-known that the only possible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been made so far due to the limit of light illumination. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having 5 microns thickness by a micro focus laser line generator. Nile Blue A was used as fluorescent dye for LIF measurement. The laser sheet beam illuminates an exact plane of concentration measurement in the micro-channel to increase the signal to noise ratio and reduce the depth uncertainty considerably.

• 한국가시화정보학회:학술대회논문집
• /
• 2004.11a
• /
• pp.86-89
• /
• 2004

One most feasible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been successfully achieved so far due to various limitations in the light illumination and fluorescence signal detection. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having five(5) microns thickness by use of a micro focus laser line generator. The laser sheet beam illuminates an exact plane of concentration measurement field to increase the signal to noise ratio and considerably reduce the depth uncertainty. Nile Blue A was used as fluorescent dye for the present LIF measurement. The enhancement of the fluorescent intensity signals was performed by a solvent mixture of water $(95\%)$ and ethanol (EtOH)/methanol (MeOH) $(5\%)$ mixture. To reduce the rms errors resulted from the CCD electronic noise and other sources, an expansion of grid size was attempted from $1\times1$ to 3(3 or 5(5 pixel data windows and the pertinent signal-to-noise level has been noticeably increased accordingly.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.15 no.6
• /
• pp.71-75
• /
• 2006

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. The target of this paper is the analysis of FIB sputtering process according to tilt angle, dwell time and overlap for application of 3D micro and pattern fabrication and to find the effective beam scanning conditions using Taguchi method. Therefore we make the conclusions that tilt angle is dominant parameter for sputtering yield. Burr size is reduced as tilt angle is higher.

• Proceedings of the KIEE Conference
• /
• 2000.11c
• /
• pp.594-596
• /
• 2000

The best simulation condition for the fiber collimator that uses ball lenses was investigated. This kind of fiber collimator can be used in a Micro-Optical-Cross-Connects(MOXC). MOXC is composed of collimating ball lenses, micro mirrors and single-mode fibers. In order to design a MOXC, it is very important to calculate beam path, beam radius, divergence angle that determines the insertion loss of the MOXC. Since the beam profile from the fiber facet is not exact Gaussian profile, it was found that the simulation condition in which beam waist exists on the fiber facet, ignoring Numerical Aperture(NA), gives best agreement with the experimental results. Beam radii were measured with conventional knife edge method.

• Structural Engineering and Mechanics
• /
• v.64 no.4
• /
• pp.403-411
• /
• 2017

In this article, analytical solution for free vibration of micro composite laminated beam on elastic medium based on modified couple stress are presented. The surrounding elastic medium is modeled as the Winkler elastic foundation. The governing equations and boundary conditions are obtained by using the principle of minimum potential energy for EulerBernoulli beam. For investigating the effect of different parameters including material length scale, beam thickness, some numerical results on different cross ply laminated beams such as (90,0,90), (0,90,0), (90,90,90) and (0,0,0) are presented on elastic medium. Free vibration analysis of a simply supported beam is considered utilizing the Fourier series. Also, the fundamental frequency is obtained using the principle of Hamilton for four types of cross ply laminations with hinged-hinged boundary conditions and different beam theories. The fundamental frequency for different thin beam theories are investigated by increasing the slenderness ratio and various foundation coefficients. The results prove that the modified couple stress theory increases the natural frequency under the various foundation for free vibration of composite laminated micro beams.

• 한국가시화정보학회:학술대회논문집
• /
• 2002.11a
• /
• pp.31-34
• /
• 2002

Imaging techniques using x-ray beam at high energies (>6KeV) such as contact radiography, projection microscopy, and tomography have been used to nondestructively discern internal structure of objects in material science, biology, and medicine. This paper introduces the x-ray micro-imaging method using 1B2 micro-probe line of PAL (Pohang Accelerator Laboratory). Cross-sectional information on low electron density materials can be obtained by probing a sample with coherent synchrotron x-ray beam in an in-line holography setup. Living organism such as plants, insects are practically transparent to high energy x-rays and create phase shift images of x-ray wave front. X-ray micro-images of micro-bubbles of $20\~120\;{\mu}m$ diameter in an opaque tube were recorded. Clear phase contrast images were obtained at Interfaces between bubbles and surrounding liquid due to different decrements of refractive index.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2004.05a
• /
• pp.315-319
• /
• 2004

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.8
• /
• pp.966-974
• /
• 2011

The use of ion beams in the micro/nano scale is greatly increased by technology development. Especially, focused ion beams (FIBs) have a great potential to fabricate the device in sub micro scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the redeposition effect due to the sputtered atoms. In this research, we demonstrate a way which can be used to fabricate mold structures on a silicon substrate using FIBs. For the purpose of the demonstration, two essential subjects are necessary. One is that focused ion beam diameter as well as shape has to be measured and verified. The other one is that the accurate rotational symmetric model of ion-solid interaction has to be mathematically developed. We apply those two, measured beam diameter and mathematical model, to fabricate optical lenses mold on silicon. The characteristics of silicon mold fabrication will be discussed as well as simulation results.