• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1874-1879
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• 2008

It is not easy to detect nano-sized airborne particles (< 100 nm in diameter) in air. Therefore, the condensation of the nanoparticles alongside of the size-classification is needed for their detection. This paper proposes a hybrid (aerodynamic+electrical) particle classification and condensation device using a micro virtual impactor (${\mu}VI$). The ${\mu}VI$ can classify the nanoparticles according to their size and condense the number concentration of nanoparticles interested. Firstly, the classification efficiency of the ${\mu}VI$ was measured for the particles, polystyrene latex (PSL), ranging from 80 to 250 nm in diameter. Secondly, the nanoparticles, NaCl of 50 nm in diameter, were condensed by 4 times higher. In consequence, the output signal was amplified by 4 times (before condensation: 4 fA, after condensation: 16 fA). It is expected that the proposed device will facilitate the detection of nanoparticles.