• Transactions of Materials Processing
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• v.15 no.9 s.90
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• pp.654-659
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• 2006

In this paper, the real shapes of micro tool deflection were observed. In micro endmilling process, micro tool deflection generates very serious problems in contrast to macro tool deflection. For analyzing the micro tool deflection, the trend of micro tool deflection was observed using real captured images in this paper. To get the real images of micro tool deflection, micro slot cutting processes were executed under cutting volume using micro endmill($Dia.\;200{\mu}m$) and real images of tool deflection were obtained during cutting processing by high-speed camera. Finally, the extent of tool deflection was calculated by the deflection angle according to cutting volume.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.498-503
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• 2010

The main purpose of this study strongly concerned micro machining error estimation by using FEM analysis of tool deflection shapes in micro flat end-milling process. For the precision micro flat end-milling process, analysis of micro cutting errors is mandatory. In general, tool deflection is a major factor which causes cutting error and limits realization of the high-precision cutting process. Especially, in micro end-milling process, micro tool deflection generates very serious problems in contrast to macro tool deflection. Methods which deal with compensation of cutting error by tool deflection in macro end-milling process have been studied plentifully but, few researches transact with micro scaled cutting tool deflection in micro cutting process. Therefore, the trend of micro tool deflection was estimated by using FEM analysis in this paper. Cutting forces were acquired by micro dynamometer and these were utilized in FEM analysis. In order to verify FEM analysis results, micro machining processes were carried out and real machined profiles were compared with FEM results. Finally through the proposed approach well suited FEM results were obtained.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.121-127
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• 2008

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

• Design & Manufacturing
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• v.13 no.1
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• pp.5-12
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• 2019

In this paper, we studied the micro tool deflection, micro cutting with low temperature, and deformation of micro ribs caused by cutting forces. First, we performed an integrated machining error compensation method based on captured images of tool deflection shapes in micro cutting process. In micro cutting process, micro tool deflection generates very serious problems in contrast to macro tool deflection. To get the real images of micro tool deflection, it is possible to estimate tool deflection in cutting conditions modeled and to compensate for machining errors using an iterative algorithm correcting tool path. Second, in macro cutting fields, the cryogenic cutting process has been applied to cut the refractory metal but, the serious problem may be generated in micro cutting fields by the cryogenic environment. However, if the proper low temperature is applied to micro cutting area, the cooling effect of cutting heat is expected. Such effect can make the reduction of tool wear and burr formation. For verifying this passibility, the micro cutting experiment at low temperature was performed and SEM images were analyzed. Third, the micro pattern was deformed by the cutting forces and the shape error occurred in the sidewall multi-step cutting process were minimized. As the results, the relationship between the cutting conditions and the deformation of micro-structure during micro cutting process was investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1897-1901
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• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1902-1906
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• 2003

Micro-milling is an efficient method for fabricating micro structures because of its high machining rate compared with other non-conventional micro machining processes. But it is not easy to make a micro milling tool with less than 50 $\mu\textrm{m}$ in diameter by conventional machining. In this study, the characteristics of a micro milling tool fabricated by wire electrical discharge machining (WEDM) were studied. The workpiece is copper and stainless steel. The effects of some machining conditions such as feed rate, depth of cut, and a shape of tool were studied. The tools with D-shape and square shape in cross section were tested for machining micro grooves and 3D structures.

• Journal of Sensor Science and Technology
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• v.18 no.2
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• pp.122-127
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• 2009

We have developed and reported several micro-spikes for minimally invasive biopsy. In this paper, a micro-tissue collecting tool for tissue diagnosis extracted by micro-spike is presented. Using proposed polydimethy-siloxane (PDMS) micro-tissue collecting tool, which has a negative micro-spike structure in a porous chamber, the extracted tissue in a micro-spike is effectively detached. The gastro-intestinal tissue of a pig is extracted in an in vivo environment, and then it is detached from a micro-spike using the PDMS micro-tissue collecting tool. A fine clinical picture of the detached tissue is acquired.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.3
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• pp.133-140
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• 2004

Recently reduction of industrial products in size and weight has been increased by application of micro-drills in gadgets of high precision and a great interest of a micro-drilling has been raised. Due to the lack of tool stiffness and the chip packing, the micro-drilling requires not only the robust tool structure which has not affected by vibration but also effective drilling methods designed to prevent tool fracture from cutting troubles. This paper presents an optimum design shape of a 0.15 mm micro-drill associated with a new manufacturing process to improve the production rate and to lengthen the tool life and suggestions on the micro-drilling characteristic properties associated with the tool life and workpiece quality.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.5
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• pp.13-20
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• 2005

Micro EDM process is generally used for machining microholes, cavities, and three dimensional shapes. For machining micro structures, first of all, micro tool electrode is indispensable and WEDG system is proposed for tool fabrication method. When using WEDG, its machining characteristics are highly affected by many EDM parameters such as applied voltage, current, rotation speed, capacitance, and pulse duration. Therefore, the design of experiment is introduced to fully understand the effect of the EDM parameters on machining tool electrode. And an attempt has been made to develop the mathematical model for predicting the size of the tool electrode by calculating spark distance. The suggested model was verified with experiment and predicted working gap distance is in good accord with the measured value.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.190-204
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• 2004

The objective of this study is to develop a highly accurate micro tool alignment system applicable to the micro machining technology. In a specific application such as micro hole punching, radial clearance between micro tools is order of a few micron. Under this micron scale tool clearance, accuracy of tool alignment is very important for ensuring hole quality. In the present study, a two-way image acquisition system was developed, which can produce overlapped image of both micro tools that face each other, and applied to the tool alignment in the micro punching. Also, to meet alignment accuracy of tools within $1\mu\textrm{m}$, the cross correlation image processing algorithm was employed. With this system, $25\mu\textrm{m}$ punching tools with $1\mu\textrm{m}$ radial clearance could be accurately aligned.