• 제목/요약/키워드: micro system technology

검색결과 1,369건 처리시간 0.025초

Modeling and Control of a Four Mount Active Micro-vibration Isolation System

  • Banik, Rahul;Gweon, Dae-Gab
    • 반도체디스플레이기술학회지
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    • 제5권4호
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    • pp.41-45
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    • 2006
  • Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

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속삭임 통화를 위한 휴대 전화용 마이크로폰 시스템 (The microphone system of the cellular phone for privately telephonic communication)

  • 최성준;문원규;이정현
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2001년도 추계학술대회논문집 II
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    • pp.1335-1340
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    • 2001
  • The information technology brought us many kinds of conveniences to our life, but it also caused social problems such as privacy interference, unexpected personal information leaks, and nose generation by telephonic talks, etc. In this paper, the microphone system of the cellular phone is developed to prevent these problems caused by progress of information technology. The developed system was designed to detect only acoustic signals from a human being in the presence of various kinds of background noises. A windscreen was designed by use of micro-channels to eliminate the popping noise by the wind from the mouth of a speaker and four microphone array and signal processing techniques are applied to reduce background noise. The impact of the developed system was evaluated by experimental tests. The results show that the system can improve the required functions considerably.

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위상 및 방향 변조를 위한 초소형 광 변조기의 설계와 제작 (Design and Fabrication of Micro SLM for Phase and Amplitude Modulation)

  • 장석환;김용권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 G
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    • pp.3298-3300
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    • 1999
  • In this paper, a $10{\times}10$ micro SLM array for phase and amplitude modulation of incident light is designed and fabricated using surface micromachining technology. Hidden spring structure is used in order to maximize the fill-factor and minimize diffraction effect at the support posts. Static and dynamic characteristics of designed micro SLM are simulated with ABAQUS and measured with optical measurement system using He-Ne laser and PSD(position sensitive devise).

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Microfluidic Components and Bio-reactors for Miniaturized Bio-chip Applications

  • Euisik Yoon;Yun, Kwang-Seok
    • Biotechnology and Bioprocess Engineering:BBE
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    • 제9권2호
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    • pp.86-92
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    • 2004
  • In this paper miniaturized disposable micro/nanofluidic components applicable to bio chip, chemical analyzer and biomedical monitoring system, such as blood analysis, micro dosing system and cell experiment, etc are reported. This system includes various microfluidic components including a micropump, micromixer, DNA purification chip and single-cell assay chip. For low voltage and low power operation, a surface tension-driven micropump is presented, as well as a micromixer, which was implemented using MEMS technology, for efficient liquid mixing is also introduced. As bio-reactors, DNA purification and single-cell assay devices, for the extraction of pure DNA from liquid mixture or blood and for cellular engineering or high-throughput screening, respectively, are presented.

MEMS 기술 기반 이식형 청각 장치용 전자기 엑츄에이터의 소형화 및 최적화 (Miniaturization and Optimization of Electromagnetic Actuators for Implantable Hearing Device Based on MEMS Technology)

  • 김민규;정용섭;조진호
    • 센서학회지
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    • 제27권2호
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    • pp.99-104
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    • 2018
  • A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

마이크로 스피커 진동판의 형상설계에 따른 진동특성 고찰 (Investigation on Vibration Characteristics of Micro Speaker Diaphragms for Various Shape Designs)

  • 김경민;김성걸;박근
    • 한국정밀공학회지
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    • 제30권8호
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    • pp.790-796
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    • 2013
  • Micro-speaker diaphragms play an important role in generating a desired audio response. The diaphragm is generally a circular membrane, and the cross section is a double dome, with an inner dome and an outer dome. To improve the sound quality of the speaker, a number of corrugations may be included in the outer dome region. In this study, the role of these corrugations is investigated using two kinds of finite element method (FEM) calculations. Structural FEM modeling was carried out to investigate the change in stiffness of the diaphragm when the corrugations were included. Modal FEM modeling was then carried out to compare the natural frequencies and the resulting vibrational modes of the plain and corrugated diaphragms. The effects of the corrugations on the vibration characteristics of the diaphragm are discussed.

핫엠보싱 충전공정에 관한 수치해석 (Numerical simulation of hot embossing filling)

  • 강태곤;권태헌
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2005년도 춘계학술대회 논문집
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    • pp.43-46
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    • 2005
  • Micro molding technology is a promising mass production technology for polymer based microstructures. Mass production technologies such as the micro injection/compression molding, hot embossing, and micro reaction molding are already in use. In the present study, we have developed a numerical analysis system to simulate three-dimensional non-isothermal cavity filling for hot embossing, with a special emphasis on the free surface capturing. Precise free surface capturing has been successfully accomplished with the level set method, which is solved by means of the Runge-Kutta discontinuous Galerkin (RKDG) method. The RKDG method turns out to be excellent from the viewpoint of both numerical stability and accuracy of volume conservation. The Stokes equations are solved by the stabilized finite element method using the equal order tri-linear interpolation function. To prevent possible numerical oscillation in temperature Held we employ the streamline upwind Petrov-Galerkin (SUPG) method. With the developed code we investigated the detailed change of free surface shape in time during the mold filling. In the filling simulation of a simple rectangular cavity with repeating protruded parts, we find out that filling patterns are significantly influenced by the geometric characteristics such as the thickness of base plate and the aspect ratio and pitch of repeating microstructures. The numerical analysis system enables us to understand the basic flow and material deformation taking place during the cavity filling stage in microstructure fabrications.

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Optimization of an extra vessel electromagnetic pump for Lead-Bismuth eutectic coolant circulation in a non-refueling full-life small reactor

  • Kang, Tae Uk;Kwak, Jae Sik;Kim, Hee Reyoung
    • Nuclear Engineering and Technology
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    • 제54권10호
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    • pp.3919-3927
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    • 2022
  • This study presents an optimal design of the coolant system of a non-refueling full-life small reactor by analyzing the space-integrated geometrical and electromagnetic variables of an extra vessel electromagnetic pump (EVEMP) for the circulation of a lead-bismuth eutectic (LBE) coolant. The EVEMP is an ideal alternative to the thermal-hydraulic system of non-refueling full-life micro reactors as it possesses no internal structures, such as impellors or sealing structures, for the transportation of LBE. Typically, the LBE passes through the annular flow channel of a reactor, is cooled by the heat exchanger, and then circulates back to the EVEMP flow channel. This thermal-hydraulic flow method is similar to natural circulation, which enhances thermal efficiency, while providing a golden time for cooling cores in the event of an emergency. When the forced circulation technology of the EVEMP was applied, the non-refueling full-life micro reactor achieve an output power of 60 MWt, which is higher than that achievable via the natural circulation method (30 MWt). Accordingly, an optimized EVEMP for Micro URANUS with a flow rate of 4196 kg/s and developed pressure of 73 kPa under a working temperature of 250 ℃ was designed.

증설이 용이한 ESS기반 하이브리드 발전시스템 연구 (A Study on ESS-based hybrid power generation system with easy expansion)

  • 김희철
    • 융합정보논문지
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    • 제9권1호
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    • pp.68-73
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    • 2019
  • 본 연구는 스마트분전반 MG(;Micro-Grid) 구성의 중심축으로 모듈형 하이브리드 발전원과 DC버스를 통하여 링크를 갖으며 표준소켓을 사용하여 불법연결을 감지 차단하는 기능을 부여하고, 전력계통의 안정화를 달성함을 목적으로 한다. 전력변환장치, 스마트분전반, 통합제어시스템의 개발과 효율적인 수요관리가 필요하며, MG 전체시스템과의 호환성이 절실하다. 이는 공통 전력 연결 규약으로 안전하고 누구나 연결을 쉽게 할 수 있는 하이브리드발전시스템으로 데이터 관리가 용이해지고 다양한 제조사의 시스템 확대설치에 대한 대비가 가능하다.

러너와 가이드 베인의 연동을 통한 마이크로 카프란 수차의 출력 최적화 (Output Optimization of Microhydro Kaplan Turbine by Double Regulating Runner and Guide Vane)

  • 박노현;이영우
    • 한국유체기계학회 논문집
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    • 제16권1호
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    • pp.17-23
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    • 2013
  • Recently so much attention has been focused on renewable energy and, since its sources to exploit are already almost saturated in the country, the practical alternative to this situation could be a micro-turbine which uses the low head and low flow. From a point of view of local micro-turbine design capacity and manufacturing technology, the problems such as the accumulation of technical skills, the expansion of related industries, the national policy expansion and the turbine efficiency to improve are still vulnerable and it's true that there are also negative views about the economic feasibility, the technicity and the operation management of the micro-turbine. However, if the improvement can be done in technology of low-head double regulation micro-turbine to generate more outputs and the operation management can be reliably realized, the micro-turbine will be re-evaluated as an appliable source of renewable energy, even the output is small, and by a paradigm shift, it could realize a power generation as an economic and rational system.