• Journal of Magnetics
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• 제10권3호
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• pp.122-127
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• 2005

New classes of LC resonators for micro magnetic sensor device were proposed and fabricated. The first type LC resonator (Type I) consists of a small piece of microwire and two cylindrical electrodes at the end of the microwire without direct contact to its ferromagnetic core. In type I resonator the ferromagnetic core of the microwire and cylindrical electrodes act as an inductor and two capacitors respectively to form a LC circuit. The second type LC resonator (Type II) consists of a solenoidal micro-inductor with a bundle of soft magnetic microwires as a core. The solenoidal micro-inductors fabricated by MEMS technique were $500\sim1,000\;\mu{m}$ in length with $10\sim20$ turns. A capacitor is connected in parallel to the micro-inductor to form a LC circuit. A tiny glass coated $CO_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire was fabricated by a glass-coated melt spinning technique. A supergiant magneto-impedance effect was found in a type I resonator as much as 400,000% by precise tuning frequency at around 518.51 MHz. In type II resonator the changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. The phase angle between current and voltage was also strongly dependent on the magnetic field. The drastic increments of magnetoimpedance at near the resonance frequency were observed in both types of LC resonators. Accordingly, the sudden change of the phase angle, as large as $180^{\circ}C$, evidenced the occurrence of the resonance at a given external magnetic field.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.447-447
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• 2011

We studied to detect the mass variation using micro mechanical resonator. For measuring the resonance frequency of the micro mechanical system, optical method using laser interference is selected. A simple resonator is prepared by attaching an AFM cantilever on the piezo stack. The piezo stack makes a the cantilever vibrated with its resonance frequency. To change the mass of the resonator, gold was evaporated on the cantilever. We measured how much resonance frequency was changed according to the amount of gold attached on cantilever. This resonator is able to perform the role of a mass sensor and has a resolution of the order of micrograms. The fabrication of the resonator and measurement setup for detecting the mechanical resonance will be introduced in this presentation.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권6호
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• pp.494-502
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• 1999

This paper represents an electrostatic micro plate resonator which consists of a rigid plate suspended with four bridges and a counter electrode. The bridges of the resonator are designed corrugated so that the residual stress are released. The FEM simulation results confirmed that the deflection characteristic of the corrugated bridge is hardly affected by the initial residual tensile stress. One resonator with the corrugated bridges and the other with the flat bridges were fabricated by the boron diffusion process and the anisotropic etch process. The vertical deflection of the fabricated electrostatic resonator was measured with a laser vibrometer, and the data were compared with the calculation results. The deflection of the resonator with the flat bridges is smaller than the deflection of that with the corrugated ones because of the residual stress. The residual stress release effect was confirmed by the fact that the measured deflection of the resonator with the corrugated bridges in close to the calculated deflection of the resonator with the flat ones with the initial stress neglected.

• 한국정밀공학회지
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• 제17권11호
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• pp.81-87
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• 2000

A new resonator that is fabricated by single polysilicon layer process is presented. The resonator can move in two orthogonal direction on the plane parallel to the substrate. And the resonant frequencies of the two modes are intrinsically designed to be identical since the overall structure of the resonator is symmetric about the two directions of motion. Since the resonator ideally has two identical vibration mode, it can be applied to various micro-devices that requires multi DOF motion, especially to microgyroscopes. To investigate the feasibility of application of the resonator, dynamic model of the resonator including the nonlinear behavior of driving electrodes is derived and evaluated with the fabricated one, and the self-tuning characteristics are proved though experiments.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.69-70
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• 2008

Micro resonators have been actively investigated for bio/chemical sensors and RF M/NEMS devices. Among various materials, SiC is a very promising material for micro/nano resonators since the ratio of its Young's modulus, E, to mass density, $\rho$, is significantly higher than other semiconductor materials, such as, Si and GaAs. Polycrystalline 3C-SiC cantilever with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and its fundamental resonance was measured by a laser vibrometer in air and vacuum at room temperature, respectively. For the cantilever with $100{\mu}m$ length, $10{\mu}m$width and $1.3{\mu}m$ thickness, the fundamental frequency appeared at 147.2 kHz.

• 제어로봇시스템학회논문지
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• 제15권3호
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• pp.258-264
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• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• 전기학회논문지
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• 제60권4호
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• pp.817-822
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• 2011

We propose a novel ring structure based on the stadium-shaped ring resonator (SSRR) with dual photonic crystal microcavity (DPCM) for biosensor and analyzed the sensing characteristics. The Q-factor of the photonic crystal microcavity (PCM) can be significantly enhanced when the PCM or DPCM has the same resonance condition as the SSRR. The simulation results show that the Q-factor of the SRR with DPCM was increased by three times in comparison with single PCM structure. We also defined a mutual interference between two PCMs. Assuming a detectable spectral resolution of 10 picometers, a refractive index resolution of $3.03\times10-5$ can be measured on the SSRR-DPCM.

• 한국자기학회지
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• 제17권3호
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• pp.141-146
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• 2007

MEMS 공정기법을 적용하여 새로운 형태의 LC 공진기형 자기센서를 제작하였다. 이 마이크로 LC 공진기는 솔레노이드형 마이크로인덕터에 연자성 마이크로와이어를 코어로 삽입하고 여기에 콘덴서를 병렬로 연결하여 구성하였다. 코어 자성 물질은 melt spinning 법으로 제조한 유리가 코팅된 $Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ 마이크로와이어이다. 코어물질의 연자성을 개선하기 위하여 $150^{\circ}C$, $200^{\circ}C,\;250^{\circ}C,\;300^{\circ}C$ 등 여러 온도에서 1시간씩 진공 열처리하였다. MEMS 공정으로 제작된 솔레노이형 마이크로인덕터는 길이가 $500{\sim}1,000{\mu}m$ 이며 감은수는 $10{\sim}20$회이다. 외부자기장에 따른 본 마이크로인덕터의 최대 인덕턴스 변화율은 370%이었다. 초연자성 마이크로와이어의 투자율이 외부자기장에 따라 급격히 변하기 때문에 인덕턴스변화율이나 LC 공진기의 자기임피던스 변화율(MIR)이 급속하게 변한다. 최대감도를 얻기 위해서 MIR 곡선은 정교하게 조절할 수 있다. 마이크로인덕터와 멀티바이브 레어터 회로로 구성된 원형 자기센서소자를 제작하여 시험동작을 하는데 성공하였다.

• 한국진공학회지
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• 제21권1호
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• pp.36-40
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• 2012

마이크로미터 크기의 역학적 공진기의 제작과 그 공진 주파수 변화를 이용하여 질량 변화량을 측정하는 방법에 대해 연구 하였다. 공진기의 공진 주파수를 측정하기 위해서 레이저의 간섭효과를 이용한 광학적 측정법을 사용하였는데 이 방법은 나노미터 스케일의 변위까지 감지할 수 있을 정도로 매우 감도가 높은 측정법이다. 공진기는 압전 세라믹(piezo ceramic) 위에 원자현미경(atomic force microscope)의 캔티레버를 붙여서 만들었는데 이 방법은 압전판이 캔티레버의 공진 주파수로 진동할 때 캔티레버의 변위가 가장 크게 변화됨을 이용한 것이다. 또한, 전자 빔 증착기(e-beam evaporation system)를 사용하여 금을 캔티레버 위에 증착하여 질량을 변화시킨 후에 질량 변화량에 따른 공진주파수의 변화량을 측정하였다. 이 공진기는 질량센서의 역할을 수행할 수 있으며 수 마이크로그램을 감지할 수 있는 감도를 가짐을 확인하였다.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2009년도 정보통신설비 학술대회
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• pp.293-297
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• 2009

In this thesis, design of a VCO(Voltage controlled Oscillator) with a novel tuning mechanism is presented for the Radar system. This circuit, the 9.5 GHz oscillator is designed and implemented by restructuring microstrip resonator to raise Q value and to require a wide frequency tuning range. This product is fabricated on 2.6 Teflon substrate and device is NE722S01. In this paper, The new microstrip resonator VCO is proposed to achieve the characteristic of a wide frequency tuning range. This microstrip resonator VCO shows the phase noise characteristic of -108.3 dBc/Hz at 1 MHz offset from the fundamental frequency, the output power of 5.7 dBm and the second harmonic suppression of -38 dBc for the VCO are obtained. The manufacture VCO shows a frequency tuning range of 193.8 MHz. The proposed micro trip resonator VCO can be used for X-band Radar System with required tuning range.