• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1179-1180
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• 2005

3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.9 no.4
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• pp.1-7
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• 2010

Recently optical and electric and electronic forms in the field of ultra fine patterns has been used extensively, and techniques of the optical parts are required that can precision-machine this micro-patterns such as V or R-shaped micro-groove patterns. In this study, V and R type, shaping the way micro groove brass machining process to characterize the material feed rate and cutting depth and the V and R as a variable brother, using two kinds of diamond tools for each picture shape and surface roughness caused by conditions such as chips, processed through the analysis of effects of geometry and analysis such as precision machining.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.332-335
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• 1997

With the advance of precision technique, the optical system is more precise and complex and the machining method of optical element which is composed of micro-grooves is developed. Especially, the method of micro-grooving using diamond tool is used widely owing to many merit, but has problems of damage of surface roughness due to tool wear and tool fracture. This paper deals with state monitoring using AE RMS in the micro-grooving. The change of AE RMS is very small with increment of cutting velocity and depth of cut. In spite of constance magnitude of principal force in machining using diamond tool of tool wear and tool fracture, AE RMS is highly fluctuated. Because changing of cutting state has relevance to surface roughness profile, surface toughness profile is expected using AE RMS.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.1
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• pp.82-88
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• 2009

Ultra-precision turning is highly needed to manufacture molds for precision lens. In this study, micro-turning combined with elliptical vibration cutting (EVC), which is known to enhance micro- machining quality, was investigated by installing a rotary stage into the micro-grooving machine. From machining experiments involving materials of copper, brass, and aluminum and single and poly crystalline diamond tools, it was found that EVC produced thinner and curlier chips and that better surface finish could be achieved, compared with conventional turning, owing to prohibition of formation of burrs and built-up edges. Therefore, we found EVC micro turning could be readily utilized to manufacture precision mold.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.3
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• pp.218-223
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• 2009

The micro pattern machining on the surface of wide mold is not easy to be simulated by conventional software. In this paper, a software is developed for micro pattern cutting simulation. The 3d geometry of v-groove, rectangular groove, pyramid and pillar patterns are visualized by C++ and OpenGL library. The micro cutting force is also simulated for each pattern.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.201-208
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• 2006

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step-by-step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1518-1521
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• 2005

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries This paper focus to apply the sputtering technology accumulated by experiments to 3d structure fabrication with high resolution. Therefore some verifications and discussions of the characteristics of FIB sputtering results according to focal length were described in this paper. And we suggested the definition of rectangular pattern profile and made the verifications of sputtering results based on definition of it.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.11
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• pp.47-54
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• 2003

Research during the past several years has established the effectiveness of acoustic emission (AE)-based sensing methodologies for machine condition analysis and process. AE has been proposed and evaluated for a variety of sensing tasks as well as for use as a technique for quantitative studies of manufacturing process. STD11 has been known as difficult-to-cut materials. The micro-grooving machine was developed for this study and the experiments were performed using CBN blade for machining STD11. Evaluating the machining conditions, frequency spectrum analysis of acoustic emission (AE) signals according to each conditions were applied. Fuzzy clustering method for associating the preprocessor outputs with the appropriate decisions was followed by frequency spectrum analysis. FFT is used to decompose AE signal into different frequency bands in time domain, the root mean square (RMS) values extracted from the decomposed signal of each frequency band were used as features.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.10
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• pp.3113-3125
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• 1996

The objective of this study is to develop novel method named mechanical and chemical machining technique, which is capable of producing three dimensional patterns of few micrometers in dimension on a silicon wafer without the use of a mask. The strategy is to impart mechanical energy along the path of the pattern to be fabricated on a single crystal silicon by way on introdusing frictional interaction under controlled conditions. Then, the surface is preferentially etched to reveal the areas that have been mechanically energized. Upon completion of the etching process, the three dimensional pattern is produced on the silicon surface. Experiments have been conducted to identify the optimal tool material, geometery, as well as fabrication condition. The new technique introduced in this paper is significantly simpler than the conventional method which require sophisticated equipment and much time.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.5
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• pp.523-527
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• 2011

Polycarbonate (PC) polymer is an engineering plastic which has large tensile strength and impact resistance and is wildly used as functional parts like micro mold. Direct machining of PC materials produces lots of burrs and rough surface due to large ductility and weak heat resistance and hence it is very difficult to machine PC materials using cutting tool to make micro-parts. In this study, elliptical vibration cutting (EVC) or 2-dimensional vibration cutting was performed to minimize the size of micro V-grooves on PC material. From the experimental results, it was observed that as the cutting depth and pattern size become smaller, the better machining quality was obtained, which is attributed to the positive effect of EVC that is dependent on the ratio of vibration amplitude to cutting depth. As the height of V-groove becomes less than $1.8{\mu}m$, however, the machining quality becomes lower as the pattern size decreases.