• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.798-807
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• 2004

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

• 반도체디스플레이기술학회지
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• 제16권3호
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• pp.36-40
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• 2017

In this paper, a new method of laser trimming of thick film heater is studied. Various laser waves (IR, Green, UV) are used to ablation the heater and the process parameters are also presented. For given initial printed resisters, the cutting length should be prepared to obtain the target resister value in advance. Therefore, the cutting model is very important. The well-known model was tested and proven that it is valid only within a certain range of cutting length. A new model is proposed for a wide range of resister laser trimming. The cutting lengths and resister variation was obtained and formulated. To verify the presented method, the cutting lengths of each resister are calculated for various target resister value and laser trimming using UV is conducted.

• Transactions on Electrical and Electronic Materials
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• 제13권1호
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• 대한기계학회논문집A
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• 제27권7호
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• pp.1071-1075
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• 2003

In this paper, we present a DNA manipulation device in the reaction chamber, which consists of a center electrode and circular outer electrodes of a reaction unit. The charged bio-molecules, DNA, are manipulated by the charge of the electrode in reaction unit. Controlling the induced dynamic electric field between the center electrode and the outer electrodes, concentration / repulsion / manipulation of bio-molecules are enabled at a periphery of electrode. Concentration of the fluorescent DNA at the center electrode is observed by applying ＋2V. Subsequently, applying －2V, the concentrated DNA is repelled rapidly from the center electrode, which makes dispersion completely in 0.5second. Furthermore, repeated applying ＋1V/－1V every 5 seconds at each outer electrode, we can circulate the DNA. We also investigate a micro-heater and sensor for DNA manipulation and reaction temperature. The coefficient of heat-resistance and heater temperature characteristic is 0.0043 and 100$^{\circ}C$/sec, respectively.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.21-24
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• 2002

A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.313-316
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• 2006

As Decentralized Generation(DG) becomes more reliable and economically feasible, it is expected that a higher application of DG units would be interconnected to the existing grids. This new market penetration of DG technologies is linked to a large number of factors like technologies costs and performances, interconnection issues, safety, market regulations, environmental issues or grid connection constrains. Korea Electric Power Corporation (KEPCO) has researched performance characteristics of the 60k W class 1) basic start-up & shutdown operation analysis 2) interconnection test 3) MGT -absorption chiller-heater system in the local condition. Variations of heat recovery from exhaust gas has measured according to micro gas turbine output of 15, 30, 45, 60kW. From those results, the performance of the MGT-absorption chiller/heater system has been evaluated. The suggested strategy and experience for the evaluation of the distributed generation will be used for the introduction of other distributed generation technologies into the grid in the future.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.593-596
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• 2004

We are developing a micro-solid propellant rocket array thruster for simple attitude control of a 10 kg class micro-spacecraft. The prototype has ø 0.8 mm solid propellant micro-rockets arrayed at a pitch of 1.2 mm on a 22 x 22 mm substrate. In previous studies, an impulse thrust of 4.6 x 10$^{-4}$ Ns was obtained in vacuum, but we found the problems of unacceptably low ignition success rate and incomplete combustion. This paper describes experiments to improve the ignition rate. In order to achieve this goal, we tried to solidify paste-like ignition aid (RK) on the ignition heaters with strong adhesion. To make the paste-like RK, isoamyl acetate was added to RK powder. We tested 9 rockets, but only 2 rockets were ignited with huge ignition energy. This is because the heat con-duction between the ignition heater and the RK was too low to ignite the RK, since dried RK had a lot of pores. Also, a large cavity was sometimes found just above the ignition heater.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
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• pp.477-481
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• 2002

This paper reports on the development of micro power system component under way at Seoul National University. The need of micro power system is explained and components of micro power system are described. The developments of hydrogen-air micro combustor, micro igniter based poly-silicon heater and micro thruster are described. To manufacture 3-D micro structure the process that manufactures high aspect ratio structures has been developed and optimized. Design, fabrication, and experiment processes are introduced and technical challenges in each phase are described.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권5호
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• pp.278-285
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• 2006

A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1186-1190
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• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.