• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.293-293
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• 2010

최근 태양전지 연구에서 저가격화를 실현하는 방법 중 하나로 폐 실리콘 웨이퍼를 재생하는 방법에 관하여 많은 연구가 진행되고 있다. 그러나 기존 웨이퍼 재생공정은 높은 재처리 비용과 복잡한 공정등의 많은 단점을 가지고 있다. 챔버 내에 압축된 공기나 가스에 의해 가속된 미세 파우더들이 재료와 충돌하면서 식각하는 기계적 건식 식각 공정 기술이라고 할 수 있는 micro blaster 공정을 이용하면 기존 재생공정보다 낮은 재처리 비용과 간단한 공정으로 재생웨이퍼를 제작할 수 있다. 하지만 이러한 micro blaster 공정은 식각 후 표면에 많은 particle과 crack을 형성시켜 태양전지용으로 사용하기에 단점을 가진다. 본 연구에서는 이러한 micro blaster를 이용한 태양전지용 재생 웨이퍼를 제작하기 위해 폐 실리콘 웨이퍼의 표면 물질을 식각하고, 식각 후 충돌에 의해 발생된 표면의 particle과 crack을 DRE(Damage Remove Etching)공정으로 제거하는 연구를 진행 하였다. 먼저 폐 실리콘 웨이퍼와 같은 표면을 형성하기 위하여 시편 표면에 각각 Al($2000{\AA}$), $Si_3N_4(3000{\AA})$, $SiO_2(1{\mu}m)$, AZ1512($1{\mu}m$)을 형성하고 micro blaster의 파우더 크기, 압력, 스캔 속도 등의 공정 조건에 따라 폐 실리콘 웨이퍼 표면 물질을 식각하였다. 식각 후 폐 실리콘 웨이퍼의 식각된 깊이와 표면 물질 잔량을 측정하고, 폐 실리콘 웨이퍼의 표면에 particle과 crack, 요철이 형성되어 있는지를 확인하였다. 그 결과 폐 실리콘 웨이퍼에 형성된 물질의 두께 이상으로 식각되었으며, 표면 물질의 잔량이 남아 있지 않았고, 표면에 많은 particle과 crack, 요철이 형성되었다. 표면에 형성된 요철은 유지하면서 많은 particle과 crack을 제거하기 위하여 micro blaster공정 후 DRE 공정으로 표면 개선이 필요하였다. 이때 남겨진 요철은 입사광량을 증가시키고, 표면 반사율을 감소시켜 태양전지내의 흡수하는 빛의 양을 증가시키는 태양전지 texturing 공정 효과로 작용하게 된다. 표면에 남은 particle과 crack을 완전히 제거하면서 요철은 유지할 수 있게 HNA 용액의 농도와 시간에 따른 식각 정도를 측정하였다. DRE 공정 후 표면 particle과 crack이 완전히 제거되어 표면이 개선됨을 확인하였다. Micro blaster를 이용하여 폐 실리콘 웨이퍼의 표면을 식각하고, DRE공정으로 표면을 개선함으로써 태양전지용 기판으로의 재생 가능성을 확인하였다.

• Journal of Ocean Engineering and Technology
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• v.14 no.1
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• pp.29-36
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• 2000

Surface micro-crack grows along intergranular or transgranular region of crystal grains. But if it meets the barrier such as sessile dislocation and precipitates it loses straightness and deflects. Investigators had many difficulties in estimating fatigue life of smooth specimen because of the random distribution growth and coalescence of surface micro-cracks. The path of surface micro-crack has irregularity due to nonhomogeneous microstructure. Euclidian geometry can't quantify the shape of surface micro-crack but fractal geometry can. Therefore in this paper fractal dimension is measured at various stage of cycle ratio and estimated cycle ratio in 2024-T3 aluminium, alloy.

• Transactions of the Korean Society of Mechanical Engineers
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• v.9 no.4
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• pp.421-429
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• 1985

This study has been made to investigate into the relation between fatigue crack behavior and ferrite grain size. As experimental observation of the low-carbon steel specimen with the drilled micro-hole under rotating bending stress was made to accomplish this investigation. Obtained results are as follows; (1) The fatigue limit of micro-hole depends upon the magnitude of ferrite grain size, as indicated by the Hall-Petch formula. (2) The fatigue crack occurring around the micro-hole is of shear type, and the frequency of fatigue crack initiation depends upon the ferrite grain size. (3) The magnitude of ferrite grain size affects the behavior of fatigue crack propagation up to the crack size of 0.3mm. The effect, however, is negligible for the crack size larger than 0.3mm.

• Transactions of the Korean Society of Mechanical Engineers
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• v.7 no.1
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• pp.28-35
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• 1983

Quantitative analysis have been carried out on the micro-cracks on the surface and into the depth of unnotched smooth mild steel specimen under cyclic stains by rotating bending fatigue tests. Some of the results are; (1) Cracks initiate at the early stage of fatigue life N$_{I}$/ N$_{f}$=10 to 20%, and propagate during the rest of fatigue life. (2) Coalescence of highly crowded small fatigue cracks of random distribution seems to induce the final fracture at higher stress level. (3) The curves of crack initiation and the equal crack length on the graph of stress versus number of cycles are parallel to the S-N curve. (3) The curves of crack initiation and the equal crack length on the graph of stress versus number of cycles are parallel to the S-N curve. (4) The distributions of micro-surface crack length and depth show the composite Weibull distributions which are approximated to two straight lines separated by the value of transient region between stage I and stage II crack.k.k.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.5 s.176
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• pp.1288-1296
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• 2000

In this study, fatigue crack behavior between arbitrarily located defects was investigated by experiment. Especially, stress interaction between micro hole defects and fatigue cracking, and fatigue crack initiation life following the variation of location of micro hole defects were considered. In addition, crack initiation position by micro hole stress interaction and the relationship between stress concentration factor and fatigue initiation life are studied in detail.

• Journal of the Korean Ceramic Society
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• v.36 no.9
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• pp.887-892
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• 1999

The inner crack-like pore with controlled amount of Ca impurity in the high purity alumina single crystal sapphire had been created by micro-fabrication technique which includes ion implanation photo-lithography Ar ion milling and hot press technique. The crack-like pores in two-hour hot pressed specimen were extremely stable even after heat treating at 1,80$0^{\circ}C$ for 5 hours almost no healing was observed. But the crack-like pores in one-hour hot pressed specimen at 1,30$0^{\circ}C$ were healed by heat treatment and the amount of healing was increased with the heat treatment time and temperature and the amount of Ca addition. The edges of crack-like pore parallel to <1100> direction in (001) basal plane were stable but the edges normal to this direction in (00101) plane <1120> direction were unstable to facetting This means that the surface energy of alumina along the <1100> direction in (0001) basal plane in much lower than <1120> direction.

• Structural Engineering and Mechanics
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• v.23 no.3
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• pp.217-232
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• 2006

A crack model for the fracture in concrete based on meshless method is proposed in this paper. The cracks in concrete are classified into micro-cracks or macro-cracks respectively according to their widths, and different numerical approaches are adopted for them. The micro-cracks are represented with smeared crack approach whilst the macro-cracks are represented with discrete cracks that are made up with additional nodes and boundaries. The widely used meshless method, Element-free Galerkin method, is adopted instead of finite element method to model the concrete, so that the discrete crack approach is easier to be implemented with the convenience of arranging node distribution in the meshless method. Rotating-Crack-Model is proved to be preferred over Fixed-Crack-Model for the smeared cracks of this composite crack model due to its better performance on mesh bias. Numerical examples show that this composite crack model can take advantage of the positive characteristics in the smeared and discrete approaches, and overcome some of their disadvantages.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.1039-1045
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• 2007

Ultrasonic machining (USM) is suitable for machining hard, brittle and non-conductive materials such as silicon, glass and ceramics. Usually, when micro holes are machined on glass by USM, roundness of hole entrance is poor and cracks appear around the hole exit. In this paper the machining characteristics were studied for roundness improvement and exit crack prevention. From experiments, the tool bending and the shape of tool tip affect hole roundness. When the tool tip is hemispherical, good roundness of holes was obtained. The feedrate and the rotational speed of the tool affect the exit crack. With the machining conditions of 150 rpm in spindle speed and $0.5\;{\mu}m/s$ in feedrate, micro holes with less than $100\;{\mu}m$ in diameter were machined without an exit crack.

• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.4
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• pp.352-357
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• 2008

The detection of micro cracks in materials at the early stage of fracture is important in many structural safety assurance problems. The nonlinear ultrasonic technique (NUT) has been considered as a positive method for this, since it is more sensitive to micro crack than conventional linear ultrasonic methods. The basic principle is that the waveform is distorted by nonlinear stress-displacement relationship on the crack interface when the ultrasonic wave transmits through, and resultantly higher order harmonics are generated. This phenomenon is called the contact acoustic nonlinearity (CAN). The purpose of this paper is to prove the applicability of CAN experimentally by detection of micro fatigue crack artificailly initiated in Aluminum specimen. For this, we prepared fatigue specimens of Al6061 material with V-notch to initiate the crack, and the amplitude of second order harmonic was measured by scanning along the crack direction. From the results, we could see that the harmonic amplitude had good correlation with COD and it can be used to detect the crack depth in more accurately than the common 6 dB drop echo method.

• International Journal of Concrete Structures and Materials
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• v.19 no.1E
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• pp.25-32
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• 2007

The fracture energy evaluated from the previous experimental results can be simulated by using the modified singular fracture process zone (S-FPZ) model. The fracture model has two fracture properties of strain energy release rate for crack extension and crack close stress versus crack width relationship $f_{ccs}(w)$ for fracture process zone (FPZ) development. The $f_{ccs}(w)$ relationship is not sensitive to specimen geometry and crack velocity. The fracture energy rate in the FPZ increases linearly with crack extension until the FPZ is fully developed. The fracture criterion of the strain energy release rate depends on specimen geometry and crack velocity as a function of crack extension. The behaviors of micro-cracking, micro-crack localization and full development of the FPZ in concrete can be explained theoretically with the variation of strain energy release rate with crack extension.