• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.150-153
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system as analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• 한국소음진동공학회논문집
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• 제15권7호
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• pp.775-780
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• 2005

This study uses a characteristic function to explain correlations between the objective function and design variables. Analysis of means and table of orthogonal array were carried out. The change of shape of diaphragm, thickness of diaphragm and voice coil weight based on the table of orthogonal array Is made. Therefore this study carried to decide design variables for minimizing 1st natural frequency and maximizing 2nd natural frequency of diaphragm using design of experiments and characteristic function with constraints. we showed improved design variables.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
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• pp.247-249
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• 2001

In our research, we designed a small step motor with 2-phase structure and a micro step driving IC, which is used in an automotive instrument. The step motor for the automotive instrument has the better advantages than a cross coil type motor. These advantages are the characteristics with a good linearity, a fine accuracy, a low noise and so on.

• 반도체디스플레이기술학회지
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• 제5권4호
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 춘계학술대회 논문집
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• pp.168-171
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• 2009

High-frequency induction is an efficient way to heat mold surface by electromagnetic induction in a non-contact procedure. Though the induction heating has an advantage in terms of its rapid-heating capacity on the mold surface, it still has a restriction on mold temperature control due to geometric restriction of an induction coil according to the mold shape. It has been recently applied to the injection molding of thin-walled parts or micro/nano structures. For localized induction heating, an injection mold composed of ferromagnetic material and paramagnetic material is used. The electromagnetic induction concentrates on the ferromagnetic material, from which we can selectively heat for the local mold elements. The present study proposed a localized induction heating method by means of selective use of mold material. The feasibility of the proposed heating method is investigated through the comparison of experimental observations according to the mold material.

• 센서학회지
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• 제20권2호
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• pp.102-106
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• 2011

This paper presents a design and analysis of an electromagnetic micro generator which can convert low frequency vibration energy to electrical power. The design aspects of the micro generator comprised planar spring, Cu coil and a permanent magnet(NdFeB). Threetype spring designs and four materials(Parylene, FR-4, Cu and Si) were compared to find resonance frequency. It was found that the resonance frequency will be changed according to the spring shape and material. Mechanical and magnetic parameters had been adjusted to optimize the output power through a comprehensive theoretical study.

• 센서학회지
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• 제27권2호
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• pp.99-104
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• 2018

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권9호
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• pp.418-423
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• 2003

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.91-94
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• 2007

마이크로 고체 추진제 추력기의 점화 시스템의 제작 및 점화 실험에 관한 연구 결과를 기술하겠다. 유리 박막 마이크로 백금 점화기는 일반적인 금속 박리 공정과 감광 유리 제작 공정을 이용하여 제작되었다. 백금 층의 두께는 $2000{\AA}$, 점화기 패턴의 폭은 $40{\mu}m$ 였다. 제작된 유리 박막의 두께는 $15{\mu}m$, 유리 박막의 지름은 1 mm 였다. HTPB/AP 추진제를 이용하여 점화 실험을 수행하였다. 12 V의 전압을 사용한 경우, 점화 지연 시간은 1.6 s 였으며 이 때의 점화 에너지는 1.4 J로 측정되었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.780-785
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• 2003

Recently the trends in information storage devices need small size, mobility, high capacity, and low power consumption etc. To satisfy those, the development of high performance actuator is an important issue. Compared with general linear actuator for optical disk drive, swingarm type rotary actuator is suitable to design in small form factor and has fast access time for random access. Swingarm actuator is designed considering the structural problem and the actuating force of VCM(Voice Coil Motor). The increase of mass caused by optical components makes vibration problems of swing-arm, therefore resonance frequency should be increased and inertia has to be reduced. ANSYS FEM tool is employed in optimizing swingarm. The VCM is designed using 3-D electro-magnetic analysis, and parameters of magnetic circuit are determined to matte large flux density. The large flux density enables to achieve low power consumption. VCM holder is designed to get the mass balance of total actuator and this balance reduces the magnitude of critical mode relative to pivot bearing, It is expected that swingarm type rotary actuator designed by this method is available to variable type of micro optical disk drives.