• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.1
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.2
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• pp.102-110
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• 2002

In this paper, we present the fabrication of tunable capacitors and 3-dimensional inductors. This work was related to fabricated 3-dimensional device for need of micro device in developing new intelligence age. This device was fabricated by electroplating used electroplating PR and high-vacuum evaporation of metal. Fabricated micro-inductor is consisted of air-bridge on electroplating rod and electroplated core. Micro-capacitor is consisted of thin metal membrane and electroplated core. Electroplating material is used Cu metal solvent. Air-gap between metal-layers function as almost perfect isolation layer. The most advantage of our micro-inductor and micro-capacitor compared to present device is a possibility that can fabricate on RF MEMS(microelectro-mechanical systems) application with high performance and various function. In this paper, we present the fabrication of tunable capacitors and 3-dimensional inductors. This work was related to fabricated 3-dimensional device for need of micro-device in developing new intelligence age. This device was fabricated by electroplating used electroplating PR and high-vacuum evaporation of metal. Fabricated micro-inductor is consisted of air-bridge on electroplating rod and electroplated core. Micro-capacitor is consisted of thin metal membrane and electroplated core. Electroplating material is used Cu metal solvent. Air-gap between metal-layers function as almost perfect isolation layer. The most advantage of our micro-inductor and micro-capacitor compared to present device is a possibility that can fabricate on RF MEMS application with high performance and various functions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.613-614
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• 2008

• Proceedings of the Materials Research Society of Korea Conference
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• 1992.05b
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• pp.82-82
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• 1992

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.157.1-157.1
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• 2013

외부 Ballast Capacitor를 이용한 Voltage Doubler 전원장치를 이용하여 Micro size의 대기압 플라즈마를 발생장치를 개발하였다. 2개의 외부 Capacitor를 병렬로 연결하여 충전한 다음 외부 Capacitor를 직렬로 연결하여 전압을 2배압 시킨 상태에서 방전이 일어나도록 하였다. Capacitor의 충 방전 제어는 Switch Device인 Insulated Gate Bipolar Transistor (IGBT)를 사용하였다. 개발된 대기압 플라즈마는 외부 Capacitor와 인가전압을 독립적으로 변화시킬 수 있기 때문에 방전 시 전류 전압을 독립적으로 제어할 수 있으며 용도에 따라 Glow 방전에서 Arc 방전까지 제어가 가능하다. 본 연구에서는 900 V의 1.22 nF 외부 Capacitor 방전과 400 V의 10 nF 외부 Capacitor 방전을 비교하였다. 방전 시 전압파형과 전류파형은 서로 다르지만 소비된 방전에너지는 340 ${\mu}J$로 동일하다. ICCD camera와 Spectrometer를 이용하여 비교 분석을 실시하였다. 방전 image 및 Optical Emission Spectroscopy 분석을 이용하여 플라즈마의 온도, 밀도 등을 시간적, 공간적으로 분석하였다.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.7 no.5
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• pp.97-105
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• 2008

The micro capacitors are passive elements necessary to electronic circuits and wireless portable PAN(personal area network) and Mobile Communications device modules in the baseband circuits in combination with another passive and active devices. As capacitance is proportionally increased with dielectric constant and electrode areas, in addition, inversely decreased the thickness of the dielectric material, thus thin film capacitors are generally seen as a preferable means to achieve high performance and thin film capacitors are used in a variety of functional circuit devices. In this paper, propose dielectric material as AIN(Aluminium nitride) to make micro thin film capacitor, and this capacitor has the MIM(metal-insulator-metal) structure. AIN thin films are widespread applied because they had more excellent properties such as chemical stability, high thermal conductivity, electrical isolation and so on. In addition, AIN films show low frequency response for baseband signal ranges, I-V and C-V electrical characterization of a thin film micro capacitor. The above experimental test and estimated results demonstrate that the thin film capacitor has sufficient and efficient functional performance to be the baseband range frequency of general electronics circuit and passive device applications.

• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.97-103
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• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• Applied Chemistry for Engineering
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• v.20 no.4
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• pp.396-401
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• 2009

A micro-spherical activated carbon with meso-pore structure of 52~64% and particle diameter of $2{\sim}10{\mu}m$ was prepared for the improvement electrochemical performance of activated carbon as electrode material for electric double layer capacitor. Resorcinol-formaldehyde resin was used as a carbon source in this preparation. According to electrochemical analysis of EDLC using this activated a carbon with showing effects to reduce charge transfer resistance and to increase rate capability, it was found out that micro-spherical activated carbon could be a good method as well as a material for enhancing the performance of electric double layer capacitor.

• The Transactions of the Korean Institute of Power Electronics
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• v.10 no.2
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• pp.203-210
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• 2005

A study on the hybrid micro power source for the IMT2000 application has been presented. The hybrid micro power source is composed of solar cell, super-capacitor and battery. To compensate for the pulse loader of the IMT2000 application, the super-capacitor is connected through the lithium-lon battery to absorb the pulse discharge current. The solar cell provides the additional current to compensate for the depleted current and it is controlled to operate at the maximum power point voltage. A novel maximum power point tracking method is presented to operate at the pulse discharge load conditions and verified to have superior tracking performance through experiment. The controller design for the hybrid micro power source has been presented and verified through experiment.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.490-490
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• 2012

Ballast capacitor에 저장된 에너지로 방전 에너지를 조절할 수 있는 방전장치를 개발하였다. 본 연구에서는 ballast capacitor의 용량을 조절하여 micro-size의 아크 플라즈마를 발생시켰으며, 용량변화에 따른 플라즈마의 온도를 측정하였다. 또한 ICCD camera를 이용하여 ballast capacitor의 용량변화에 따른 cathode의 변화를 관찰하였다. Optical Emission Spectroscopy를 통하여 플라즈마의 광학적 특성을 분석하였다. 마이크로 아크 방전의 주파수를 높이기 위하여 switching device를 병렬로 연결하여 아크 플라즈마를 구동시켰으며, 발생된 마이크로 아크 플라즈마는 정밀방전 가공에 응용되었다. 본 연구는 2011년도 지식경제부의 재원으로 한국에너지 기술평가원(KETEP)의 지원을 받아 수행한 연구 과제입니다(No. 20104010100670).