• Title/Summary/Keyword: micro bonding

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Development of The 3-channel Vision Aligner for Wafer Bonding Process (웨이퍼 본딩 공정을 위한 3채널 비전 얼라이너 개발)

  • Kim, JongWon;Ko, JinSeok
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.1
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    • pp.29-33
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    • 2017
  • This paper presents a development of vision aligner with three channels for the wafer and plate bonding machine in manufacturing of LED. The developed vision aligner consists of three cameras and performs wafer alignment of rotation and translation, flipped wafer detection, and UV Tape detection on the target wafer and plate. Normally the process step of wafer bonding is not defined by standards in semiconductor's manufacturing which steps are used depends on the wafer types so, a lot of processing steps has many unexpected problems by the workers and environment of manufacturing such as the above mentioned. For the mass production, the machine operation related to production time and worker's safety so the operation process should be operated at one time with considering of unexpected problem. The developed system solved the 4 kinds of unexpected problems and it will apply on the massproduction environment.

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Substrate bonding technique using the agar-epoxy composites for flexible LCD

  • Bae, Ji-Hong;Jang, Se-Jin;Choi, Hong;Kim, Sang-Il;Kim, Jae-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.733-736
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    • 2007
  • We have proposed novel bonding technique of substrates for developing the flexible LCD with high quality. The gel type mixture of agarose and UV curable epoxy developed to obtain tight bonding ability and enhanced electro-optical characteristic simultaneously. This technique can be used to roll-to-roll process for fabricating the flexible LCDs.

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New Structure of Rigid Spacers for Tight Bonding of Two Plastic Substrates in Plastic LCD

  • Choi, Hong;Jang, Se-Jin;Bae, Ji-Hong;Choi, Yoon-Seuk;Kim, Sang-Il;Shin, Sung-Sik;Kim, Jae-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.352-355
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    • 2007
  • We have developed tight bonding of plastic LCD with new rigid spacer. For tight bonding of two plastic substrates, we designed structures to collect UV or thermal epoxy placed on the top of rigid spacer spontaneously by capillary effect. We confirmed that tight bonded plastic LCD has a good adhesion without induced defects and a high mechanical stability against the various external deformations. This method can be applicable to the fabrication of large plastic LCDs using stamping process.

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Si Micromachining for MEMS-lR Sensor Application (결정의존성 식각/기판접합을 이용한 MEMS용 구조물의 제작)

  • 박흥우;주병권;박윤권;박정호;김철주;염상섭;서상의;오명환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.411-414
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    • 1998
  • In this paper, the silicon-nitride membrane structure for IR sensor was fabricated through the etching and the direct bonding. The PT layer as a IR detection layer was deposited on the membrane and its characteristics were measured. The attack of PT layer during the etching of silicon wafer as well as the thermal isolation of the IR detection layer can be solved through the method of bonding/etching of silicon wafer. Because the PT layer of c-axial orientation rained thermal polarization without polling, the more integration capability can be achieved. The surface roughness of the membrane was measured by AFM, the micro voids and the non-contacted area were inspected by IR detector, and the bonding interface was observed by SEM. The polarization characteristics and the dielectric characteristics of the PT layer were measured, too.

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Development of A Process Map for Extrusion of Cu-Ti Bimetal Bar (구리-타이타늄 이중봉 직접압출의 공정지도 개발)

  • Kim Joong-Sik;Lee Yong-Sin;Sim K.S.;Park H.J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.499-502
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    • 2005
  • A process map has been developed, which can identify the process conditions for weak mechanical bonding at the contact surface during the direct extrusion of a Cu-Ti bimetal bar. Bonding mechanism between Cu and Ti was assumed as a cold pressure welding. Then, the plastic deformation at the contact zone causes mechanical bonding and a new bonding criterion for pressure welding was developed as a function of the principal stretch ratio and normal pressure at the contact surface by analyzing micro local extrusion at the contact zone. Finite element analyses for extrusion of Cu-Ti bimetal bars were performed for various process conditions. The deformation history at the contact surface was traced and the proposed new bonding criterion was applied to predict whether the mechanical bonding at the Cu-Ti contact surface happens. Finally, a process map for the extrusion of Cu-Ti bimetal bar is suggested.

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Forming Characteristics for the Bundle Extrusion of Cu-Ti Bimetal Wires (구리-타이타늄 복합선재의 번들압출 성형특성)

  • Lee, Y.S.;Kim, J.S.;Yoon, S.H.;Lee, H.Y.
    • Transactions of Materials Processing
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    • v.18 no.4
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    • pp.342-346
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    • 2009
  • Forming characteristics for the bundle extrusion of Cu-Ti bimetal wires are investigated, which can identify the process conditions for weak mechanical bonding at the contact surface during the direct extrusion of a Cu-Ti bimetal wire bundle. Bonding mechanism between Cu and Ti is assumed as a cold pressure welding. Then, the plastic deformation at the contact zone causes mechanical bonding and a new bonding criterion for pressure welding is developed as a function of the principal stretch ratio and normal pressure at the contact surface by analyzing micro local extrusion at the contact zone. The averaged deformation behavior of Cu-Ti bimetal wire is adopted as a constitutive behavior at a material point in the finite element analysis of Cu-Ti wire bundle extrusion. Various process conditions for bundle extrusions are examined. The deformation histories at the three points, near the surface, in the middle and near the center, in the cross section of a bundle are traced and the proposed new bonding criterion is applied to predict whether the mechanical bonding at the Cu-Ti contact surface happens. Finally, a process map for the direct extrusion of Cu-Ti bimetal wire bundle is proposed.

Effect of Corrugating Medium's Properties on Microflute Formation (part2) -Relative importance of stiffness and fiber bonding on microflute formation- (원지특성에 따른 Microflute의 골 성형성(제2보) -Microflute 골 성형성에 영향하는 스트프니스와 섬유간 결합의 중요성 비교 -)

  • Min, Kyung-Eun;Park, Jong-Moon
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.37 no.2 s.110
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    • pp.64-69
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    • 2005
  • Suitability of corrugating medium for microflute shape formation was analyzed in terms of fiber bonding strength and paper stiffness. Cationic starch and oxidized starch were applied to corrugating medium's surface by bar coater in order to compare the relative importance of stiffness and fiber bonding on microflute formation. It was found that cationic starch was beneficial for better stiffness and oxidized starch was beneficial for better fiber bonding. The results of the decreasing ratio of length by flute formation, the calculated conditioning effect, and the flute height before and after conditioning treatment were obtained. For better microflute shape formation and its preservation it was found that fiber bonding strength should be increased, proper stiffness was required, and resistance to water absorption from surroundings should be increased.

Development of A Process Map for Bundle Extrusion of Cu- Ti Bimetal Wires (구리-타이타늄 이중미세선재 번들압출의 공정지도 개발)

  • Kim J. S.;Lee Y. S.;Yoon S. H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.10a
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    • pp.393-397
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    • 2005
  • A process map has been developed, which can identify the process conditions for weak mechanical bonding at the contact surface during the direct extrusion of a Cu-Ti bimetal wire bundle. Bonding mechanism between Cu and Ti is assumed as a cold pressure welding. Then, the plastic deformation at the contact zone causes mechanical bonding and a new bonding criterion fur pressure welding is developed as a function of the principal stretch ratio and normal pressure at the contact surface by analyzing micro local extrusion at the contact zone. The averaged deformation behavior of Cu-Ti bimetal wire is adopted as a constitutive behavior at a material point in the finite element analysis of Cu-Ti wire bundle extrusion. Various process conditions for bundle extrusions are examined. The deformation histories at the three points, near the surface, in the middle and near the center, in the cross section of a bundle are traced and the proposed new bonding criterion is applied to predict whether the mechanical bonding at the Cu-Ti contact surface happens. Finally, a process map for the direct extrusion of Cu-Ti bimetal wire bundle is proposed.

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Study of a Low-Temperature Bonding Process for a Next-Generation Flexible Display Module Using Transverse Ultrasound (횡 초음파를 이용한 차세대 플렉시블 디스플레이 모듈 저온 접합 공정 연구)

  • Ji, Myeong-Gu;Song, Chun-Sam;Kim, Joo-Hyun;Kim, Jong-Hyeong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.4
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    • pp.395-403
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    • 2012
  • This is direct bonding many of the metal bumps between FPCB and HPCB substrate. By using an ultrasonic horn mounted on an ultrasonic bonding machine, it is possible to bond gold pads onto the FPCB and HPCB at room temperature without an adhesive like ACA or NCA and high heat and solder. This ultrasonic bonding technology minimizes damage to the material. The process conditions evaluated for obtaining a greater bonding strength than 0.6 kgf, which is commercially required, were 40 kHz of frequency; 0.6MPa of bonding pressure; and 0.5, 1.0, 1.5, and 2.0 s of bonding time. The peel off test was performed for evaluating bonding strength, which was found to be more than 0.80 kgf.

Nano-scale Precision Polishing Characteristics using a Micro Quill and Magnetic Chain Structure (미세공구와 자기체인구조를 이용한 초정밀 폴리싱 특성)

  • 박성준;안병운;이상조
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.8
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    • pp.34-42
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    • 2004
  • A new polishing technique for three dimensional micro/meso-scale parts is suggested using a micro quill and a magnetic chain structure. The principle of this method is to polish the target surface with the collected magnetic brushes at a micro tool by the non-uniform magnetic field generated around the tool. In a typical magnetic abrasive finishing process magnetic particles and abrasive particles are unbonded each other. But, to finish the three dimensional small parts bonded magnetic abrasive have to be used. Bonded magnetic abrasives are made from direct bonding, and their polishing characteristics are also examined. Alumina, silicon carbide and diamond micro powders are used as abrasives. Base metal matrix is carbonyl iron powder. It is found that bonded magnetic abrasives are superior to unbonded one by experiment. finally, the polished surface roughness is evaluated by atomic force microscope.