• Journal of Korean Society of Environmental Engineers
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• v.29 no.3
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• pp.332-340
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• 2007

Storm runoff from road contains significant loads of particulate and dissolved solids, organic constituents and metal elements. Micro particle is important when considering pollution mitigation because pollutant metal and organics have similar behavior with particles. The objective of this research is to evaluate the hydrodynamic filter separator performance for road storm runoff treatment. A various types of media such as perlite, granular activated carbon, zeolite were used for column test packing media and filter separator, and to determine the removal efficiency with various surface loading rate. As the results of column test, the highest SS removal efficiency was using mixed media(granular activated carbon, zeolite and perlite), and granular activated carbon mixed with zeolite has higher heavy metal removal efficiency than perlite. In laboratory scale hydrodynamic filter separator study, the operation ranges of surface loading rates were from 192 to 1,469 $m^3/m^2/day$. The estimated overall removal efficiencies of hydrodynamic filter separator for typical storm runoff were SS 48.1%, BOD 31.9%, COD 32.6%, TN 15.5%, and TP 17.3%, respectively. For the case of heavy metals, overall removal efficiencies were Fe 26.0%, Cu 19.4%, Cr 25.7, Zn 16.6%, and Pb 15.0%, respectively. The most appropriate medium for hydrodynamic filter separator was perlite mixed with granular activated carbon to treatment of road storm runoff.

• Applied Chemistry for Engineering
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• v.34 no.6
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• pp.640-648
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• 2023

The purpose of this study was to determine the inhibitory effect of heavy metals [Cd(II), Ni(II), and Zn(II)] on the growth of Rhodobacter species (Rhodobacter blasticus, Rhodobacter sphaeroides, and Rhodobacter capsulatus) and their potential use for Cd(II), Ni(II), and Zn(II) bioremoval from liquid media. The presence of toxic heavy metals prolonged the lag phase in growth and reduced biomass growth for all three Rhodobacter species at concentrations of Cd, Ni, and Zn above 10 mg/L. However, all three Rhodobacter species also had a relatively high specific growth rate against each toxic heavy metal stress test for concentrations below 20 mg/L and possessed a potential bioaccumulation ability. The removal efficiency by all strains was highest for Cd(II), followed by Ni(II), and lowest for Zn(II), with the removal efficiency of Cd(II) by Rhodobacter species being 66% or more. Among the three strains, R. blasticus showed a higher removal efficiency of Cd(II) and Ni(II) than R. capsulatus and R. sphaeroides. Results also suggest that the bio-removal processes of toxic heavy metal ions by Rhodobacter species involve both bioaccumulation (intracellular uptake) and biosorption (surface binding).

• Journal of the Korean GEO-environmental Society
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• v.7 no.4
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• pp.5-13
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• 2006

This study was conducted to evaluate the application of $UV/TiO_2/H_2O_2$ process for treating humic acid and heavy metals in surface water. Removal efficiency of $UV/TiO_2/H_2O_2$ process was much more efficient than that of $UV/TiO_2$ process for humic acid and heavy metals removal. The removal rate of humic acid and heavy metals increased with the increase of $TiO_2$ dosage and UV intensity, however decreased with more than 0.3 g/L of $TiO_2$ dosage. The addition of $H_2O_2$ as an oxidant was a positive effect for the removal rate of humic acid and heavy metals especially in the concentration of 50 mg/L $H_2O_2$.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.3
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• pp.27-33
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• 2004

The catalytic effect of waterworks sludge on NOx removal in $BaTiO_3$pellets and sludge pellets combined packed-bed plasma reactor with plate-plate electrode geometry is measured for the various conditions. NOx removal rate is about 90[%] at $BaTiO_3$-sludge combined reactor used fresh sludge. $NO_2$ and $O_3$ as byproducts are significantly generated in only $BaTiO_3$ packed-bed plasma reactor, however, in $BaTiO_3$-sludge combined packed-bed reactor, $NO_2$ and $O_3$ are completely removed while $CO_2$ as by-products are observed from FTIR spectra. $NO_2$ and $O_3$ seem to react with metallic molecules, metal oxide, and organic compounds that are generally chlorophyll included in sludge. NOx removal rate increases with $O_2$ concentration increasing. Removal rates $NO_2$ and $O_3$ are independent of operating time and repetition measurement times.

• Korean Journal of Environmental Agriculture
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• v.30 no.3
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• pp.310-315
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• 2011

BACKGROUND: Heavy-metal pollution represents an important environmental problem due to the toxic effects of metals, and their accumulation throughout the food chain leads to serious ecological and health problems. METHODS AND RESULTS: Optimum conditions in continuous-flow stirred tank reactor (CSTR) and packedbed column contactor (PBCC) using brown seaweed biosorbent were investigated. Under optimum conditions from both lab-scale biosorbent systems, removal efficiency of copper (Cu) in a large-scale PBCC system was investigated. Removal capacity of Cu using brown seaweed biosorbent in a lab-scale CSTR system was higher than that in a lab-scale PBCC system. On the other hand, over 48 L/day of flow rate in Cu solution, removal efficiency of Cu in a lab-scale PBCC system was higher than that in a lab-scale CSTR system. Optimum flow rate of Cu was 24 L/day, optimum Cu solution concentration was 100 mg/L. Removal capacity of Cu at different stages was higher in the order of double column biosorption system > single column biosorption system. Under different heavy metals, removal capacities of heavy metal were higher in the order of Pb > Cr > Ni > Mn ${\geq}$ Cu ${\geq}$ Cd ${\fallingdotseq}$ Zn ${\geq}$ Co. Removal capacity of Cu was 138 L in a large-scale PBCC system. Removal capacity of Cu a large-scale PBCC system was similar with in a lab-scale PBCC system. CONCLUSION(s): Therefore, PBCC system using brown seaweed biosorbent was suitable for treating heavy metal wastewater.

• Journal of the Korean institute of surface engineering
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• v.57 no.3
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• pp.140-154
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• 2024

As the trend towards miniaturization in semiconductor integration process, the limitations of interconnection metals such as copper, tungsten have become apparent, prompting research into the emergence of new materials like cobalt and emphasizing the importance of studying the corresponding process conditions. During the chemical mechanical polishing (CMP) process, corrosion inhibitors are added to the slurry, forming passivation layers on the cobalt surface, thereby playing a crucial role in controlling the dissolution rate of the metal surface, enhancing both removal rate and selectivity. This review investigates the understanding of the cobalt polishing process and examines the characteristics and behavior of corrosion inhibitors, a type of slurry additive, on the cobalt surface. Among the corrosion inhibitors examined, benzotriazole (BTA), 1,2,4-triazole (TAZ), and potassium oleate (PO) all improved surface characteristics through their interaction with cobalt. These findings provide important guidelines for selecting corrosion inhibitors to optimize CMP processes for cobalt-based semiconductor materials. Future research should explore combinations of various corrosion inhibitors and the development of new compounds to further enhance the efficiency of semiconductor processes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.889-893
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• 2006

Chemical mechanical polishing (CMP) achieves surface planrity through combined mechanical and chemical means. The role of slurry is very important in metal CMP. Slurry used in metal CMP normally consists of oxidizers, complexing agents, corrosion inhibitors and abrasives. This paper investigates the effects of citric acid as a complexing agent for Cu CMP with $H_2O_2$. In order to study chemical effects of citric acid, X-ray photoelectron spectroscopy (XPS) was peformed on Cu sample after etching test. XPS results reveal that CuO, $Cu(OH)_2$ layer decrease but $CU/CU_2O$ layer increase on Cu sample surface. To investigate nanomechanical properties of Cu sample surface, nanoindentation was performed on Cu sample. Results of nanoindentation indicate wear resistance of Cu surface decrease. According to decrease of wear resistance on Cu surface removal rate increases from $285\;{\AA}/min\;to\;8645\;{\AA}/min$ in Cu CMP.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.4
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• pp.378-383
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• 2004

Tungsten is widely used as a plug for the multi-level interconnection structures. However, due to the poor adhesive properties of tungsten(W) on SiO$_2$ layer, the Ti/TiN barrier layer is usually deposited onto SiO$_2$ for increasing adhesion ability with W film. Generally, for the W-CMP(chemical mechanical polishing) process, the passivation layer on the tungsten surface during CMP plays an important role. In this paper, the effect of oxidant on the polishing selectivity of W/Ti/TiN layer was investigated. The alumina(A1$_2$O$_3$)-based slurry with $H_2O$$_2$ as the oxidizer was used for CMP applications. As an experimental result, for the case of 5 wt％ oxidizer added, the removal rates were improved and polishing selectivity of 1.4:1 was obtained. It was also found that the CMP characteristics of W and Ti metal layer including surface roughness were strongly dependent on the amounts of $H_2O$$_2$ oxidizer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.529-529
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• 2007

Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

• Applied Chemistry for Engineering
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• v.30 no.5
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• pp.536-545
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• 2019

An experiment was conducted to evaluate the adsorptive removal of Pb(II) from an aqueous solution using a mixture of spent coffee grounds and chitosan on beads (CC-beads). Various parameters affecting the adsorption process of Pb(II) using CC-beads were investigated. Based on the experimental data, the adsorption kinetics and adsorption isotherms were analyzed for their adsorption rate, maximum adsorption capacity, adsorption energy and adsorption strength. Moreover, the entropy, enthalpy and free energy were also calculated by thermodynamic analysis. According to the FT-IR analysis, a CC-bead has a very suitable structure for easy heavy metal adsorption. The process of adsorbing Pb(II) using CC-beads was suitable for pseudo-second order kinetic and Langmuir model, with a maximum adsorption capacity of 163.51 (mg/g). The adsorption of Pb(II) using CC-beads was closer to chemical adsorption than physical adsorption. In addition, the adsorption of Pb(II) on CC-beads was exothermic and spontaneous in nature. CC-beads are economical because they are inexpensive and also the waste can be recycled, which is very significant in terms of the continuous circulation of resources. Thus, CC-beads can compete with other adsorbents.