• Title/Summary/Keyword: metal organic deposition

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Fully Organic PIN OLEDs with High Power Efficiency and Long Lifetime for the Use in Display and Lighting Applications

  • Blochwitz-Nimoth, Jan;Birnstock, Jan;Wellmann, Philipp;Werner, Ansgar;Romainczyk, Tilmann;Limmert, Michael;Grubing, Andre
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.955-962
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    • 2005
  • Power efficiency, lifetime and stable manufacturing processes are the crucial parameters for the success of organic light emitting diodes (OLEDs) in display and lighting applications. Highest power efficiencies of PIN-OLEDs for all principal colours and for bottom and top emission OLED structures have been demonstrated. The PIN structure, which means the incorporation of intentionally doped charge carrier transport layer in a suitable OLED layer setup, lowers the operating voltage to achieve highest power efficiencies. Up to now the n-doping of the electron transport layer has been done by alkali metal co-deposition. This has main draw-backs in terms of manufacturability, since the handling of large amounts of pure Cs is a basic issue in production lines. Here we present in detail results on PIN-OLEDs comprising a newly developed molecular n-dopant. All the previous OLED performance data based on PIN-OLEDs with alkali metal doping could be reproduced and will be further improved in the future. Hence, for the first time, a full manufacturing compatible PIN-OLED is available.

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Dielectric Properties of Ta2O5 Films Annealed at Various Temperature by MOCVD and MOD (MOCVD법과 MOD법으로 제작된 Ta2O5 박막의 열처리 온도에 따른 유전특성연구)

  • Kang, Pil-Kyu;Jhin, Jung-geun;Byun, Dong-jin;Bae, Jae-jun;Nahm, Sahn
    • Korean Journal of Materials Research
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    • v.13 no.12
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    • pp.801-805
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    • 2003
  • To explore the annealing temperature dependence of dielectric properties $Ta_2$$O_{5}$ thin films were prepared by MOCVD(metal-organic chemical vapor deposition) and MOD(metal-organic decomposition). The $Ta_2$$O_{5}$thin films fabricated MOCVD and MOD were annealed in $O_2$at temperature between 600 and 90$0^{\circ}C$. The measured dielectric constant of both films at 100 KHz was the highest value at $650^{\circ}C$ and decreased with increasing annealing temperature above $650^{\circ}C$. Plane-view SEM image showed that the boundary seems to be crack broke out with increasing annealing temperature. It was confirmed that outbreak of boundary influenced a decrease of dielectric constant with increasing annealing temperature. The leakage current density increased with increasing annealing temperature.

Atomic layer deposition of In-Sb-Te Thin Films for PRAM Application

  • Lee, Eui-Bok;Ju, Byeong-Kwon;Kim, Yong-Tae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.132-132
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    • 2011
  • For the programming volume of PRAM, Ge2Sb2Te5(GST) thin films have been dominantly used and prepared by physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD). Among these methods, ALD is particularly considered as the most promising technique for the integration of PRAM because the ALD offers a superior conformality to PVD and CVD methods and a digital thickness control precisely to the atomic level since the film is deposited one atomic layer at a time. Meanwhile, although the IST has been already known as an optical data storage material, recently, it is known that the IST benefits multistate switching behavior, meaning that the IST-PRAM can be used for mutli-level coding, which is quite different and unique performance compared with the GST-PRAM. Therefore, it is necessary to investigate a possibility of the IST materials for the application of PRAM. So far there are many attempts to deposit the IST with MOCVD and PVD. However, it has not been reported that the IST can be deposited with the ALD method since the ALD reaction mechanism of metal organic precursors and the deposition parameters related with the ALD window are rarely known. Therefore, the main aim of this work is to demonstrate the ALD process for IST films with various precursors and the conformal filling of a nano size programming volume structure with the ALD?IST film for the integration. InSbTe (IST) thin films were deposited by ALD method with different precursors and deposition parameters and demonstrated conformal filling of the nano size programmable volume of cell structure for the integration of phase change random access memory (PRAM). The deposition rate and incubation time are 1.98 A/cycle and 25 cycle, respectively. The complete filling of nano size volume will be useful to fabricate the bottom contact type PRAM.

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Formation of CVD-Cu Thin Films on Polyimide Substrate (Polyimide 기판을 이용한 CVD-Cu 박막 형성기술)

  • 조남인;임종설;설용태
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.1 no.1
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    • pp.37-42
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    • 2000
  • Copper thin films have been prepared by a metal organic chemical vapor deposition (MOCVD) technology on polyimide and TiN substrates. The Cu-MOCVD technology has advantages of the high deposition rate and the good step coverage compared with the conventional physical vapor deposition (PVD) technology in several industrial applications. The Cu films have been deposited with varying the experimental conditions of substrate temperatures and copper source vapor pressures. The films were annealed in a vacuum condition after the deposition, and the annealing effect on the electrical properties of the films was measured. The crystallinity and the microstructures of the films were observed by scanning electron microscopy (SEM), and the electrical resistivity was measured by 4-point probe. In the case of the Cu deposition on TiN substrate, the best electrical property of the films was measured for the samples prepared at 18$0^{\circ}C$. Very high deposition rate of the Cu film up to 250 nm/min was obtained on the polyimide substrate when the mixture of liquid and vapour precursor was used.

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Studies on semiconducting metal-oxide(ZnO) Nanoweb from Electrospinning (전기방사를 이용한 반도체 산화물(ZnO) 나노웹 제조에 관한 연구)

  • Jo, Na-Gyeong;Kim, Han-Seong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.253-253
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    • 2009
  • Electrospinning is one of the simple, cost- efficient methods to produce long continuous semiconducting oxide nanofibers. Polyvinyl Alcohol (PVA) and zinc acetate were used. PVA/Zinc acetate aqueous solutions were electrospun into nonwoven webs. CCD camera, with a lens of long working distance and digital video board were used in capturing the drop and web deposition. The diameter and morphology of nanofibers were analyzed with a Field-emission scanning electron microscopy (FE-SEM). In this study, the average diameter and morphology of nanofibers have been explorered.

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Properties in Organic Photovoltaic Cell Depending on the Exciton Blocking Layer Thickness (엑시톤 억제층 두께에 따른 유기 광기전력 소자의 특성)

  • Oh, Hyun-Seok;Lee, Joon-Ung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.12
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    • pp.1148-1151
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    • 2005
  • Photovoltaic effects in organic solar cell were studied in a cell configuration of ITO/PEDOT:PSS/CuPc(20 nm)/$C_{60}$(40 nm)/BCP/Al(150 nm) at room temperature. Here, the BCP layer works as an exciton blocking layer. The exciton blocking layer must transport electrons from the acceptor layer to the metal cathode with minimal increase in the total cell series resistance and should absorb damage during cathode deposition. Therefore, a proper thickness of the exciton blocking layer is required for an optimized photovoltaic cell. Several thicknesses of BCP were made between $C_{60}$ and Al. And we obtained characteristic parameters such as short-circuit current, open-circuit voltage, and power conversion efficiency of the device under the illumination of AM 1.5.

Properties of the Exciton Blocking Layer with BCP in Organic Photovoltaic cell (BCP를 엑시톤 억제층으로 사용한 유기 광기전력 소자의 특성)

  • Oh, Hyun-Seok;Lee, Joon-Ung;Lee, Won-Jae;Kim, Tae-Wan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.273-274
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    • 2005
  • Photovoltaic effects in organic solar cell were studied in a cell configuration of ITO/PEDOT:PSS/CuPc(20nm)/$C_{60}$(40nm)/BCP/Al(150nm) at room temperature. Here, the BCP layer works as an exciton blocking layer. The exciton blocking layer must transport electrons from the acceptor layer to the metal cathode with minimal increase in the total cell series resistance and should absorb damage during cathode deposition. Therefore, a proper thickness of the exciton blocking layer is required for an optimized photovoltaic cell. Several thicknesses of BCP were made between $C_{60}$ and Al. And we obtained characteristic parameters such as short-circuit current, open-circuit voltage, and power conversion efficiency of the device under the illumination of AM 1.5.

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A Study on the Electrochemical Properties of Water-soluble Waste Cutting Oil using Boron-Doped Diamond Electrodes (붕소도핑 다이아몬드 전극을 이용한 수용성 폐절삭유의 전기화학적 특성연구)

  • J.H., Park;T.G., Kim
    • Journal of the Korean Society for Heat Treatment
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    • v.35 no.6
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    • pp.337-342
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    • 2022
  • In metal cutting, water-soluble cutting oil is used for cooling the surface of the workpiece and improving the surface roughness. However, waste cutting oil contains preservatives and surfactants, and if it is discarded as it is, it has an great influence on environmental pollution. For this reason, regulations on the use of cutting oil are being stricter. Hence, the development of eco-friendly treatment technologies is required. In this study, a diamond electrode doped with boron on a niobium substrate was deposited by thermal filament chemical vapor deposition and waste cutting oil was treated using an electrochemical method. Compared to the total amount of organic carbon contained in the waste cutting oil, it was confirmed that the boron-doped diamonds developed from this study showed much better performance than electrodes that has been widely used before.

A Study of the Change of Hall Effect as a Function of the V/III Ratio in n-GaAs compound Semiconductors

  • Kim, In-Sung
    • Transactions on Electrical and Electronic Materials
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    • v.10 no.4
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    • pp.107-110
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    • 2009
  • In this study, the Hall effect has been studied in n-GaAs samples characterized by V/IIl growth ratios of 25, 50 and 100 and prepared by metal organic chemical vapor deposition. For the Hall effect measurements, the grown samples were cut to a size of 1${\times}$1 cm. The measurements were carried out at room temperature, using Indium contact metal at the four corners of the samples. According to the experimental results, the Schottky effect was not ovservation. Also for the n-GaAs sample of V/Ill 100 ratio the electron drift velocity was very high.

380-nm Ultraviolet Light-Emitting Diodes with InGaN/AlGaN MQW Structure

  • Bae, Sung-Bum;Kim, Sung-Bok;Kim, Dong-Churl;Nam, Eun Soo;Lim, Sung-Mook;Son, Jeong-Hwan;Jo, Yi-Sang
    • ETRI Journal
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    • v.35 no.4
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    • pp.566-570
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    • 2013
  • In this paper, we demonstrate the capabilities of 380-nm ultraviolet (UV) light-emitting diodes (LEDs) using metal organic chemical vapor deposition. The epi-structure of these LEDs consists of InGaN/AlGaN multiple quantum wells on a patterned sapphire substrate, and the devices are fabricated using a conventional LED process. The LEDs are packaged with a type of surface mount device with Al-metal. A UV LED can emit light at 383.3 nm, and its maximum output power is 118.4 mW at 350 mA.