The Fabrication of a Micromachined Ceramic Thin-Film Pressure Sensor with High Overpressure Tolerance (과부하 방지용 마이크로머시닝 세라믹 박막형 압력센서의 제작)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.07b
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- pp.731-734
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- 2002