• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.5
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• pp.632-639
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• 2014

Mechanical stress and the vacuum level are the two main factors dominating the quality factor of a resonator operated in the vacuum range 1 mTorr to 10 Torr. This means that if the quality factor of a resonator is very insensitive to the mechanical stress in the vacuum range, it is sensitive to mainly the ambient vacuum level. In this paper, a wafer-level packaged MEMS resonator with a highly vacuum-sensitive quality factor is presented. The proposed device is characterized by a package with out-of-plane symmetry and a suspending structure with only a single anchor. Out-of-plane symmetry helps prevent deformation of the packaged device due to thermal mismatch, and a single-clamped structure facilitates constraint-free displacement. As a result, the proposed device is very insensitive to mechanical stress and is sensitive to mainly the ambient vacuum level. The average quality factors of the devices packaged under pressures of 50, 100, and 200 mTorr were 4987, 3415, and 2127, respectively. The results demonstrated the high controllability of the quality factor by vacuum adjustment. The mechanical robustness of the quality factor was confirmed by comparing the quality factors before and after high-temperature storage. Furthermore, through more than 50 days of monitoring, the stability of the quality factor was also certified.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.32-33
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• 2006

In this study, in order to develop multilayer ceramic actuator for ultrasonic nozzle and ultrasonic vibrator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$. $Na_2CO_3$ and ZnO as sintering aids. And then, their piezoelectric and dielectric properties according to the amount of ZnO addition were investigated. The addition of ZnO improved density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant of PMN-PNN-PZT ceramics due to the increase of sinterability and accepter doping effect. Electromechanical coupling factor and mechanical quality factor of PMN-PNN-PZT ceramics increased with ZnO amount up to 0.4wt% and then decreased. At the sintering temperature of $900^{\circ}C$ and 0.4wt% ZnO addition, density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant showed the optimum value of 7.876g/$cm^2$, 1299, 0.612, 1151 and 369pC/N, respectively.

• Smart Structures and Systems
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• v.17 no.2
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• pp.313-325
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• 2016

The paper provides a comprehensive procedure for the mechanical and magnetic design of Langevin transducer based on giant magnetostrictive material. The the transducer is designed to work at its second mode of vibration, having high mechanical quality factor and low damping coefficient. The design procedure is based on an analytical model and it is verified by finite-element analysis. Experimental tests based on impedance response analysis in first and second modes are carried out on the prototype. Results confirm the appropriate design of this transducer, demonstrating the highest mechanical quality factor between the resonant transducers in the literature.

• Journal of Electrical Engineering and Technology
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• v.12 no.2
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• pp.846-851
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• 2017

Piezoelectricity is the capability of a piezoelectric material to change mechanical energy into electrical energy. The determination of electrical and mechanical properties plays a significant role in characterizing the piezoelectric material. The energy losses characteristics of piezoelectric material can be described by mechanical quality factor. In this paper, the output voltage and mechanical quality factor of Lead Zirconate Titanate (PZT-4A) piezoelectric material is determined under various resistance and loading conditions by using the test setup. The commercial FEM software ABAQUS is used to analyze the performance of piezoelectric material under static loading conditions. It is observed that these properties affect the performance of a material particularly in the designing of smart structures. The experimental results are partially compared to the simulation values.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2090-2092
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• 2004

In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.

• Journal of Mechanical Science and Technology
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• v.19 no.9
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• pp.1711-1719
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• 2005

In an electro statically actuated nanoelectromechanical system (NEMS) resonator, it is shown that both the resonance frequency and the resonance quality (Q) factor can be manipulated. How much the frequency and quality factor can be tuned by excitation voltage and resistance on a doubly-clamped beam resonator is addressed. A mathematical model for investigating the tuning effects is presented. All results are shown based on the feasible dimension of the nanoresonator and appropriate external driving voltage, yielding up to 20 MHz resonance frequency. Such parameter tuning could prove to be a very convenient scheme to actively control the response of NEMS for a variety of applications.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.10 no.1
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• pp.170-178
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• 2000

Most of manufacturers try to produce the most efficient filter for respirators with the lowest breathing resistance. Filter performance depends on low penetration, i.e., high efficiency (%), and low pressure drop ($mmH_2O$). This study was performed to evaluate performance of respirator filters by quality factor ($q_F$) and suggest the direction for improvement of respirator filters of good quality in Korea. Two mechanical filters, S and K made in Korea, three filtering facepieces, S made in China, C made in Korea and M made in USA, which were widely used in the workplace, were selected and tested efficiency and pressure drop in accordance with flow rate, using with Automated Filter Tester Model 8110 (TSI, USA). The best quality factor within the same respirator filter categories was $0.0672cm^{-1}\;H_2O$ for mechanical filter S, $0.0698cm^{-1}\;H_2O$ for filtering facepiece M at flow rate of 32Lpm. Mechanical filter S would be the best suitable during heavy work since qulity factors decrease less sharply than any others as increased flow rates. It was necessary for mechanical filter S to lower pressure drop without increasing efficiency, but mechanical filter K should be increased efficiency and decreased pressure drop. While filtering facepiece M had the best quality performance of three ones, Sand C should get much higher efficiency and lower pressure for better performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05c
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• pp.19-24
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• 2001

In this study, Pb(La Ce)$TiO_3$ composition ceramics were manufactured for 20 MHz resonator application. Electromechanical coupling factor, mechanical quality factor and dynamic range of thickness vibration mode were measured as the variations of L/T(length/thickness) ratio of ceramic substrats. Mechanical quality factor and dynamic range of third overtone thickness vibration mode showed the highest value of 2,773 and 52.22 dB at specimen S4(l/t=12), respectively. The excellent temperature stability of resonant frequency suitable for resonator application was shown, regardless of thermal shock.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.9
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• pp.720-725
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• 2001

In this study, Pb(La,Ce)Ti $O_3$ ceramics were manufactured for 20 MHz resonator application. Electromechanical coupling factor( $k_{t}$, $k_{t3}$, mechanical quality factor( $Q_{mt}$ , $Q_{mt3}$ and dydnamic range (D.R) of thickness vibration mode were measured as the variations of $\ell$/t(length/thickness) ratio of ceramic substrates. Mechanical quality factor( $Q_{mt3}$) and dynamic range of third overtone thickness vibration mode showed the highest value of 2,773 and 52.22dB at specimen S4($\ell$/t=12), respectively. The excellent temperature stability of resonant frequency suitable for resonator application was shown, regardless of thermal shock.k.ock.k.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.161-164
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• 2001

In this paper, we investigated the dielectric and piezoelectric properties of Pb(Sb, Nb)O$_3$-Pb(Zr, Ti)O$_3$ ceramic(PSN) for piezoelectric transformer and actuator etc. Effect of MnO$_2$ addition on the PSN ceramic was investigated. Anisotropic properties of electromechanical coupling factor and piezoelectric properties proved to be varied with amount of MnO$_2$ impurity and sintering temperature. The electromechanical coupling factor k$_{p}$ of 0.38 and the mechanical quality factor Q$_{m}$ of 1944 were obtained from the specimen with 0.4 wt% MnO$_2$ sintered at 115$0^{\circ}C$ addition. Experimental results indicated that the PSN ceramic with MnO$_2$ impurity can be effectively used for piezoelectric transformer and actuator.tor.