• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.558-561
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• 2001

Vanadium oxide ($VO_{x}$) thin films are very good candidate material for uncooked infrared (IR) detectors due to their high temperature coefficient of resistance (TCR) at room temperature. But, the deposition of $VO_{x}$ thin films showing good electrical properties is very difficult in micro bolometer fabrication process using sacrificial layer removal because of its low process temperature and thickness of thin films less than 1000${\AA}$. This paper presents a new fabrication process of $VO_{x}$ thin films having high TCR and low resistance. Through sandwich structure of $VO_{x}$(100${\AA}$)/V(80${\AA}$)/$VO_{x}$(500${\AA}$) by sputter method and post-annealing at oxygen ambient, we have achieved high TCR more than -2%/$^{\circ}C$ and low resistance less than $10K\Omega$ at room temperature.

• Clean Technology
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• v.13 no.2
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• pp.115-121
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• 2007

In this study, we analyzed experimently the NO and $SO_2$ removal by the dielectric barrier discharge-photocatalysts hybrid process. The glass spheres were used as a dielectric material for dielectric barrier discharge and the $TiO_2$ photocatalysts were coated onto those spheres by the dip-coating method. The $TiO_2$ particles were coated in the sponge-shape, which has the larger surface area. As the voltage applied to the plasma reactor, the pulse frequency of applied voltage, or the residence time increases, the NO and $SO_2$ removal efficiencies increase. The increase in the supplied concentrations of NO and $SO_2$ leads to the higher energy for NO and $SO_2$ removal and the NO and $SO_2$ removal efficiencies decrease. These experimental results can be used as a basis to design the dielectric barrier discharge-photocatalysts hybrid process to remove NO and $SO_2$.

• Journal of odor and indoor environment
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• v.16 no.2
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• pp.139-149
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• 2017

In order to reduce odor and methane emission from the landfill, open biocovers and a closed biofilter were applied to the landfill site. Three biocovers and the biofilter are suitable for relatively small-sized landfills with facilities that cannot resource methane into recovery due to small volumes of methane emission. Biocover-1 consists only of the soil of the landfill site while biocover-2 is mixed with the earthworm casts and artificial soil (perlite). The biofilter formed a bio-layer by adding mixed food waste compost as packing material of biocover-2. The removal efficiency decreased over time on biocover-1. However, biocover-2 and the biofilter showed stable odor removal efficiency. The rates of methane removal efficiency were in order of biofilter (94.9%)>, biocover-1(42.3%)>, and biocover-2 (37.0%). The methane removal efficiency over time in biocover-1 was gradually decreased. However, drastic efficiency decline was observed in biocover-2 due to the hardening process. As a result of overturning the surface soil where the hardening process was observed, methane removal efficiency increased again. The biofilter showed stable methane removal efficiency without degradation. The estimate methane oxidation rate in biocover-1 was an average of 10.4%. Biocover-2 showed an efficiency of 46.3% after 25 days of forming biocover. However, due to hardening process efficiency dropped to 4.6%. After overturn of the surface soil, the rate subsequently increased to 17.9%, with an evaluated average of 12.5%.

• Advances in nano research
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• v.10 no.1
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• pp.77-90
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• 2021

In the present study, novel chitosan coated magnetic magnetite (Fe3O4) nanoparticles were successfully biosynthesized from mushroom, Agaricus campestris, extract. The obtained bio-nanocomposite material was used to investigate ultra-fast and highly efficient for removal of Ni2+ ions in a fixed-bed column. Chitosan was treated as polyelectrolyte complex with Fe3O4 nanoparticles and a Fungal Bio-Nanocomposite Material (FBNM) was derived. The FBNM was characterized by using X-Ray Diffractometer (XRD), Scanning Electron Microscopy-Energy Dispersive X-Ray Spectroscopy (SEM-EDS), Fourier Transform Infrared spectra (FTIR) and Thermogravimetric Analysis (TGA) techniques and under varied experimental conditions. The influence of some important operating conditions including pH, flow rate and initial Ni2+ concentration on the uptake of Ni2+ solution was also optimized using a synthetic water sample. A Central Composite Design (CCD) combined with Response Surface Modeling (RSM) was carried out to maximize Ni2+ removal using FBNM for adsorption process. A regression model was derived using CCD to predict the responses and analysis of variance (ANOVA) and lack of fit test was used to check model adequacy. It was observed that the quadratic model, which was controlled and proposed, was originated from experimental design data. The FBNM maximum adsorption capacity was determined as 59.8 mg g-1. Finally, developed method was applied to soft drinks to determine Ni2+ levels. Reusability of FBNM was tested, and the adsorption and desorption capacities were not affected after eight cycles. The paper suggests that the FBNM is a promising recyclable nanoadsorbent for the removal of Ni2+ from various soft drinks.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.39-43
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• 2008

Atmospheric pressure plasma polishing (APPP) is a noncontact precision machining technology that uses low temperature plasma chemical reactions to perform atom-scale material removal. APPP is a complicated process, which is affected by many factors. Through a preliminary theoretical analysis and simulation, we confirmed that some of the key factors are the radio frequency (RF) power, the working distance, and the gas ratio. We studied the influence of the RF power and gas ratio on the removal rate using atomic emission spectroscopy, and determined the removal profiles in actual operation using a commercial form talysurf. The experimental results agreed closely with the theoretical simulations and confirmed the effect of the working distance. Finally, we determined the element compositions of the machined surfaces under different gas ratios using X-ray photoelectron spectroscopy to study the influence of the gas ratio in more detail. We achieved a surface roughness of Ra 0.6 nm on silicon wafers with a peak removal rate of approximately 32 $mm^{3}$/min.

• KSBB Journal
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• v.23 no.6
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• pp.535-540
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• 2008

In this study, the effects of several factors such as initial nitrate concentration, C/N ratio, biomass amount and external carbon source on denitrification process were investigated using synthetic wastewater and sludge obtained from wastewater treatment facility. As a result, the condition of lower initial nitrate concentration was increased to the removal rate of nitrate than that of high concentration. The increases of C/N ratio and initial biomass amount were linearly enhanced the removal rate. The use of ethanol as external carbon source was shown the highest removal yield than that of others.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.45-49
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• 2007

When drilling using electrical-discharge machining (EDM), severe electrode wear makes in-process measurements of the depth of the drilled hole and the volume of material removed impossible. To estimate the volume of material removed a reliable real-time discharge pulse counting method is proposed by assuming that the volume removed in EDM is proportional to the number of discharge pulses from an iso-energy pulse generator. The geometry of machined holes, including depths and cross-sectional profiles, is estimated using geometric analysis. A proportional relationship between the volume of material removed and the number of discharge pulses was developed and verified by experiments.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.5
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• pp.469-476
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• 2009

Hard facing overlay welding in high chromium carbide is a representative way of extending the fatigue life or recompensing damage, because workpiece surface is uniformly overlay-welded by alloy material. In general, grinding process is currently used for finish due to hardness of weld material. The development of tool material, such as PCBN, has made it possible to use turning instead of grinding. There are many advantages of hard Owning, as lower equipment costs, shorter setup time, fewer process steps, higher material removal rate, better surface integrity and the elimination of cutting fluid. In this paper, machining characteristics and cutting performance are examined to investigate turning possibility of overly welding in high chromium carbide.

• Nuclear Engineering and Technology
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• v.54 no.2
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• pp.486-492
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• 2022

Nitrogen oxides (NO_x; NO and NO₂) are major air pollutants and can cause harmful effects on the human body. Electron Beam Flue Gas Treatment (EBFGT) is a technology that generates electrons with an energy of 0.5-1 MeV using electron accelerators and effectively processes exhaust gases. In this study, NO_x was removed using an electron beam accelerator with spraying additives (NaOH and NH₄OH). NO and NO₂ were 100% and more than 94% removed, respectively, at an electron beam absorbed dose of 20 kGy and an additive concentration of 0.02 M (mol/L). In most cases, NO_x was removed better with lower initial NOx concentrations and higher electron beam absorbed doses. As the irradiation strength (mA) of the electron beam increases, the probability of electron impact on the material accordingly rises, which may lead to increase removal efficiency. The results of the present study show that the continuous electron beam process using additives achieved more effective removal efficiency than either individual process (wet-scrubbing or EB irradiation only).