• 제목/요약/키워드: material area

검색결과 4,893건 처리시간 0.034초

대면적 플라즈마 소스에서의 ITO 식각균일도 향상 (Improvement of 170 etching uniformity in a large area plasma source)

  • 김진우;조수범;김봉주;박세근;오범환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.145-148
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    • 2001
  • A large area plasma source using parallel 2x2 ICP antennas showed improved etching uniformity by the E-ICP operation. ITO etching process with CH$_4$ gas chemistry is optimized with the DOE(Design of Experiment) based on Taguchi method. Various methane ratios in methane and argon mixture are compared to confirm the effect of polymerization. The analysis shows that the effect of bias power is the largeset. We obtained higher ITO etching rate and better uniformity on 350x300mm substrate at the 50Hz magnetization frequency of the E-ICP operation technique.

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영동산 일라이트의 전자기적 특성 측정 (A Measurement of Electromagnetic Property of Illite found in Young-dong Area)

  • 김진철;이원희;구경완;허정
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.267-270
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    • 2000
  • This paper describes measurement of relative permittivity of illite found in young-dong area. A measurement of relative permittivity of illite used to cylindrical cavity resonators with moveable cap. A concentric dielectric-rod inserted cylindrical cavity resonator and an exact field representation of travelling wave mode are introduced for measurement of relative permittivity. The exact electromagnetic fields in cylindrical cavity with concentric dielectric rod is analysed. A relative permittivity of dielectric in cavity is calculated by analyzing the characteristic equation. The characteristic equation is solved by using the ContourPlot graph of Mathematica. We know that the field representation of travelling mode is exact. As a result, relative permittivity of dielectric materials were 7.820 at sample-1 and 7.894 at sample-2.

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열처리 방법에 따른 실리콘 기판쌍의 접합 특성 (Bonding Property of Silicon Wafer Pairs with Annealing Method)

  • 민홍석;이상현;송오성;주영창
    • 한국전기전자재료학회논문지
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    • 제16권5호
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    • pp.365-371
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    • 2003
  • We prepared silicon on insulator(SOI) wafer pairs of Si/1800${\AA}$ -SiO$_2$ ∥ 1800${\AA}$ -SiO$_2$/Si using water direct bonding method. Wafer pairs bonded at room-temperature were annealed by a normal furnace system or a fast linear annealing(FLA) equipment, and the micro-structure of bonding interfaces for each annealing method was investigated. Upper wafer of bonded pairs was polished to be 50 $\mu\textrm{m}$ by chemical mechanical polishing(CMP) process to confirm the real application. Defects and bonding area of bonded water pairs were observed by optical images. Electrical and mechanical properties were characterized by measuring leakage current for sweeping to 120 V, and by observing the change of wafer curvature with annealing process, respectively. FLA process was superior to normal furnace process in aspects of bonding area, I-V property, and stress generation.

다양한 공진기 형태에 따른 압전박막필터 설계 및 특성 (Characteristics of film bulk acoustic resonators(FBAR) filters design with varying configuration of resonator)

  • 정중연;김용천;권상직;김경환;윤석진;최형욱
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.275-278
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    • 2003
  • The aim of the study is to scrutinize the relationship between the area of resonance and center frequency with varying thickness by analyzing the characteristics of 2-port resonator. This was done through ideal design using Leach model equivalent model modified Mason model equivalent circuit for the application of bandpass filter high-frequency band with resonator Moreover, through the design of ladder-type BPF, we were able to observe changes in bandwidth, resonation, out-of-band rejection depending on the number and area of resonator.

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저항 네트워크 모델을 통한 LED 전극의 최적화 배치에 대한 연구 (A Study on LED Electrode Optimal Disposition by Resistor Network Model)

  • 공명국;김도우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.457-458
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    • 2007
  • We investigated a resistor network model for the horizontal AlInGaN LED. Adding the proposed current density dependent relative quantum efficiency, the power simulation can be also obtained. Comparing the simulation and the measurement results for the LED with the size of $350{\mu}m$, the model is reasonable to simulate the forward voltage and the light output power. Using this model we investigated the optimization of the position and the number of the finger electrodes in a given chip area. It shows that the center disposition of the p-finger electrode in p-area is optimal for the voltage and best for the power. And the minimum number of the n-finger electrodes is best for the power.

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절삭공정의 변이와 고장에 의한 가공공구의 마모한계 (Wear Limit of Tool by the Shift and Failure of a Machining Process)

  • 이도경
    • 산업경영시스템학회지
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    • 제18권35호
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    • pp.9-16
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    • 1995
  • The degeneration of tool in material removal processing machinery can be characterized by wear, deflection, chattering and any failure in tool or in the material In be processed. In the previous studies, first three of them are analyzed as a preventive maintenance strategy in quality control area. The last of them, any failure, is analyzed as a preventive maintenance strategy in reliability area. In this research, we propose a simple integrated mathematical model which minimizes the cost of machinery failures and producing defects. We determine the optimal wear limit of tool by considering the percent defects. cost, the preventive maintenance cost, and the corrective maintenance cost.

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Failure Investigation of Fire-Side Water-Wall Tube Boiler

  • Fatah, M.C.;Agustiadi, D.;Pramono, A.W.
    • Corrosion Science and Technology
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    • 제20권5호
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    • pp.242-248
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    • 2021
  • Unforeseen failures of boilers in power plants may affect the continuation of electricity generation. Main failures in boilers are influenced by the tube material, tube position, boiler service temperature and pressure, and chemical composition of the feed water and coal. This investigation was intended to find answers on the causes and mechanism of failure of the fire-side boiler water-wall tubes, due to perforation and corrosion. The tube conformed to the material requirements in terms of its chemical composition and hardness. Microscopic examination showed ferrite and pearlite indicating no changes in its microstructure due to the temperature variation. SEM test showed a single layer and homogenous film density particularly on the area far from perforation. However, layers of corrosion product were formed on the nearby perforation area. EDX showed that there were Na, Ca, S, and O elements on the failed surface. XRD indicated the presence of Fe2O3 oxide. The failure mechanism was identified as a result of significant localized wall thinning of the boiler water wall-tube due to oxidation.

A Study on the Galvanic Corrosion for Zirconium with Titanium and 316L Stainless Steel

  • Baik, Shin-Young
    • 해양환경안전학회지
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    • 제19권3호
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    • pp.285-289
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    • 2013
  • The coastal area of Republic of Korea is very clean compared to other countries. In this reason, west coastal area of our country is a good place for breeding up a fish such as shrimp. In winter season, the heating system is required for preventing shrimp death caused by freezing in the farm. The heater in the heating system for fishery's farm is operated very severe combating corrosion due to high accumulation by feeding material and high temperature in heated sea water. Almost all manufactured heaters of STS 316L and Ti material are scrapped every year due to heavy corrosion such a general and crevice corrosion. For comparing the general and galvanic corrosion in new heater material, the test material of Zirconium (Zr), Titanium (Ti) and STS 316L are tested by potentiodynamic polarization, electrochemical impedance spectroscopy (EIS), current density-time methods and microscopic examination in a 3.5% NaCl solution. The corrosion potential (Ecor) measured by potentiodynamic polarization for Zr, Ti and STS 316L reveals -198, -250 and -450mV, corrosion current density 0.5, 2.5 and $6.5{\mu}A/cm^2$ respectively. The film resistance measured by EIS are Zr 63,000, Ti 39,700 and 316L $3,150{\Omega}$, and the current of Zr-Ti couple is $0.03{\mu}A$, whereas Zr-316L SS is $0.1{\mu}A$. According to the result of this experiment in 3.5% NaCl solution, Zr is excellent corrosion resistance material than Ti and STS 316L.

Predicting residual moment capacity of thermally insulated RC beams exposed to fire using artificial neural networks

  • Erdem, Hakan
    • Computers and Concrete
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    • 제19권6호
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    • pp.711-716
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    • 2017
  • This paper presents a method using artificial neural networks (ANNs) to predict the residual moment capacity of thermally insulated reinforced concrete (RC) beams exposed to fire. The use of heat resistant insulation material protects concrete beams against the harmful effects of fire. If it is desired to calculate the residual moment capacity of the beams in this state, the determination of the moment capacity of thermally insulated beams exposed to fire involves several consecutive calculations, which is significantly easier when ANNs are used. Beam width, beam effective depth, fire duration, concrete compressive and steel tensile strength, steel area, thermal conductivity of insulation material can influence behavior of RC beams exposed to high temperatures. In this study, a finite difference method was used to calculate the temperature distribution in a cross section of the beam, and temperature distribution, reduction mechanical properties of concrete and reinforcing steel and moment capacity were calculated using existing relations in literature. Data was generated for 336 beams with different beam width ($b_w$), beam account height (h), fire duration (t), mechanical properties of concrete ($f_{cd}$) and reinforcing steel ($f_{yd}$), steel area ($A_s$), insulation material thermal conductivity (kinsulation). Five input parameters ($b_w$, h, $f_{cd}$, $f_{yd}$, $A_s$ and $k_{insulation}$) were used in the ANN to estimate the moment capacity ($M_r$). The trained model allowed the investigation of the effects on the moment capacity of the insulation material and the results indicated that the use of insulation materials with the smallest value of the thermal conductivities used in calculations is effective in protecting the RC beam against fire.

2차 전지용 $LiMnO_{2}$ 활물질 합성의 전기화학적 특성과 평가 (Electrochemical properties and Estimation of $LiMnO_{2}$ Active Material Synthesis for Secondary Batteries)

  • 위성동;구할본
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.210-215
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    • 2002
  • This thesis is contents on the crystal grown by the solide phase method at $925^{\circ}C$ with orthorhombic structure that $LiMnO_{2}$ active material synthesised with precurse $Mn_{2}O_{3}$ and $LiOH.H_{2}O$ material to get three voltage level. The porosity analysis of the grown crystal in secondary batteries $LiMnO_{2}$ thin film is $1.323E+02\AA$ of the average pore diameter of powder particles and its structure to be taken the pore diameter was prepared. Adding voltage area to get properties of charge and discharge of which experiment result of $LiMnO_{2}$ thin film area 2.2V~4.3V, current and scan speed were 0.1mAh/g and $0.2mV/cm^{2}$ respectively, and properties of the charge and discharge to be got optimum experiment condition parameter and density rate of Li for analyze that unit discharge capacity with metal properties is 87mAh/g was 96.9[ppm] at 670.784[nm] wavelength, and density rate of Mn analyzed 837[ppm] at 257.610[nm]. It can be estimated the quality of thin film that wrong cell reject from the bottle of electrolyte. The results of SEM and XRD were the same that of original researchers.

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