• 전기학회논문지
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• 제60권9호
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• pp.1733-1740
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• 2011

In this research, a MEMS vibratory gyroscope with dual-mass system in the sensing mode has been proposed to increase the stability of the device using wide bandwidth. A wide flat region between the two resonance peaks of the dual-mass system removes the need for a frequency matching typically required for single mass vibratory gyroscopes. Bandwidth, mass ratio, spring constant, and frequency response of the dual-mass system have been analyzed with MATLAB and ANSYS simulation. Designed first and second peaks of sensing mode are 5,917 and 8,210Hz, respectively. Driving mode resonance frequency of 7,180Hz was located in the flat region between the two resonance peaks of the sensing mode. The device is fabricated with anodically bonded silicon-on-glass substrate. The chip size is 6mm x 6mm and the thickness of the silicon device layer is $50{\mu}m$. Despite the driving mode resonance frequency decrease of 2.8kHz and frequency shift of 176Hz from the sensing mode due to fabrication imperfections, measured driving frequency was located within the bandwidth of sensing part, which validates the utilized dual-mass concept. Measured bandwidth was 768Hz. Sensitivity calculated with measured displacement of driving and sensing parts was 22.4aF/deg/sec. Measured slope of the sensing point was 0.008dB/Hz.

• 제어로봇시스템학회논문지
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• 제12궈1호
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• pp.85-92
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• 2006

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.

• Advances in nano research
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• 제14권3호
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• pp.285-294
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• 2023

The dynamic and sensing performances of nanomechanical resonators with their different boundary conditions are studied based on surface elasticity-based modeling and simulation. Specifically, the effect of surface stress is included in Euler-Bernoulli beam model for different boundary conditions. It is shown that the surface effect on the intrinsic elastic property of nanowire is independent of boundary conditions, while these boundary conditions affect the frequency behavior of nanowire resonator. The detection sensitivity of nanowire resonator is remarkably found to depend on the boundary conditions such that double-clamping boundary condition results in the higher mass sensitivity of the resonator in comparison with simple-support or cantilever boundary condition. Furthermore, we show that the frequency shift of nanowire resonator due to mass adsorption is determined by its length, whereas the frequency shift is almost independent of its thickness. This study enables a design principle providing an insight into how the dynamic and sensing performances of nanomechanical resonator is determined and tuned.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.154-155
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• 2007

This paper describes frequency response of two-mass system for gyroscope applications. The two-mass system of the proposed device is adapted to the sensing part of the gyroscope in this research. Two-mass system has two resonant peaks and wide flat region between two resonant peaks. The resonant frequency of driving part is in this flat region. Therefore, frequency tuning is not necessary for mode matching. In the proposed device, resonant frequency is designed as 7183 Hz in driving part. Mass ratio of two masses in sensing part is 0.1 and device size is 6 mm $\times$ 6 mm. The device is fabricated by SiOG process. The fabricated spring width is increased from $4{\mu}m$ to $4.5{\sim}4.7{\mu}m$, and the measured resonant frequency is 8392 Hz in driving mode. We operated the sensing part using parallel plate of proof mass to verify the sensing part. It is confirmed the device has a wide fiat region in frequency response curve and the resonant frequency of the driving part is in the wide flat region of sensing mode.

• Smart Structures and Systems
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• 제5권3호
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• pp.279-290
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• 2009

Two degrees of freedom resonant systems are employed to improve the resonant property of resonant sensor, as compared to a single degree of freedom resonant system. This paper presents design, development and testing of two degrees of freedom resonant sensor. To measure absolute mass, cantilever shaped two different masses (smaller/absorber mass and bigger/drive mass) with identical resonant frequency are mechanically linked to form 2 - Degree-of-Freedom (DOF) resonator which exhibits higher amplitude of displacement at the smaller mass. The same concept is extended for measuring differential quantity, by having two bigger mass and one smaller mass. The main features of this work are the 3 - DOF resonator for differential detection and the microcontroller based closed loop electronics for resonant sensor with piezoelectric sensing and excitation. The advantage of using microcontroller is that the method can be easily extended for any range of measurand.

• Journal of Microbiology and Biotechnology
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• 제17권12호
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• pp.1922-1929
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• 2007

A simple whole-cell-based sensing system is proposed for determining the cell mass of H. pluvialis using ultraviolet fluorescence spectroscopy. An emission signal at 368 nm was used to detect the various kinds of green, green-brown, brown-red, and red H. pluvialis cells. The fluorescence emission intensities of the cells were highest at 368 nm with an excitation wavelength of 227 nm. An excitation wavelength of 227 nm was then selected for cell-mass sensing, as the emission fluorescence intensities of the cell suspensions were highest at this wavelength after subtracting the background interference. The emission fluorescence intensities of HPLC-grade water, filtered water, and HPLC-grade water containing a modified Bold's basal medium (MBBM) were measured and the difference was less than 1.6 for the selected wavelengths. Moreover, there was no difference in the emission intensity at 368 nm among suspensions of the various morphological states of the cells. A calibration curve of the fluorescence emission intensities. and cell mass was obtained with a high correlation ($R^2=0.9938$) for the various morphological forms of H. pluvialis. Accordingly, the proposed method showed no significant dependency on the various morphological cell forms, making it applicable for cell-mass measurement. A high correlation was found between the fluorescence emission intensities and the dry cell weight with a mixture of green, green-brown, brown-red, and red cells. In conclusion, the proposed model can be directly used for cell-mass sensing without any pretreatment and has potential use as a noninvasive method for the online determination of algal biomass.

• 한국정밀공학회지
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• 제11권6호
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• pp.109-116
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• 1994

Quickness and precision are the two most important requirements for an industrial scale used in production lines. In this paper, a new approach, "Dynamic-Mass measurement control System of Acceleration and Displacement(DMS-AD) sensing", is presented to improve some of drowbacks in conventional scales. The system, consisted of acceleration and displace- ment sensors, spring scale and microcomputer, is based on full utilization of dynamic mass measurement of acceleration and displacement via microcomputer-assisted real time monitoring. The rsulting system, when combined with appropriate dynamic mass estimation algorithm software, has shown its effectiveness in terms of two desirable characteristics required. required.

• Journal of Biosystems Engineering
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• 제41권4호
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• pp.408-417
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• 2016

Purpose: Yield monitoring systems are an essential component of precision agriculture. They indicate the spatial variability of crop yield in fields, and have become an important factor in modern harvesters. The objective of this paper was to review research trends related to yield monitoring sensors for grain crops. Methods: The literature was reviewed for research on the major sensing components of grain yield monitoring systems. These major components included grain flow sensors, moisture content sensors, and cutting width sensors. Sensors were classified by sensing principle and type, and their performance was also reviewed. Results: The main targeted harvesting grain crops were rice, wheat, corn, barley, and grain sorghum. Grain flow sensors were classified into mass flow and volume flow methods. Mass flow sensors were mounted primarily at the clean grain elevator head or under the grain tank, and volume flow sensors were mounted at the head or in the middle of the elevator. Mass flow methods used weighing, force impact, and radiometric approaches, some of which resulted in measurement error levels lower than 5% ($R^2=0.99$). Volume flow methods included paddle wheel type and optical type, and in the best cases produced error levels lower than 3%. Grain moisture content sensing was in many cases achieved using capacitive modules. In some cases, errors were lower than 1%. Cutting width was measured by ultrasonic distance sensors mounted at both sides of the header dividers, and the errors were in some cases lower than 5%. Conclusions: The design and fabrication of an integrated yield monitoring system for a target crop would be affected by the selection of a sensing approach, as well as the layout and mounting of the sensors. For accurate estimation of yield, signal processing and correction measures should be also implemented.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• Nuclear Engineering and Technology
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• 제50권8호
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• pp.1364-1371
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• 2018

An extensive investigation of photon interaction properties has been made for $Zn_xTe_{100-x}$ alloys (where x = 5, 20, 30, 40, 50) to explore its possible use in sensing and shielding gamma radiations. The results show better and stable response of ZnTe alloys for various photon interaction properties over the wide energy range, with an additional benefit of ease in fabrication due to lower melting points of Zn and Te. Mass attenuation coefficient values show strong dependence on photon energy as well as composition. Effective atomic number has maximum value for $Zn_5Te_{95}$ and lowest for $Zn_{50}Te_{50}$ in the entire energy region. The alloy sample with maximum $Z_{eff}$ shows minimal value of $N_e$ and vice versa. Mean free path follows inverse trend as observed for mass attenuation coefficient. The exposure and energy absorption buildup factors depend upon photon energy, penetration thickness and composition (effective atomic number) of $Zn_xTe_{100-x}$ alloys. It finds its application for sensing and shielding from highly energetic and highly penetrating photons at sites where radioactive materials were used and visibility of material is not a big constraint. Further, energy down conversion property of ZnTe alloys with subsequent emission in green band suggests its potential use in sensing gamma photons.