• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.338-338
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• 2013

Monolithic three-dimensional integrated circuits (3D-ICs) 구현 시 bonding 과정에서 발생되는 aluminum (Al) 이나 copper (Cu) 등의 interconnect metal의 확산, 열적 스트레스, 결함의 발생, 도펀트 재분포와 같은 문제들을 피하기 위해서는 저온 공정이 필수적이다. 지금까지는 polymer 기반의 bonding이나 Cu/Cu와 같은 metal 기반의 bonding 등과 같은 저온 bonding 방법이 연구되어 왔다. 그러나 이와 같은 bonding 공정들은 공정 시 void와 같은 문제가 발생하거나 공정을 위한 특수한 장비가 필수적이다. 반면, 두 물질의 합금을 이용해 녹는점을 낮추는 eutectic bonding 공정은 저온에서 공정이 가능할 뿐만 아니라 void의 발생 없이 강한 bonding 강도를 얻을 수 있다. Aluminum-germanium (Al-Ge) 및 aluminum-indium (Al-In) 등의 조합이 eutectic bonding에 이용되어 각각 $424^{\circ}C$ 및 $454^{\circ}C$의 저온 공정을 성취하였으나 여전히 $400^{\circ}C$이상의 eutectic 온도로 인해 3D-ICs의 구현 시에는 적용이 불가능하다. 이러한 metal 조합들에 비해 indium (In)과 tin (Sn)은 각각 $156^{\circ}C$ 및 $232^{\circ}C$로 굉장히 낮은 녹는점을 가지고 있기 때문에 In-Sn 조합은 약 $120^{\circ}C$ 정도의 상당히 낮은eutectic 온도를 갖는다. 따라서 본 연구팀은 In-Sn 조합을 이용하여 $200^{\circ}C$ 이하에서monolithic 3D-IC 구현 시 사용될 eutectic bonding 공정을 개발하였다. 100 nm SiO2가 증착된 Si wafer 위에 50 nm Ti 및 410 nm In을 증착하고, 다른Si wafer 위에 50 nm Ti 및 500 nm Sn을 증착하였다. Ti는 adhesion 향상 및 diffusion barrier 역할을 위해 증착되었다. In과 Sn의 두께는 binary phase diagram을 통해 In-Sn의 eutectic 온도인 $120^{\circ}C$ 지점의 조성 비율인 48 at% Sn과 52 at% In에 해당되는 410 nm (In) 그리고 500 nm (Sn)로 결정되었다. Bonding은 Tbon-100 장비를 이용하여 $140^{\circ}C$, $170^{\circ}C$ 그리고 $200^{\circ}C$에서 2,000 N의 압력으로 진행되었으며 각각의 샘플들은 scanning electron microscope (SEM)을 통해 확인된 후, 접합 강도 테스트를 진행하였다. 추가로 bonding 층의 In 및 Sn 분포를 확인하기 위하여 Si wafer 위에 Ti/In/Sn/Ti를 차례로 증착시킨 뒤 bonding 조건과 같은 온도에서 열처리하고secondary ion mass spectrometry (SIMS) profile 분석을 시행하였다. 결론적으로 본 연구를 통하여 충분히 높은 접합 강도를 갖는 In-Sn eutectic bonding 공정을 $140^{\circ}C$의 낮은 공정온도에서 성공적으로 개발하였다.

• Journal of Dairy Science and Biotechnology
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• v.25 no.1
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• pp.55-60
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• 2007

Contents of scorched particles in infant formula were studied to provide a scientific evidence for standardization of Food Regulation in Korea. The specification of scorched particles in infant formula in Korea was satisfied with CODEX, USDA and so on. But food regulations for scorched particles in baby food are not mentioned in Korea. Nowadays social interests of scorched particles in infant formula are being increased in the respect of safety for baby food. The composition and contents of scorched particles were analyzed with Scanning Electron Microscope-Energy Dispersive X-ray Spectrometer(SEM-EDS) and Inductively Coupled Plasma Mass Spectrometer(ICP-MS). The results indicate that the scorched particles consist Ca, Na, Fe, Mg and trace elements derived from the ingredient of infant formula. Infant formula are composed of milk, skimmed milk, whey, mixed vegetable oils, minerals and vitamins. These results also show that the contents of scorched particles of infant formula in Korea are little or similar level to those reported in other countries. In general, heavy metals derived from scorched particle are originally used as a source of minerals in infant formula. And it has been thought that they doesn't effect on Provisional Tolerable Weekly Intake set by FAO/WHO for contents and composition of scorched particles.

• The Journal of Korean Academy of Prosthodontics
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• v.45 no.4
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• pp.546-554
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• 2007

Statement of problem: Die materials require abrasion resistance, dimensional stability with time, and high surface wettability for adequate material properties. Wear of gypsum materials is a significant problem in the fabrication of accurately fitting cast prosthetic devices. So It has been recommended that the use of die hardener before carving or burnishing of the wax pattern. Purpose: The purpose of this study was to compare the abrasion resistance and surface microhardness(Knoop) with 3 commonly used gypsum die materials(MG Crystal Rock, Super plumstone, GC $FUJIROCK^{(R)}$ EP) with and without the application of 2 die hardeners. Material and methods: Three die materials were evaluated for abrasion resistance and surface microhardness after application of 2 die hardeners(Die hardener and Stone die & plaster hardener). Thirty specimens of each gypsum material were fabricated using an impression of resin die(Pattern resin; GC Corporation, Japan) with 1-mm high ridges, sloped 90 degrees. Gypsum materials were mixed according to manufacturer's recommendations and allowed to set 24 hours before coating. Specimens were arbitrary assigned to 1 of 3 treatment subgroups (n=10/subgroup): no treatment(control), coated with Die hardener, and coated with Stone die & plaster hardener. Abrasion resistance(measured by weight loss) was evaluated using device in 50g mass perpendicular to the ridges. Knoop hardness was determined by loading each specimen face 5 times for 15 seconds with a force of 50g. A scanning electron microscope was used to evaluate the surface of specimens in each treatment subgroup. Conclusions: The obtained results were as follows: 1. 3 types of die stone evaluated in this study did not show significant differences in surface hardness and abrasive resistance(P<.05). 2. In the abrasive resistance test, there were no significant differences between GC $FUJIROCK^{(R)}$ EP and MG Crystal Rock with or without 2 die hardener(P<.05). 3. Super plumstone treated with Stone die & plaster hardener showed increased wear loss(P<.05) 4. Die hardener coatings used in this study decreased the surface hardness of the gypsum material(P<.05).

• The Journal of Advanced Prosthodontics
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• v.1 no.3
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• pp.113-117
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• 2009

STATEMENT OF PROBLEM. Recently Yttrium-stabilized tetragonal zirconia polycrystal (Y-TZP) has been introduced due to superior flexural strength and fracture toughness compared to other dental ceramic systems. Although zirconia has outstanding mechanical properties, the phenomenon of decrease in the life-time of zirconia resulted from degradation in flexural strength after low temperature aging has been reported. PURPOSE. The objective of this study was to investigate degradation of flexural strength of Y-TZP ceramics after various low temperature aging treatments and to evaluate the phase stability and micro-structural change after aging by using X-ray diffraction analysis and a scanning electron microscope (SEM). MATERIAL AND METHODS. Y-TZP blocks of Vita In-Ceram YZ (Vita Zahnfabrik, Bad $S\ddot{a}ckingen$, Germany) were prepared in 40 mm (length) $\times$ 4 mm (width) $\times$ 3 mm (height) samples. Specimens were artificially aged in distilled water by heat-treatment at a temperature of 75, 100, 125, 150, 175, 200, and $225^{\circ}C$ for 10 hours, in order to induce the phase transformation at the surface. To measure the mechanical property, the specimens were subjected to a four-point bending test using a universal testing machine (Instron model 3365; Instron, Canton, Mass, USA). In addition, X-ray diffraction analysis (DMAX 2500; Rigaku, Tokyo, Japan) and SEM (Hitachi s4700; Jeol Ltd, Tokyo, Japan) were performed to estimate the phase transformation. The statistical analysis was done using SAS 9.1.3 (SAS institute, USA). The flexural strength data of the experimental groups were analyzed by one-way analysis of variance and to detect statistically significant differences ($\alpha$= .05). RESULTS. The mean flexural strength of sintered Vita In-Ceram YZ without autoclaving was 798 MPa. When applied aging temperature at below $125^{\circ}C$ for 10 hours, the flexural strength of Vita In-Ceram YZ increased up to 1,161 MPa. However, at above $150^{\circ}C$, the flexural strength started to decrease. Although low temperature aging caused the tetragonal-to-monoclinic phase transformation related to temperature, the minimum flexural strength was above 700 MPa. CONCLUSION. The monoclinic phase started to appear after aging treatment above $100^{\circ}C$. With the higher aging temperature, the fraction of monoclinic phase increased. The ratio of monoclinic/tetragonal + monoclinic phase reached a plateau value, circa 75% above $175^{\circ}C$. The point of monoclinic concentration at which the flexural strength begins to decrease was between 12% and 54%.

• Korean Journal of Plant Resources
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• v.10 no.2
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• pp.122-127
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• 1997

This study was conducted to establish mass propagation system from the tissue culture using immature embroys in Eleutherococus senticosus. Immature embroys from seeds were removed under the microscope and placed on modified SH and WPM medium containing several plant growth regulators. The calli were well formed on media containing 1mg/l of 2,4-D on modified SH medium and 1mg/l of 2,4-D and 3mg/l of TDZ on WPM medium. Shoot regeneration was better on modified SH or WPM medium with combination of high concentration of TDZ and low concentration of 2,4-D. Treatment of 2,4-D alone was better than treatment of TDZ alone in callus induction on modified SH medium but plant regeneration reversed. Treatment of 2.4-D and TDZ combination was better than treatment of 2,4-D alone in callus induction on WPM medium. The results of callus formation and shoot regeneration on WPM media differed to those of SH media. The rate of callus formation was nearly 83% when 2,4-D was added to SH medium on concentration of 1mg/l. The rate of callus formation was nearly 38% when combination treatment of 2,4-D 1mg/l and TDZ 3mg/l was added to WPM medium. Also, plant regeneration differed depending on the mature degree of immature embryo.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.361-368
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• 2004

We separated the multilayer structure of CD-R(compact disk-recordable) and investigated optimal spot marking conditions and physical and chemical transitions in response to various laser beam energh levels. Spot marking(80 ${\mu}{\textrm}{m}$ spot size) was produced on the surface of each layer using a Q-switched Nd:YAG laser between 27 mJ and 373mJ. By investigating resulting pit formation with Optical Microscopy(OM) and Optical Coherence Tomography(OCT), we analyzed the formation process of spot marking in the multilayer structure of different chemical composition. The localized heating of the substrate in the multilayer thin film caused the short temporal thermal expansion, and absorbed optical energy between reflective and dye interfaces melted dye and increased the volume. During the cooling phase, formation of pit and surrounding rim can be explained by three distinct processes; effect of surface tension, evaporation by spontaneous temperature increase due to laser energy, and mass flow from the recoil pressure. Our results shows that the spot marking formation process in the multilayer thin film is closely related to the layers' physical, chemical, and optical properties, such as surface tension, melt viscosity, layer thickness, and chemical composition.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.27 no.6
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• pp.282-288
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• 2017

In this paper, GaAs/AlGaAs multi-layer structure was grown by liquid phase epitaxy with graphite sliding boat, which can be used as a device structure of a photocathode image sensor. The multi-layer structure was grown on an n-type GaAs substrate in the sequence as follows: GaAs buffer layer, Zn-doped p-type AlGaAs layer as etching stop layer, Zn-doped p-type GaAs layer, and Zn-doped p-type AlGaAs layer. The Characteristics of GaAs/AlGaAs structures were analyzed by using scanning electron microscope (SEM), secondary ion mass spectrometer (SIMS) and hall measurement. The SEM images shows that the p-AlGaAs/p-GaAs/p-AlGaAs multi-layer structure was grown with a mirror-like surface on a whole ($1.25mm{\times}25mm$) substrate. The Al composition in the AlGaAs layer was approximately 80 %. Also, it was confirmed that the free carrier concentration in the p-GaAs layer can be adjusted to the range of $8{\times}10^{18}/cm^2$ by hall measurement. In the result, it is expected that the p-AlGaAs/p-GaAs/p-AlGaAs multi-layer structure grown by the LPE can be used as a device structure of a photoelectric cathode image sensor.

• Membrane Journal
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• v.30 no.5
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• pp.319-325
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• 2020

In this study, we developed mixed matrix membranes by blending thermoplastic elastomer, i.e. polystyreneblock-polybutadiene-block-polystyrene (SBS) block copolymer with the synthesized UiO-66 particles for CO₂/N₂ gas separation. To investigate the effect of UiO-66 particles in the SBS matrix, we prepared different mixed matrix membranes (MMMs) by varying the mass ratio of SBS and UiO-66 in the blend. To fabricate well-dispersed UiO-66, the SBS/UiO-66 mixture was sonicated and stirred thoroughly. The physico-chemical properties of prepared membranes were characterized by Fourier transform infrared spectroscopy (FT-IR) and scanning electron microscope (SEM). The gas separation performance was measured by time-lag method. The permeability of the MMMs increased significantly as the content of UiO-66 increased, but the CO₂/N₂ selectivity did not decrease significantly. The membranes containing 20% of UiO-66 particles showed the best performance with the CO₂ permeability and CO₂/N₂ selectivity of 663.8 barrer and 13.3, respectively. This result showed performance closer to upper bound than pure SBS membrane in the Robeson plot, as the added UiO-66 particles did not significantly sacrifice selectivity and more than doubled gas permeability.

• Korean Journal of Medicinal Crop Science
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• v.5 no.1
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• pp.49-55
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• 1997

This study was conducted to establish mass propagation system from the tissue culture using immature embryos in Eleutherococcus senticosus. Immature embryos from seeds were removed under the microscope and placed on MS, $MSB_5\;and\;B_5$ medium containing several plant growth regulators. While the calli were well formed on media containing 2 mg/l of 2, 4-D, 2 mg/l of 2, 4-D and 0.7 mg/l of TDZ, shoot regeneration was better on MS medium with combinations of high concentrations of TDZ and low concentrations of 2, 4-D. Treatment of 2, 4-D alone was better than treatment of TDZ alone in callus induction, but plant regeneration was reversed. The results of callus formation and shoot regeneration on $MSB_5\;and\;B_5$ media were similar to those of MS media. The rate of callus formation was nearly 100% when 2, 4-D was added to $B_5$, medium on concentration of 2 mg/l or 0.7 mg/l. TDZ showed very significant effect on the formation of multiple shoots.

• Journal of Conservation Science
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• v.34 no.5
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• pp.433-442
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• 2018

In this study, metal properties were compared by preparingthree iron knives from steel ingots produced via traditional iron-making, and ingot which jointed the steel of modern times. Metal microscope and SEM-EDS analysis revealed fine ferrite and pearlite structures of the hypo-eutectoid steel of Fe-C alloys. All samples also exhibited martensite on the blade of the knife. By Vicker's hardness analysis, the hardness of the sand iron knife (K1) was 533.38 HV, sand iron-nickel steel knife (K3) was 514.8 HV, and sand iron-carbon steel knife (K2) was 477.02 HV. The mass reduction due to wear was 0.058% for K1, 0.059% for K3, and 0.144% for K2. EPMA(Electron probe micro-analyzer) analysis of the surface pattern of the specimens confirmed that the patterns were exposed due to differences in the content of C or the chemical composition. Additional research on heat treatment processes is needed to increase the abrasion resistance of blades. Traditional steel ingots could produce high-quality steel if combined with nickel steel.