• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.698-701
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• 2005

We have investigated experimentally a nano patterning using electron beam lithography for the nickel stamper fabrication. Recently, DVD and Blu-ray disk(BD) have nano-scale patterns in order to increase the storage density. Specially, BD has 100nm-scale patterns which are generally fabricated by electron beam lithography. In this paper, we found optimum condition of electron-beam lithography for 100nm-scale patterning. We controlled various conditions of EHP(acceleration voltage), beam current, dose and aperture size in order to obtain optimum conditions. We used 100nm-thick PMMA layer on a silicon wafer as photoresist. We found that EHP was the most dominant factor in electron-beam lithography.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.1
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• pp.3-9
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• 2009

Recently, a high speed cutting is essential requirement to satisfy latest demand of high precision product and machining of hard materials. However heat generation by high speed rotation causes many problems. The machining error and shortening spindle lifetime by thermal stress is typical example. Generation of heat is mostly caused by sliding at the rotor and bearing. For minimization of heat generation at bearing, decision of the condition of proper lubrication is necessary. The thermal study about 40,000rpm spindle by changing the condition of oil-air lubrication method is carried out in this paper. The results of this paper can be used effectively in the decision of oil-air lubrication condition of other types of spindle for machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.8
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• pp.39-46
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• 2003

Productivity and machining performance can be improved by cutting analysis including cutting force prediction, surface error prediction and machining stability evaluation. In order to perform cutting analysis, cutting force coefficients database have to be constructed. Since cutting force coefficients are dependent on cutting condition in the existing research, a large number of calibration tests are needed to obtain cutting force coefficients, which makes it difficult to build the cutting force coefficients database. This paper proposes a generalized method for constructing the cutting force coefficients database us ins cutting-condition-independent coefficients. The tool geometry and workpiece material were considered as important components for database construction. Cutting force coefficients were calculated and analyzed for various helix and rake angles as well as for several workpiece. Furthermore, the variation of cutting force coefficients according to tool wear was analyzed. Tool wear was found to affect tool geometry, which results in the change of cutting force coefficients.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.1
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• pp.78-83
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• 1996

This paper presents the characteristics of surface roughness and cutting force in ultraprecision cutting of aluminium alloy using natural diamond tools whose edge radii are smaller than those of tools made of other materials. The feed rate and depth of engagement were set to be a micrometer order. After measuring the surface roughness of machined surface and cutting force for each cutting condition, the relations between the surface quality and its condition were investigated qualitatively. If the feed rate was under a certain limit, the machined surface quality was deteriorated unexpectedly. This is supposed to have happened due to vibration leading its condition to abnormal one. In a certain situation the machined surface roughness by a natural diamond tool was inferior to that made by a carbide tool whose cutting edge radius is larger. This is supposed to be caused by not normal machining but burnishing effect.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.4 no.3
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• pp.12-24
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• 1995

Various surface grinding experiments using resin bonded diamond abrasive wheels are carried out for tungsten carbide materials in order to minimize the damage on the ground surface and to purse the precise dimension compared to conventional grinding machine. When grinding quality is constant, theoretical grinding effect is changed according to the speed of workpiece. Accordingly, grinding forces, which are Fn, Ft, were analyzed for the machining processes of tungsten-carbide material to obtain optimum grinding conditions. Brief investigation is carried out to decrease the dressing efficiency of resinoid bonded diamond grinding wheel to grind tungsten-carbide. Truing is also carried out to provide a desired shape on a wheel or to correct a dulled profile. High quality in dimensional accuracy and surface are often required as a structural components, therefore 3-points bending test is carried out to check machining damage on the ground surface layer, which in one of sintered brittle material. From this experimental study, some useful machining data and information to determine proper machining condition for grinding of tungsten-carbide materials are obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.42-46
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• 1993

This paper presents development of a pratical tool deflection compensation system in order to reduce the machining error by the tool deflection in the end-milling process. The system is a tool adapter which includes 2-axis force sensor for detecting tool deflection and 2-axis tool tilting device for adjusting tool position through computer interface in on-line process. In experiments, it is revealed that the force sensor applying parallel plate principle and strain gauge is proper to obtain dynamic process signal, and the tilting device using stepping motor and cam drive mechanism is suitable to have necessary action. By the system and control algorithm, it is possible to get precise machining surface profile without excessive machining error and overcut generated due to increased cutting force in more productive machining condition.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.1
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• pp.69-74
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• 2003

The purpose of the present paper is to investigate about the machining of profile (core/cavity) of mold die using the commercial CAM system. Recently the requirement of the light weight and high performance of automobiles has Increased. The weight of the automobile is very important in the viewpoint of the fuel and traveling performance. The optimal design technique, material technique, the process design for parts and specially, die machining technique need to be developed for increasing productivity and reducing production time of the automobile parts. In this study, the effect of machining condition on precision of die profile is investigated by experimental observation and analysis. The results will be reflected for development of the precision die of the automobile.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.7
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• pp.94-100
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• 1999

This study adopted the ultra precision machining system which was composed of an air bearing spindle, a granite bed, air pad and a linear feeding mechanism. It also applied the cutting experiment on the aluminum alloy. To evaluate the safety of high speed machining, we examined the surface roughness according to the changes of cutting speed and obtained the speed limit. This paper also studied the effect of cutting condition such as feed rates and depths of cut on the surface roughness within the speed limit. This provided practical information regarding ultra precision machining.

• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1500-1502
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• 1998

Electro Discharge Machining (EDM) is a so-call nonconventional machining technique. This paper presents the experimental results of an EDM technique for the fabircation of microholes on #7440 pyrex glass substrates. With various applied voltages and various concentration of NaOH or KOH solution, the glass substrates have been microdrilled using the copper electrodes of which diameters are 250 ${\mu}m$ to 450 ${\mu}m$. The machined throughholes have been observed the top diameter, the bottom diameter and machining time have been measured. EDM in NaOH solution causes the fabrication to have better the surface condition, higher selective of electrode, lower concentration of solution with respect to EDM in KOH solution machined fabrication.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.6
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• pp.1483-1495
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• 1994

A quantitative analysis of a surface roughness for a precision machining of a sculptured surface in milling process is treated under superposition theory in this paper. The geometrical surface rouhgness is calculated as a function of feed per tooth, path interval, radii of tool and cutting edge, and radii of curvatures of workiece. Through machining experiments in a 3-axis machining center, we confirmed the adequacy of the adequacy of the analysis. While cutter mark is neglegible in ball endmilling, it is significant in flat endmilling. When feed per tooth is very small, flat endmilling gives superior finish to ball endmilling. In flat endmilling, cutting condition and cutter path should be strategically chosen to balance the cutter mark height and cusp height.