• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.90-95
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• 2007

Single side final polishing is a very important role to stabilize a wafer finally before the device process on the wafer is executed. In this study, the machining variables, such as pressure, machining time, and the velocity of pad table were adopted. These parameters have the major influence on the characteristics of wafer polishing. We investigated the surface roughness changing these variables to find the optimal polishing condition. Pad, slurry, slurry quantity, and oscillation distance were set to the fixed variables. In order to reduce defects and find a stable machining condition, a hall sensor was used on the polishing process. AE sensor was attached to the polishing machine to verify optimal condition. Applying data analysis of the sensor signal, experiments were performed. We can get better surface roughness from loading the quasi static force and improving wafer-holding method.

• Journal of the Korean Ceramic Society
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• v.48 no.2
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• pp.152-159
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• 2011

The green and hard machining characteristics of dental ceramics are of great interest to dental industry. The green bodies of TZP/$Al_2O_3$ composites were prepared by the cold isostatic pressing, and machined on the CNC lathe using PCD (polycrystalline diamond) insert under various machining conditions. With increasing nose radius of PCD insert, surface roughness initially increased due to increased cutting resistance, but decreased by the onset of sliding fracture. The lowest surface roughness was obtained at spindle speed of 1,300 rpm and lowest feed rate. Hard bodies were prepared by pressureless sintering the machined green bodies at several temperatures. The grinding test for sintered hard body was conducted using electroplated diamond bur with different grit sizes. During grinding, grain pull out in the composite was occurred due to thermal expansion mismatch between the alumina and zirconia. The strength of the composite decreased with alumina contents, due to increased surface roughness and high monoclinic phase transformed during grinding process. The final polished samples represented high strength by the elimination of a phase transformation layer.

• Journal of Mechanical Science and Technology
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• v.20 no.2
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• pp.227-233
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• 2006

Engineering ceramics have many unique characteristics both in mechanical and physical properties such as high temperature hardness, high thermal, chemical and electrical resistance. However, its machinability is very poor in conventional machining due to its high hardness and severe tool wear. In the current experimental study, alumina $(Al_2O_3)$ was ultrasonically machined using SiC abrasives under various machining conditions to investigate the material removal rate and surface quality of the machined samples. Under the applied amplitude of 0.02mm, 27kHz frequency, three slurry ratios of 1:1, 1:3 and 1:5 with different tool shapes and applied static pressure levels, the machining was conducted. Using the mesh number of 240 abrasive, slurry ratio of 1:1 and static pressure of $2.5kg/cm^2$, maximum material removal rate of $18.97mm^3/min$ was achieved. With mesh number of 600 SiC abrasives and static pressure of $3.0kg/cm^2$, best surface roughness of $0.76{\mu}m$ Ra was obtained.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.6
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• pp.1-6
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• 2018

Recently nano meter size pattern (sub-micro scale) can be machined mechanically using a diamond tool. Many studies have found a 'size effect' which referred to a specific cutting energy increase with the decrease in the uncut chip thickness at micro scale machining. A new analysis method was suggested in order to observe 'size effect' in nano scale machining and to verify the cause of the 'size effect' in this study. The diamond tool was indented to a vertical depth of 1,000nm depth in order to simplify the stress state and the normal force was measured continuously. The tip rounding was measured quantitatively by AFM. Based on the measurements and theoretical analysis, it was verified that the main cause of the 'size effect' in nano scale machining is geometrically necessary dislocations, one of the intrinsic material characteristics. st before tool failure.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.5
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• pp.17-22
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• 2019

In this study, Cermet Reamers for planet carrier was manufactured and the machining characteristics were analyzed through processing experiment. Cermet reamer with ∅14, ∅15, ∅18, and ∅21mm was used and machining characteristics were compared and analyzed by observing tool wear, machining hole dimensions and surface roughness. In the flank wear of the tool, the result is less than 0.2mm, which is the target value for each tool size. The experimental results of the machining hole dimensions show the results of the process control range of 3/100 or less according to the size of the tool. Also, the surface roughness measurement result showed a value of less than $0.5{\mu}m$ in the process control range for each tool size. As a result of observing the experimental results of each ∅, the results satisfied the process standard in both the tool wear, the machining hole dimension and the surface roughness.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.6
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• pp.81-88
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• 2022

Titanium alloy (Ti-6Al-4V) has excellent mechanical properties and high specific strength; therefore, it is widely used in aerospace, automobile, defense, engine parts, and bio fields. Particularly in the aerospace field, as it has a low specific gravity and rigidity, it is used for the purpose of increasing energy efficiency through weight reduction of parts, and most have a thin-walled structure. However, it is extremely difficult to machine thin-walled shapes owing to vibration and deformation. In the case of thin-walled structures, the cutting forces and vibrations rapidly increase depending on the cutting conditions, significantly affecting the surface integrity and tool life. In this study, machining experiments on thin-wall milling of a titanium alloy (Ti-6Al-4V) were conducted for each experimental condition with different axial depths of cut, radial depth of cut, and machining sequence. The machining characteristics were analyzed, and an effective machining method was derived by a comprehensive analysis of the machined surface conditions and cutting signals.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.106-111
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• 1993

This experimental study mainly deal with the single and multi-insert cutting characteristics using coated tool. Because metal cutting of the single and multi-insert has a large relation to the improvement of productivity, the economic cutting process can be achieved by the analysis of proper metal cutting mechanism. Therefore, machining characteristics of face milling in this paper has been studied by investigating the role of different insert number which is concerned with mean cutting force, the RMS values of AE(acoustic emission) signal, tool life and surface roughness in milling SS 41 and SUS 304.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.416-423
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• 2004

This paper presents the thermal characteristic analysis of a high-speed horizontal machining center with spindle speed of 50,000rpm and feedrate of 120m/fin. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motors and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guides. The thermal characteristics such as the temperature distribution, temperature rise, thermal deformation and step response, are estimated based on the finite element model of machining center and the heat generation rates of heat sources related to the machine operation conditions. Especially, the thermal time constant assessed from the step response function is introduced as an index of thermal response characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.960-963
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• 2001

An internal finishing process by the application of magnetic abrasive machining has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, another method of magnetic abrasive machining in which the N and S magnetic poles are vibrated and a workpiece is rotated only is tried in a non-ferromagnetic pipe(SUS304), and its finishing characteristics is experimental results, it is found that the vibration effects of magnetic poles on the finishing characteristics are large in internal finishing.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.30-37
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• 2004

This paper presents the thermal characteristic analysis of a high-speed horizontal machining center with spindle speed of 50,000rpm and feedrate of 120m／min. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motors and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guides. The thermal characteristics such as the temperature distribution, temperature rise, thermal deformation and step response, are estimated based on the finite element model of machining center and the heat generation rates of heat sources related to the machine operation conditions. Especially, the thermal time constant assessed from the step response function is introduced as an index of thermal response characteristics.