• Title/Summary/Keyword: lubrication layer

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In-situ Characterization of Electrochemical and Frictional Behaviors During Copper CMP

  • Eom, Dae-Hong;Kang, Young-Jae;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.227-230
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    • 2004
  • As the organic acids were added in the slurry, zeta potential of alumina was changed to negative value and IEP value was shifted from alkaline to acidic pH. In citric acid based slurry, Cu surface continuously dissolved and etching depth linearly increased. On the contrary, passivation layer was grown on Cu surface in oxalic acid based slurry. As the platen rotation speed increased, Preston coefficient decreased in both slurries. With oxalic acid based slurry, at low velocity, removal rate is high value because of high friction force compared to citric acid based slurry. As platen velocity increased, removal of Cu in citric acid based slurry became higher value than oxalic acid based slurry. Typical lubrication behaviors were observed in both slurries. As Sommerfeld number increased, COF values gradually decreased and then re-increased. It indicated that lubrication was changed to direct contact or semi-direct contact mode to hydro-lubrication mode.

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Design optimization for analysis of surface integrity and chip morphology in hard turning

  • Dash, Lalatendu;Padhan, Smita;Das, Sudhansu Ranjan
    • Structural Engineering and Mechanics
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    • v.76 no.5
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    • pp.561-578
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    • 2020
  • The present work addresses the surface integrity and chip morphology in finish hard turning of AISI D3 steel under nanofluid assisted minimum quantity lubrication (NFMQL) condition. The surface integrity aspects include microhardness, residual stress, white layer formation, machined surface morphology, and surface roughness. This experimental investigation aims to explore the feasibility of low-cost multilayer (TiCN/Al2O3/TiN) coated carbide tool in hard machining applications and to assess the propitious role of minimum quantity lubrication using graphene nanoparticles enriched eco-friendly radiator coolant based nano-cutting fluid for machinability improvement of hardened steel. Combined approach of central composite design (CCD) - analysis of variance (ANOVA), desirability function analysis, and response surface methodology (RSM) have been subsequently employed for experimental investigation, predictive modelling and optimization of surface roughness. With a motivational philosophy of "Go Green-Think Green-Act Green", the work also deals with economic analysis, and sustainability assessment under environmental-friendly NFMQL condition. Results showed that machining with nanofluid-MQL provided an effective cooling-lubrication strategy, safer and cleaner production, environmental friendliness and assisted to improve sustainability.

Friction transition diagram considering the effects of oxide layer formed on contact parts of TiN coated steel ball

  • Cho, C.W.;Lim, J.S.;Lee, Y.Z.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.179-180
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    • 2002
  • In this study. the friction transition diagram based on the effect of oxide layer formation on contact surface between TiN coated steel ball and uncoated steel disk was constructed. From the diagram. it can be seen that as the contact load increases. the contact number of cycle at the beginning of oxide layer formation decreases linearly and as the coating thickness increases and the surface roughness of steel disk increases under same contact load. that increases. For the coated ball specimen, a AISI 52100 steel ball was used and AISI 1045 steel was used for the disk counter part.

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미끄럼운동 시 TiN코팅에 형성되는 산화막이 마찰 및 마멸 특성에 미치는 영향

  • Jo, Jeong-U;Im, Jeong-Sun;U, Sang-Gyu;Lee, Yeong-Je
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.05a
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    • pp.310-316
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    • 2002
  • In this study, the effects of oxide layer formed on the wear tracks of TiN coated silicon wafer on friction and wear characteristics were investigated. Silicon wafer was used for the substrate of coated disk specimens, which were prepared by depositing TiN coating with $1{\mu}m$ in coating thickness. AISI 52100 steel ball was used for the counterpart. The tests were performed both in air for forming oxide layer on the wear track and in nitrogen to avoid oxidation. This paper reports characterization of the oxide layer effects on friction and wear characteristics using X-ray diffraction (XRD). Auger electron spectroscopy (AES), scanning electron microscopy (SEM) and sliding tests.

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미끄럼시험시 TiN 코팅볼과 스틸디스크에 형성되는 산화막의 특성과 마찰특성에 미치는 영향

  • 조정우;박동신;임정순;이영제
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.06a
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    • pp.401-405
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    • 2001
  • The effects of oxide layer formed on TiN coated ball and counter-body have been investigated from the frictional point of view during sliding tests. AISI52100 steel ball was used for the substrate of coated specimens. Two types of coated specimens were prepared by depositing TiN coating with 1 and 4$\mu\textrm{m}$ in coating thickness. AISI1045 steel was used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation.

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EFFECT OF SURFACE ROUGHNESS OF MATING SURFACE AND TRANSFER LAYER ON FRICTION BETWEEN a-CNx AND $Si_3N_4$ IN NITROGEN

  • Umehara, N.;Tokoroyama, T.;Tomita, H.;Takenoshita, Y.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.155-156
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    • 2002
  • During the sliding between a-CNx and $Si_3N_4$, applying nitrogen as environmental gas provided very low friction as the level of 0.01 in friction coefficient. In order to know the effect of the running-in process on the reduction of the friction, the effect of surface roughness of mating surface on friction was investigated. It was shown that smooth surface in wear scar of ball provided low friction coefficient. Friction coefficient after running-in was proportional to the Ry value of wear scar of ball. Also smooth thin transferred layer was observed on the wear scar of balls with an AFM after sliding test. Those results showed the smoothing of wear scar of ball, the generating of the transferred layer from CNx was necessary for low friction.

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Relationship between Rolling Motion and Microstructural Change in Rolling Element (구름계의 미소조직 변화와 구름운동의 상호관계)

  • 차금환;김대은
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1996.10a
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    • pp.163-167
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    • 1996
  • The life of rolling elements depends on various factors such as operating conditions and material properties. In this work, the effect of microstructure on the rolling behavior is investigated. Specially, the deformations in the substrate regions before and after rolling are compared. It is found that rolling action causes severe flow of material in the direction opposite to the rolling direction in the case of dry rolling direction. With lubrication, the deformation is more severe at the subsurface region rather than at the surface.

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Synthesis of WS$_2$ Solid Lubricant and Its Application to the Ball Bearing (WS$_2$ 고체윤활제의 합성 및 구름베어링 적용)

  • 신동우;윤대현;최인혁;김경도
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1998.04a
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    • pp.173-179
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    • 1998
  • The processing conditions for the synthesis of platelet WS$_2$ lubricant powder through the solid-gas reaction were optimized. The tungsten and sulfur powders were sealed in a vacuum of 10$^{-6}$ torr, prior to heat-treating at 850$\circ$C for 8 days. The react~on product showed the well-developed platelet WS$_2$ powder with an average size of 3.8 $\mu$m. The synthesized WS$_2$ powder was coated on the commercial deep grooved ball bearing (No. 6203) to examine the effects of WS$_2$ coating layer on the noise and endurance of the ball bearing. The level of noise obtained from WS$_2$ coated-ball bearing was higher (56 dB) than the value occurred in the case of greece (37 dB). The life-time of the ball-bearing assembled after coating WS$_2$ powder increased 50 times compared to the non-coated bali-bearing.

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Thin Film Elastohydrodynamcic Lubrication of Nanometer Scale (나노 미터 크기 유막에서의 탄성유체윤활)

  • 장시열
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1997.10a
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    • pp.173-182
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    • 1997
  • In many practical lubricated contacts such as a rough concentrated contact on the sliding of nominally flat surfaces, the fluid may be of molecular (nanometer) scale owing to the asperity interactions on the surfaces. Under this condition, there is insufficient lubricant on the concentrated contact spot to maintain a realistic continuum. Rheological behavior for this kind of concentrated contact was studied to know whether the application of viscous fluid model is appropriate. The interaction of two rough surfaces is simplified as perfectly flat-rough surfaces contact under certain conditions by "composite topography" and for a nanometer scale fluid film, three kinds of rheological fluid behavior are analyzed in elastohydrodynamic asperity point contact.t contact.

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A Study on the Measurement for the Nano Scale Film Formation of Ultra Low Aspect Ratio

  • Jang Siyoul;Kong Hyunsang
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2004.11a
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    • pp.283-288
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    • 2004
  • The measurement of ultra low aspect ratio fluid film thickness is very crucial technique both for the verification of lubrication media characteristics and for the clearance design in many precision components such as MEMS, precision bearings and other slideways. Many technologies are applied to the measurement of ultra low aspect ratio fluid film thickness (i.e. elastohydrodynamic lubrication film thickness). In particular, in-situ optical interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. This measurement method also does the monitoring of the surface defects and fractures happening during the contact behavior, which are delicately influenced by the surface conditions such as load, velocity, lubricant media as well as surface roughness. Careful selection of incident lights greatly enhances the fringe resolutions up to $\~1.0$ nanometer scale with digital image processing technology. In this work, it is found that coaxial aligning trichromatic incident light filtering system developed by the author can provide much finer resolution of ultra low aspect ratio fluid film thickness than monochromatic or dichromatic incident lights, because it has much more spectrums of color components to be discriminated according the variations of film thickness. For the measured interferometric images of ultra low aspect ratio fluid film thickness it is shown how the film thickness is finely digitalized and measured in nanometer scale with digital image processing technology and space layer method. The developed measurement system can make it possible to visualize the contact deformations and possible fractures of contacting surface under the repeated loading condition.

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