• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.441-442
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• 2002

Chemical mechanical polishing (CMP) is a manufacturing process that uses controlled wear to planarize dielectric and metallic layers on silicon wafers. CMP experiments revealed that a sub-ambient film pressure developed at the wafer/pad interface. Additionally, dishing occurs in CMP processes when the copper-in-trench lines are removed at a rate higher than the barrier layer. In order to study dishing across a stationary wafer during polishing, dishing maps were created. Since dishing is a function of the total contact pressure resulting from the applied load and the fluid pressure, the hydrodynamic pressure model was refined and used in an existing model to study copper dishing. Density maps, highlighting varying levels of dishing across the wafer face at different radial positions, were developed. This work will present the results.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.304-309
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• 2002

Fretting wear test in room temperature water was performed to evaluate the wear coefficient of Inconel 600,690 (Pressurized Water Reactor, PWR) and Alloy 800 (CANadian DeuteriumUranium, CANDU) steam generator (SG) tubes against ferritic and martensitic stainless steels. The main focus is to compare the wear behaviors between Alloy 800 and Inconel alloys. Test conditions are $10{\sim}30N$ of normal load, $200{\sim}450{\mu}m$ of sliding amplitude and 30Hz of frequency. The result indicated that the wear rate of Alloy 800 was higher than those of Inconel 690 at various test condition such as normal loads, sliding amplitudes etc. From the results of SEM observation, there was little evidence of plastic deformation layer that were dominantly formed on the worn surfaces of Inconel 690. Also, wear particles in Alloy 800 were released from contacting asperities deformed by severe plastic flow during fretting wear. Main cause of wear rate between Alloy 800 and Inconel 690 may be due to the difference of hardness between martensitic and ferritic stainless steel. The wear rate and wear mechanism of two tubes in room temperature water are discussed.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.226-234
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• 2002

A systematic study of the role of transfer films on friction properties was performed with various temperatures in the brake system. An NAO friction material specimens containing 9 ingredients were tested using a pad-on-disk type friction tester A new method of measuring the transfer film thickness was developed by considering the electrical resistance of the transfer film using a 4-point probe technique. The properties of transfer film such as surface morphology and film distribution vaied according to the relative amount of graphite and magnesium oxide. By using SEM, it was possible to obtain information about the chemical composition of the transfer film. Results showed that there detected a threshold value of the relative amount of a two active materials to maintain a certiain thickness of a transfer film. Results also showed that formation of friction layer generated on the friction surface was strongly affected by chemical action of two ingredients during sliding due to chemical reaction of solid lubricants at different interface temperature. The results suggested that no apparent relationship between transfer film thickness and the average friction coefficient was founded and friction characteristics were affected more by the property of the solid lubricant and abrasive in the material.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2004년도 학술대회지
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• pp.66-74
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• 2004

The sliding wear behavior of $ZrO_2-22wt\%MgO\;(MZ)\;and\;ZrO_2-8wt\%Y_2O_3\;(YZ)$ deposited on a casting aluminum alloy with bond layer (NiCrCoAlY) by plasma spray against an SiC ball was investigated under dry test conditions at room temperature. At all load conditions, the wear mechanisms of the MZ and the YZ coatings were almost the same. The wear mechanisms involved the forming of a smooth film by material transferred on the sliding surface and pullout. The wear rate of the MZ coating was less than that of the YZ coating. With an increase normal load the wear rate of the studied coatings increased. The SEM was used to examine the sliding surfaces and elucidate likely wear mechanisms. The EDX analysis of the worn surface indicated that material transfer was occurred from the SiC ball to the disk. It was suggested that the material transfer played an important role in the wear performance.

• Journal of Mechanical Science and Technology
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• 제20권3호
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• pp.358-365
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• 2006

The hydraulic pump of an Electro-hydrostatic Actuator should be able to quickly feed large volume of oil into hydraulic cylinder in order to reduce the response time. On the other hand, it should be also able to precisely dispense small amount of oil through low-speed operation so that the steady state position control error of the actuator can be accurately compensated. Within the scope of axial piston type hydraulic pumps, this paper is focused on the investigation how the surface treatment of their cylinder barrel with TiN plasma coating can contribute to the reduction of the friction and wear rate of valve plate in the low-speed range with mixed lubrication. The results showed that the friction torque of the valve plate mated with a TiN coated cylinder barrel could be reduced to 22% of that with an uncoated original one when load pressure was 300 bar and rotational speed 100 rpm. It means that the torque efficiency of the test pump was expected to increase more than 1.3% under the same working condition. At the same time, the wear rate of the valve plate could be reduced to $40\sim50%$.

• 한국표면공학회지
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• 제44권6호
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• pp.269-276
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• 2011

Phase evolution and tribological behavior of Cr-Mo-N multi compositional films with different interlayer were investigated. The films were deposited by hybrid PVD (Physical Vapor Deposition) system consisted of dc unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. A pure molybdenum (Mo) was used as sputtering target and also a pure Cr was used as AIP target to form the Cr-Mo-N films. Various growth planes were found, no textured surface, in all of the multi composition films. Maximum value of microhardness was measured in Cr-Mo-N film with Mo interlayer as 29 GPa. Composition film was mainly showed the aspect of the adhesive wear than CrN film. The friction coefficient was decreased from 0.6 for pure CrN coating to 0.35 for Cr-Mo-N film with Mo interlayer. This result may come from the formation of metal oxide tribo-layer which is known as solid lubricant during the wear test.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제34회 추계학술대회 개최
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• pp.69-77
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• 2001

Wear and Friction characteristics of plasma-sprayed Cr$_2$O$_3$ coating and Cr$_2$O$_3$ coating included SiO$_2$ and TiO$_2$ against SiC ball have been investigated under different loads. Worn surfaces were observed by SEM and worn surfaces were analyzed by EDS. The Friction coefficient and the Wear resistance of Cr$_2$O$_3$-5SiO$_2$-3TiO$_2$coating was less than that of Cr$_2$O$_3$ coating. The main mechanisms were plastic deformation and brittle fracture. The film on surface were made by plastic deformation and compacted wear debris. This film protect wear of coating

• 한국농공학회지
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• 제36권1호
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• pp.141-152
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• 1994

Our experiment investigated the degree of soil contaimination caused by oil leakage. Each soil sample was taken by boring 5, 8m below the test areas, located 5 to 30m from storage tanks at oil stations. According to the results from a series of laboratory tests(both soxhiet extract test and gas chromatograph test), Traces of a light oil were found in all samples except in Dj8, rocky soil and gasoline and petroleum were not detected. We concluded that soil contamination was caused by the corrosion of storage tanks or alternatively by oil overflow caused during the flooding of underground water seeping into the tank during heavy rain fall or the spillage caused by carelessness during lubrication. Old stations without a concrete box enclosing their metal tanks run a greater risk of oil leakage. To research the effect of oil leakage on plant growth and underground water, We examined the results of research conducted overseas. According to these results, when oil leakage occurs, plant growth is repressed and agricultural crops experience low productivity levels. Also, the contamination of underground water can be serious when oil spreads to the aquifer layer. As a result of these problems, to prevent oil leakage and minimize its contaminating effects at oil stations, it is necessary to improve facilities of storage tanks and have the monitoring system of oil leakage.

• 대한기계학회논문집
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• 제13권4호
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• pp.660-669
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• 1989

본 논문에서는 쐐기형 다이를 이용한 판재의 인발에 대한 슬립라인장에서 스트레인을 구하는 방법을 제시하고 이로부터 가공중에 생길 수 있는 역학적 문제의 공학적 해석을 얻고자 한다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.67-71
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• 2000

The wear behaviors of ultrahigh molecular weight polyethylene pins against titanium alloy and stainless steel disks moving in two different kinematic motion were investigated by conducting repeat pass rotational sliding and linear reciprocal sliding wear tests. Linear reciprocal motion wore more the polyethylene pin than did repeat pass rotational motion for both disk materials. It means that the repeated directional change of contact stresses generates more wear debris in polyethylene. For the linear reciprocal sliding tests, titanium alloy disks were damaged with some scratches after one million cycles but no surface damage was observed on the polyethylene pins. On the other hand, for the repeat pass rotational sliding tests, all titanium alloy disks were severely abraded on the entire region of sliding track. This phenomenon can be interpreted by that stress fatigue under repeated sliding contact initiated titanium oxide layer wear particles from disk surface, and these hard particles were embedded into polyethylene pin and then they severely abraded the disk surface. From these results it can be concluded that the kinematic motion in pin-on-disk wear tests play a crucial role on the wear behaviors of UHMWPE pins against titanium alloy and stainless steel disks.