• Title/Summary/Keyword: low velocity

Search Result 2,854, Processing Time 0.027 seconds

Degradation from Polishing Damage in Ferroelectric Characteristics of BLT Capacitor Fabricated by Chemical Mechanical Polishing Process (화학적기계적연마 공정으로 제조한 BLT Capacitor의 Polishing Damage에 의한 강유전 특성 열화)

  • Na, Han-Yong;Park, Ju-Sun;Jung, Pan-Gum;Ko, Pil-Ju;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.06a
    • /
    • pp.236-236
    • /
    • 2008
  • (Bi,La)$Ti_3O_{12}$(BLT) thin film is one of the most attractive materials for ferroelectric random access memory (FRAM) applications due to its some excellent properties such as high fatigue endurance, low processing temperature, and large remanent polarization [1-2]. The authors firstly investigated and reported the damascene process of chemical mechanical polishing (CMP) for BLT thin film capacitor on behalf of plasma etching process for fabrication of FRAM [3]. CMP process could prepare the BLT capacitors with the superior process efficiency to the plasma etching process without the well-known problems such as plasma damages and sloped sidewall, which was enough to apply to the fabrication of FRAM [2]. BLT-CMP characteristics showed the typical oxide-CMP characteristics which were related in both pressure and velocity according to Preston's equation and Hernandez's power law [2-4]. Good surface roughness was also obtained for the densification of multilevel memory structure by CMP process [3]. The well prepared BLT capacitors fabricated by CMP process should have the sufficient ferroelectric properties for FRAM; therefore, in this study the electrical properties of the BLT capacitor fabricated by CMP process were analyzed with the process parameters. Especially, the effects of CMP pressure, which had mainly affected the removal rate of BLT thin films [2], on the electrical properties were investigated. In order to check the influences of the pressure in eMP process on the ferroelectric properties of BLT thin films, the electrical test of the BLT capacitors was performed. The polarization-voltage (P-V) characteristics show a decreased the remanent polarization (Pr) value when CMP process was performed with the high pressure. The shape of the hysteresis loop is close to typical loop of BLT thin films in case of the specimen after CMP process with the pressures of 4.9 kPa; however, the shape of the hysteresis loop is not saturated due to high leakage current caused by structural and/or chemical damages in case of the specimen after CMP process with the pressures of 29.4 kPa. The leakage current density obtained with positive bias is one order lower than that with negative bias in case of 29.4 kPa, which was one or two order higher than in case of 4.9 kPa. The high pressure condition was not suitable for the damascene process of BLT thin films due to the defects in electrical properties although the better efficiency of process. by higher removal rate of BLT thin films was obtained with the high pressure of 29.4 kPa in the previous study [2].

  • PDF

Preparation of Dextran Microparticles by Using the SAS Process (초임계 반용매 재결정 공정을 이용한 Dextran 입자의 제조)

  • Kang, Dong-Yuk;Min, Byoung-Jun;Rho, Seon-Gyun;Kang, Choon-Hyoung
    • Korean Chemical Engineering Research
    • /
    • v.46 no.5
    • /
    • pp.958-964
    • /
    • 2008
  • In this work, micro-sized dextran particles, which have recently been focused as one of the candidate materials for the Drug Delivery System(DDS), were prepared by means of the Supercritical Antisolvent (SAS) process with $CO_2$. With dimethyl sulfoxide(DMSO) as the solvent, effects of the operating variables such as temperature (308.15~323.15 K), pressure(90~130 bar), solute concentration(10~20 mg/ml), and the molecular weight of the solute(Mw=37,500, 450,000) on the size and morphology of the resulting particles were thoroughly observed. The higher solute concentration led to the larger particles, however, the injection velocity of the solution and pressure did not show significant effects on the resulting particle size. With dextran of the lower molecular weight, the smallest particles were obtained at 313.15 K. On the other hand, the size of the particles from the high molecular weight dextran ranged between $0.1{\sim}0.5{\mu}m$ with an incremental effect of the temperature and pressure. For the solute concentration of 5 mg/ml, the lower molecular weight dextran did not form discrete particles while aggregation of the particles appeared when the solute concentration exceeded 15 mg/ml for the higher molecular weight dextran. It is believed that if the solute concentration is too low, the degree of the supersaturation in the recrystallization chamber would not be sufficient for initiation of the nucleation and growth mechanism. Instead, the spinodal decomposition mechanism leads to formation of the island-like phase separation which appears similar to aggregation of the discrete particles. This effect would be more pronounced for the smaller molecular weight polymer system due to the narrower phase-splitting region.

Development of a program to predict the airflow rate and pollutant concentration in complex network-type tunnels (네트워크형 터널의 풍량 및 농도해석 프로그램 개발연구)

  • Kim, Hyo-Gyu;Choi, Pan-Gyu;Ryu, Ji-Oh;Lee, Chang-Woo
    • Journal of Korean Tunnelling and Underground Space Association
    • /
    • v.19 no.2
    • /
    • pp.213-229
    • /
    • 2017
  • Recently, in urban areas there is a tendency to construct more complex network-type tunnels including entrance and exit ramps. At the same time, various one-dimensional programs based on the network theory have been proposed for tunnel ventilation analysis. This paper aims at developing a program that can analyze the ventilation flow rate and pollutants concentration in complex network-type tunnels based on the none hardy-cross method. The flow analysis in the branch was carried out on the basis of the Gradient method, while for the concentration analysis a new logic has been developed to calculate the inflow and outflow concentration automatically in a complex network-type structure. Additionally, in the tunnel segments showing low flow rate, proper grid interval sizes were proposed to reduce numerical error. To verify the applicability of the program, flow rates predicted in the straight tunnels were compared with the classical velocity-diagram method by Stokic and the TVSDM program. The results showed that the errors were within 1%. In addition, the program was applied to the recent ventilation system adopted in the complex network-type urban tunnels.

The Effect of $MnO_2$ Addition on the $V_2O_5/TiO_2$ Catalytic Filters for NO Reduction (NO 환원반응을 위한 $V_2O_5/TiO_2$계 촉매필터의 $MnO_2$ 조촉매 효과)

  • Shin, Hae-Joong;Choi, Jae-Ho;Song, Young-Hwan;Lee, Ju-Young;Jang, Sung-Cheol;Choi, Joo-Hong
    • Proceedings of the SAREK Conference
    • /
    • 2008.11a
    • /
    • pp.363-368
    • /
    • 2008
  • Nitrogen oxides (NO, $NO_2$ and $N_2O$) have been controlled effectively by the SCR catalysts coated on monolith or honeycomb in commercial sites with ammonia as reductant at high temperature range $300{\sim}400^{\circ}C$. However, the catalytic filter has much merit on the point of controlling the particles and nitrogen oxides simultaneously. It will be more advanced-system if the catalytic working temperature is reduced to the normal filtration temperature of under $200^{\circ}C$. This study has focus on the development of the catalytic filter working at the low temperature. So the additive effect of the components such as Pt and Mn (which are known the catalytic component of $V_2O_5/TiO_2$ was investigated. The $V_2O_5-WO_3$ catalytic filter exhibited high activity and selectivity at $250{\sim}320^{\circ}C$ showing more than 95% NO conversion for the treatment of 600 ppm NO at face velocity 2 cm/s. The Pt-$V_2O_5-WO_3$ catalytic filter shifted the optimum working temperature towards the lower temperature ($170{\sim}200^{\circ}C$). And NO conversion was 100% and higher than that of $V_2O_5-WO_3$ catalyst at $250{\sim}320^{\circ}C$. The $MnO_X-V_2O_5-WO_3$ catalytic filter showed the wide temperature range of $220{\sim}330^{\circ}C$ for more than 95% NO conversion. This is a remarkable advantage when considered the $MnO_X$ catalytic filter presents the maximum activity at $150{\sim}250^{\circ}C$ and $V_2O_5-WO_3$ catalytic filter shows the maximum activity at $250{\sim}320^{\circ}C$.

  • PDF

Application of Displacement-Vector Objective Function for Frequency-domain Elastic Full Waveform Inversion (주파수 영역 탄성파 완전파형역산을 위한 변위벡터 목적함수의 적용)

  • Kwak, Sang-Min;Pyun, Suk-Joon;Min, Dong-Joo
    • Geophysics and Geophysical Exploration
    • /
    • v.14 no.3
    • /
    • pp.220-226
    • /
    • 2011
  • In the elastic wave equations, both horizontal and vertical displacements are defined. Since we can measure both the horizontal and vertical displacements in field acquisition, these displacements compose a displacement vector. In this study, we propose a frequency-domain elastic waveform inversion technique taking advantage of the magnitudes of displacement vectors to define objective function. When we apply this displacement-vector objective function to the frequency-domain waveform inversion, the inversion process naturally incorporates the back-propagation algorithm. Through the inversion examples with the Marmousi model and the SEG/EAGE salt model, we could note that the RMS error of the solution obtained by our algorithm decreased more stably than that of the conventional method. Particularly, the density of the Marmousi model and the low-velocity sub-salt zone of the SEG/EAGE salt model were successfully recovered. Since the gradient direction obtained from the proposed objective function is numerically unstable, we need additional study to stabilize the gradient direction. In order to perform the waveform inversion using the displacementvector objective function, it is necessary to acquire multi-component data. Hence, more rigorous study should be continued for the multi-component land acquisition or OBC (Ocean Bottom Cable) multi-component survey.

Prediction of a Debris Flow Flooding Caused by Probable Maximum Precipitation (가능 최대강수량에 의한 토석류 범람 예측)

  • Kim, Yeon-Joong;Yoon, Jung-Sung;Kohji, Tanaka;Hur, Dong-Soo
    • Journal of Korea Water Resources Association
    • /
    • v.48 no.2
    • /
    • pp.115-126
    • /
    • 2015
  • In recent years, debris flow disaster has occurred in multiple locations between high and low mountainous areas simultaneously with a flooding disaster in urban areas caused by heavy and torrential rainfall due to the changing global climate and environment. As a result, these disasters frequently lead to large-scale destruction of infrastructures or individual properties and cause psychological harm or human death. In order to mitigate these disasters more effectively, it is necessary to investigate what causes the damage with an integrated model of both disasters at once. The objectives of this study are to analyze the mechanism of debris flow for real basin, to determine the PMP and run-off discharge due to the DAD analysis, and to estimate the influence range of debris flow for fan area according to the scenario. To analyse the characteristics of debris flow at the real basin, the parameters such as the deposition pattern, deposit thickness, approaching velocity, occurrence of sediment volume and travel length are estimated from DAD analysis. As a results, the peak time precipitation is estimated by 135 mm/hr as torrential rainfall and maximum total amount of rainfall is estimated by 544 mm as typhoon related rainfall.

Hydraulic Characteristics of Dam Break Flow by Flow Resistance Stresses and Initial Depths (흐름저항응력 및 초기수심에 따른 댐붕괴류의 수리특성)

  • Song, Chang Geun;Lee, Seung Oh
    • Journal of Korea Water Resources Association
    • /
    • v.47 no.11
    • /
    • pp.1077-1086
    • /
    • 2014
  • The flood wave generated due to dam break is affected by initial depth upstream since it is related with hydraulic characteristics propagating downstream, and flow resistance stress has influence on the celerity, travel distance, and approaching depth of shock wave in implementing numerical simulation. In this study, a shallow water flow model employing SU/PG scheme was developed and verified by analytic solutions; propagation characteristics of dam break according to flow resistance and initial depth were analyzed. When bottom frictional stress was applied, the flow depth was relatively higher while the travel distance of shock wave was shorter. In the case of Coulomb stress, the flow velocity behind the location of dam break became lower compared with other cases, and showed values between no stress and turbulent stress at the reach of shock wave. The value of Froude number obtained by no frictional stress at the discontinuous boundary was the closest to 1.0 regardless of initial depth. The adaption of Coulomb stress gave more appropriate results compared with turbulent stress at low initial depth. However, as the initial depth became increased, the dominance of flow resistance terms was weakened and the opposite result was observed.

The Scientific Analysis of Aged' Shoe for Health Promotion (노인 건강증진용 신발의 운동과학적 효과분석)

  • Jin, Young-Wan;Kwak, Yi-Sub
    • Journal of Life Science
    • /
    • v.21 no.9
    • /
    • pp.1336-1345
    • /
    • 2011
  • The purpose of this study was to analyze and compare the effects of exercise science of shoes for Aged' health promotion. Kinematic and kinetic data were collected using cinematography and the Zebris system (Zebris Emed Sensor Platform, GR-DVL9800) to analyze pressure of foot and ground reaction force. Subjects recruited were 20 healthy elderly men. They walked at 1.36m/sec velocity wearing type A (domestic), type B (foreign) and walking shoes (A company). One-way ANOVA was used to analyze statistics. The results were as following: no significant differences were observed in gait variables among the three groups (p<0.05). There was a significant difference in max pronation angle of heels examined among the three groups (p<0.05). There were no significant differences in kinetic variables (ground reaction force and max pressure) among the three groups (p<0.05). A physiology study was performed to analyze the effects of walking with shoes with silver added to them on percent body fat, resting metabolic rate and energy expenditure. Sixty adults males were recruited from the public health center. They were divided into four groups. C: control group (n=20), EY: elderly Y group (n=20), and EO: elderly O group (n=20). The results of this study were as follows: percent body fat was decreased following each exercise period, however, not all the groups showed a significant difference. The change of resting metabolic rate was significantly increased in HI (high intensity) and LI (low intensity) periods in the C and EY groups. However, there was no significant difference in the EO group. The mean energy expenditure during and after exercise were significantly lowered in all periods compared to the control group.

On the Crystal Growth of Gap by Synthesis Solute Diffusion Method and Electroluminescence Properties. (합성용질확산법에 의한 GaP결정의 성장과 전기루미네센스 특성)

  • Kim, Seon-Tae;Mun, Dong-Chan
    • Korean Journal of Materials Research
    • /
    • v.3 no.2
    • /
    • pp.121-130
    • /
    • 1993
  • The GaP crystals were grown by synthesis solute diffusion method and its properties were investigated. High quality single crystals were obtained by pull-down the crystal growing ampoule with velocity of 1.75mm/day. Etch pits density along vertical direction of ingot was increased from 3.8 ${\times}{10^4}$c$m^{-2}$ of the first freeze to 2.3 ${\times}{10^5}$c$m^2$ of the last freeze part. The carrier concentration and mobilities at room temperature were measured to 197.49cc$m^2$/V.sec and 6.75 ${\times}{10^{15}}$c$m^{-3]$, respectively. The temperature dependence of optical energy gap was empirically fitted to $E_g$(T)=[2.3383-(6.082${\times}{10^{-4}}$)$T^2$/(373. 096+TJeV. Photoluminescence spectra measured at low temperature were consist with sharp line-spectra near band-gap energy due to bound-exciton and phonon participation in band edge recombination process. Zn-diffusion depth in GaP was increased with square root of diffusion time and temperature dependence of diffusion coefficient was D(Tl = 3.2 ${\times}{10^3}$exp( - 3.486/$k_{\theta}$T)c$m^2$/sec. Electroluminescence spectra of p-n GaP homojunction diode are consisted with emission at 630nm due to recombination of donor in Zn-O complex center with shallow acceptors and near band edge emission at 550nm. Photon emission at current injection level of lower than 100m A was due to the band-filling mechanism.

  • PDF

Experimental Study on Generating mechanism of The Ground Subsidence of Due to Damaged Waters supply Pipe (상수관로 파손으로 인한 지반함몰 발생메카니즘에 관한 실험적 연구)

  • Kim, Youngho;Kim, Joo-Bong;Kim, Dowon;Han, Jung-Geun
    • Journal of the Korean Geosynthetics Society
    • /
    • v.16 no.2
    • /
    • pp.139-148
    • /
    • 2017
  • Ground subsidence caused by damaged water pipe and sewer is recently increasing due to the aging of city and pipeline in many city. Although many recent studies have verified characteristics of ground subsidence due to wastewater pipe breakdown, research about characteristics of ground subsidence due to water pipe is insignificant. subsidence due to water pipe is insignificant. This study aims to identify the ground failure mechanism caused by water and sewer pipe breakdown. Accordingly, we conducted an indoor model experiment to verify characteristics of ground subsidence considering characteristics of ground and ground failure. The water pipe pressure and velocity head was considered to find out ground subsidence mechanism. Also comparative analysis is conducted by analyzing relative density and fine-grain content considering embedded condition of water pipe. When the relative density and seepage pressure is low, small scale ground subsidence can occur, but when the conditions are opposite, ground subsidence occur in large scale and expands to ground level over time. Furthermore, it is acknowledgeable that ground cavity that is formed after soil run off due to seepage in deep earth, maintains steady strength and stays on the ground level for long period.