• Applied Science and Convergence Technology
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• v.23 no.3
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• pp.103-112
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• 2014

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.2301-2302
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• 2008

We experimentally investigated discharge phenomena inside vacuum interrupter at 1 to 20 Torr to simulate the vacuum leakage. We used glass type of vacuum interrupter where the internal pressure and the type of gasses can be varied according to requirement. The experiment is conducted under ac applied voltage and the experimental circuit is constructed to simulate the actual circuit used in cubical type insulated switchgear. We used two types of gases such as air and SF6. The use of glass type vacuum interrupter allowed us to measure discharges occurring in vacuum interrupter optically. We measured and discussed the discharge occurring in both gases with a current transformer and ICCD camera. We also revealed that electromagnetic wave spectra emitted by the discharge have same frequency range for both gasses.

• Journal of Biosystems Engineering
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• v.21 no.2
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• pp.123-133
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• 1996

An automatic drum seeder was developed to improve the seeding operation. It consisted of a conveyor to transfer seedling trays, a seed-hopper to supply seeds, a drum to drop seeds on the tray, and an air blower to remove extra seeds. A photo sensor was used to detect the transfer of seedling trays, and its signal was fed into microcomputer which operated a stepping motor driving the drum. The seeds were adhered to the surface of drum by vacuum pressure, and were dropped into tray cells by compressed air. An air connection unit was devised to alternate between vacuum pressure and compressed air. A control program for the system, written in C language, could operate the drum at the given number of revolutions and revolutions per minute. The results showed that the air connection unit could operate well and the seeds were dropped satisfactorily into tray cells. In case of cabbage and perilla seeds, which are regular and spherical shape, the missing rate was low and the single seeding rate was more than 97%. Low missing rate and high multiple seeding rate were observed in lettuce seeds which have narrow ends with tight weight. The missing rate of pepper seed was very high because of heavy weight and irregular shape. To improve the performance of the seeder, adjustment of vacuum pressure based upon shape and weight of the seeds, careful selection of the material of drum, maintenance of consistent air blower pressure, and replacement of stepping motor to DC motor are recommended.

• Journal of Power System Engineering
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• v.14 no.4
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• pp.23-28
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• 2010

Of the roughly four million known substances, about 60,000 are processed and sold ; many of these must be dried. Many materials are processed in the liquid state - ideal for mixing and reacting - but most products are needed or wanted as dry, or relatively dry, solids. Usually operation is just below atmospheric pressure, as with direct dryers, but some are built for vacuum operation with pressures as low as 26.66kPa abs.. In spite of the global-class aquiculture agriculture and fisheries technology of our country, the processing technologies are lags behind the other nations relatively. These problems are considered to be caused directly by the lack of drying technologies. This paper is concerned to the experimental results of drying heat transfer characteristics for the green energy type vacuum dryer for the high quality agriculture and fisheries production.

• 한국연소학회:학술대회논문집
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• 2004.11a
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• pp.231-237
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• 2004

Vacuum carburizing continues to gain acceptance as an alternative to atmosphere carburizing particularly in the car industry. The advantages of low-pressure carburization over atmospheric gas carburization is not only the creation of a surface entirely free of oxide and the environmentally friendly nature of these methods but also an improvement in deformation behaviour achieved by combining carburization with gas quenching, a reduction in batch times by increasing the carburization temperature, low gas and energy consumption and the prevention of soot to a large extent. In present study, an improved vacuum carburizing method is provided which is effective to deposit carbon in the surface of materials and to reduce cycle time. Also LPC process simulator was made to optimize to process controls parameters such as pulse/pause cycles of pressure pattern, temperature, carburizing time, diffusion time. The carburizing process was simulated by a diffusion calculation program, where as the model parameters are proposed with help the experimental results and allows the control of the carburizing process with good accordance to the practical results. Thus it can be concluded that LPC process control method based on the theoretical simulation and experimental datas appears to provide a reasonable tool for prototype LPC system.

• Journal of the Korean Vacuum Society
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• v.2 no.2
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• pp.255-260
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• 1993

UHV-LCVD system was constructed for high quality silicon nitride thin film fabrication. This system consisted of a reaction chamber, an introduction chamber with sample load lock entry, a carbinet for gas manipulation controlling gas flow, a $CO_2$ laser and a Fourier transform mass spectrometer. Although the UHV-LCVD system construction was more sophisticated than low pressure CVD, highly pure thin films were fabricated by controlling gas mixing ratio and flow rate in ultra high vacuum surroundings.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.6
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• pp.733-740
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• 2014

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.218.1-218.1
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• 2014

In order to measure the absolute plasma density, various probes are proposed and investigated and microwave probes are widely used for its advantages (Insensitivity to thin non-conducting material deposited by processing plasmas, High reliability, Simple process for determination of plasma density, no complicate assumptions and so forth). There are representative microwave probes such as the cutoff probe, the hairpin probe, the impedance probe, the absorption probe and the plasma transmission probe. These probes utilize the microwave interactions with the plasma-sheath and inserted structure (probe), but frequency range used by each probe and specific mechanisms for determining the plasma density for each probe are different. In the recent studies, behaviors of each microwave probe with respect to the plasma parameters of the plasma density, the pressure (the collision frequency), and the sheath width is abundant and reasonably investigated, whereas relative diagnostic characteristics of the probes by a comparative study is insufficient in spite of importance for comprehensive applications of the probes. However, experimental comparative study suffers from spatially different plasma characteristics in the same discharge chamber, a low-reproducibility of ignited plasma for an uncertainty in external discharge parameters (the power, the pressure, the flow rate and so forth), impossibility of independently control of the density, the pressure, and the sheath width as well as expensive and complicate experimental setup. In this paper, various microwave probes are simulated by finite-different time-domain simulation and the error between the input plasma density in FDTD simulations and the measured that by the unique microwave spectrums of each probe is obtained under possible conditions of plasma density, pressure, and sheath width for general low-temperature plasmas. This result shows that the each probe has an optimum applicable plasma condition and reliability of plasma density measurement using the microwave probes can be improved by the complementary use of each probe.

• Journal of the Korean Vacuum Society
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• v.15 no.3
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• pp.314-324
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• 2006

The vacuum characteristics of the KSTAR ICRF antenna were experimentally investigated. The fabricated antenna was installed in the RF Test Chamber(RFTC) which has a vacuum system with an effective pumping speed of 1015 l/s. The time variations of RFTC pressure, total gas load and ultimate pressure were measured before the RF test. RF conditioning effect was studied by repeating RF pulses at low power level. A time variation of the RFTC pressure was measured during a RF power was applied to the antenna. Threshold pressure at which a RF breakdown occurs was investigated. Whenever the pressure was higher than $10^{-4}$ mbar, the RF breakdown occurred. During a long pulse testing, the temperature of the antenna and RFTC pressure were measured to investigate long pulse limitation of the maximum available voltage without any cooling, which were compared with testing results with a water cooling of the antenna.

• Journal of Bio-Environment Control
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• v.18 no.3
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• pp.200-207
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• 2009

This study was conducted to analyze the variations of air temperature, relative humidity and pressure in a low pressure chamber for plant growth. The low pressure chamber was composed of an acrylic cylinder, a stainless plate, a mass flow controller, an elastomer pressure controller, a read-out-box, a vacuum pump, and sensors of air temperature, relative humidity, and pressure. The pressure leakage in the low pressure chamber was greatly affected by the material and connection method of tubes. The leakage rate in the low pressure chamber with the welding of the stainless tubes and a plate decreased by $0.21kPa{\cdot}h^{-1}$, whereas the leakage in the low pressure chamber with teflon tube and rubber O-ring was given by $1.03kPa{\cdot}h^{-1}$. Pressure in the low pressure chamber was sensitively fluctuated by the air temperature inside the chamber. An elastomer pressure controller was installed to keep the pressure in the low pressure chamber at a setting value. However, inside relative humidity at dark period increased to saturation level.. Two levels (25 and 50kPa) of pressure and two levels (500 and 1,000sccm) of mass flow rate were provided to investigate the effect of low pressure and mass flow rate on relative humidity inside the chamber. It was concluded that low setting value of pressure and high mass flow rate of mixed gas were the effective methods to control the pressure and to suppress the excessive rise of relative humidity inside the chamber.