• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.563-575
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• 2006

Ti(C,N) films are synthesized by pulsed DC plasma enhanced chemical vapor deposition (PEMOCVD) using metal-organic compounds of tetrakis diethylamide titanium at $200-300^{\circ}C$. To compare plasma parameter, in this study, $H_2$ and $He/H_2$ gases are used as carrier gas. The effect of $N_2\;and\;NH_3$ gases as reactive gas is also evaluated in reduction of C content of the films. Radical formation and ionization behaviors in plasma are analyzed in-situ by optical emission spectroscopy (OES) at various pulsed bias voltages and gas species. He and $H_2$ mixture is very effective in enhancing ionization of radicals, especially for the $N_2$. Ammonia $(NH_3)$ gas also highly reduces the formation of CN radical, thereby decreasing C content of Ti(C, N) films in a great deal. The microhardness of film is obtained to be $1,250\;Hk_{0.01}\;to\;1,760\;Hk_{0.01}$ depending on gas species and bias voltage. Higher hardness can be obtained under the conditions of $H_2\;and\;N_2$ gases as well as bias voltage of 600 V. Hf(C, N) films were also obtained by pulsed DC PEMOCYB from tetrakis diethyl-amide hafnium and $N_2/He-H_2$ mixture. The depositions were carried out at temperature of below $300^{\circ}C$, total chamber pressure of 1 Torr and varying the deposition parameters. Influences of the nitrogen contents in the plasma decreased the growth rate and attributed to amorphous components, to the high carbon content of the film. In XRD analysis the domain lattice plain was (111) direction and the maximum microhardness was observed to be $2,460\;Hk_{0.025}$ for a Hf(C,N) film grown under -600 V and 0.1 flow rate of nitrogen. The optical emission spectra measured during PEMOCVD processes of Hf(C, N) film growth were also discussed. $N_2,\;N_2^+$, H, He, CH, CN radicals and metal species(Hf) were detected and CH, CN radicals that make an important role of total PEMOCVD process increased carbon content.

• Korean Journal of Materials Research
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• v.23 no.9
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• pp.517-524
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• 2013

The electrical and optical properties of fluorine-doped tin oxide films grown on polyethylene terephthalate film with a hardness of 3 using electron cyclotron resonance plasma with linear microwave of 2.45 GHz of high ionization energy were investigated. Fluorine-doped tin oxide films with a magnetic field of 875 Gauss and the highest resistance uniformity were obtained. In particular, the magnetic field could be controlled by varying the distribution in electron cyclotron deposition positions. The films were deposited at various gas flow rates of hydrogen and carrier gas of an organometallic source. The surface morphology, electrical resistivity, transmittance, and color in the visible range of the deposited film were examined using SEM, a four-point probe instrument, and a spectrophotometer. The electromagnetic field for electron cyclotron resonance condition was uniformly formed in at a position 16 cm from the center along the Z-axis. The plasma spatial distribution of magnetic current on the roll substrate surface in the film was considerably affected by the electron cyclotron systems. The relative resistance uniformity of electrical properties was obtained in film prepared with a magnetic field in the current range of 180~200A. SEM images showing the surface morphologies of a film deposited on PET with a width of 50 cm revealed that the grains were uniformly distributed with sizes in the range of 2~7 nm. In our experimental range, the electrical resistivity of film was able to observe from $1.0{\times}10^{-2}$ to $1.0{\times}10^{-1}{\Omega}cm$ where optical transmittance at 550 nm was 87~89 %. These properties were depended on the flow rate of the gas, hydrogen and carrier gas of the organometallic source, respectively.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.105-105
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• 2016

Recently, high power impulse magnetron sputtering (HIPIMS) has attracted considerable attentions due to its high potential for industrial applications. By pulsing the sputtering target with high power density and short duration pulses, a high plasma density and high ionization of the sputtered species can be obtained. HIPIMS has exhibited several merits such as increased coating density, good adhesion, microparticle-free and smooth surface, which make the HIPIMS technique desirable for synthesizing hard coatings. However, hard coatings present intrinsic defects (columnar structures, pinholes, pores, discontinuities) which can affect the corrosion behavior, especially when substrates are active alloys like steel or in a wear-corrosion process. Atomic layer deposition (ALD), a CVD derived method with a broad spectrum of applications, has shown great potential for corrosion protection of high-precision metallic parts or systems. In ALD deposition, the growth proceeds through cyclic repetition of self-limiting surface reactions, which leads to the thin films possess high quality, low defect density, uniformity, low-temperature processing and exquisite thickness control. These merits make ALD an ideal candidate for the fabrication of excellent oxide barrier layer which can block the pinhole and other defects left in the coating structure to improve the corrosion protection of hard coatings. In this work, CrN/Al2O3/CrN multilayered coatings were synthesized by a hybrid process of HIPIMS and ALD techniques, aiming to improve the CrN hard coating properties. The influence of the Al2O3 interlayer addition, the thickness and intercalation position of the Al2O3 layer in the coatings on the microstructure, surface roughness, mechanical properties and corrosion behaviors were investigated. The results indicated that the dense Al2O3 interlayer addition by ALD lead to a significant decrease of the average grain size and surface roughness and greatly improved the mechanical properties and corrosion resistance of the CrN coatings. The thickness increase of the Al2O3 layer and intercalation position change to near the coating surface resulted in improved mechanical properties and corrosion resistance. The mechanism can be explained by that the dense Al2O3 interlayer acted as an excellent barrier for dislocation motion and diffusion of the corrosive substance.

• Publications of The Korean Astronomical Society
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• v.30 no.2
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• pp.559-563
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• 2015

Monitor of All-sky X-ray Image (MAXI) is a Japanese X-ray all-sky surveyer mounted on the International Space Station (ISS). It has been scanning the whole sky since 2009 during every 92-minute ISS rotation. X-ray transients are quickly found by the real-time nova-search program. As a result, MAXI has issued 133 Astronomer's Telegrams and 44 Gamma-ray burst Coordinated Networks so far. MAXI has discovered six new black holes (BH) in 4.5 years. Long-term behaviors of the MAXI BHs can be classified into two types by their outbursts; a fast-rise exponential-decay type and a fast-rise flat-top one. The slit camera is suitable for accumulating data over a long time. MAXI issued a 37-month catalog containing 500 sources above a ~0.6 mCrab detection limit at 4-10 keV in the region ${\mid}{b}{\mid}$ > $10^{\circ}$. The SSC instrument utilizing an X-ray CCD has detected diffuse soft X-rays extending over a large solid angle, such as the Cygnus super bubble. MAXI/SSC has also detcted a Ne emission line from the rapid soft X-ray nova MAXI J0158-744. The overall shapes of outbursts in Be X-ray binaries (BeXRB) are precisely observed with MAXI/GSC. BeXRB have two kinds of outbursts, a normal outburst and a giant one. The peak dates of the subsequent giant outbursts of A0535+26 repeated with a different period than the orbital one. The Be stellar disk is considered to either have a precession motion or a distorted shape. The long-term behaviors of low-mass X-ray binaries (LMXB) containing weakly magnetized neutron stars are investigated. Transient LMXBs (Aql X-1 and 4U 1608-52) repeated outbursts every 200-1000 days, which is understood by the limit-cycle of hydrogen ionization states in the outer accretion disk. A third state (very dim state) in Aql X-1 and 4U 1608-52 was interpreted as the propeller effect in the unified picture of LMXB. Cir X-1 is a peculiar source in the sense that its long-term behavior is not like typical LMXBs. The luminosity sometimes decreases suddenly at periastron. It might be explained by the stripping of the outer accretion disk by a clumpy stellar wind. MAXI observed 64 large flares from 22 active stars (RS CVns, dMe stars, Argol types, young stellar objects) over 4 years. The total energies are $10^{34}-10^{36}$ erg $s^{-1}$. Since MAXI can measure the spectrum (temperature and emission measure), we can estimate the size of the plasma and the magnetic fields. The size sometimes exceeds the size of the star. The magnetic field is in the range of 10-100 gauss, which is a typical value for solar flares.