• Applied Science and Convergence Technology
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• v.24 no.6
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• pp.250-253
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• 2015

High contrast grating (HCG) is the structure made up of the sub-wavelength grating of high-index and the surrounding layer of low-index, which reveals high contrast between two materials. Its advantages include high reflectivity over a broad bandwidth, polarization and wavelength selectivity, optical high-Q resonator, and phase modulation. In this work, the HCG structure comprising of indium tin oxide (ITO) and Silicon (Si), for the surrounding layer and the grating layer respectively, was studied. Its theoretical model was established, and transmittance, phase and optical behavior were calculated by rigorous coupled-wave analysis and finite element method. Furthermore, the established structure was fabricated to validate its feasibility. The fabricated structure shows the focusing capability whose length is about $10{\mu}m$, and the feasibility of the structure was demonstrated. It is also meaningful that ITO layer can contribute to the fabrication of the HCG structure, leading to enable the structure to be electrical-driven.

• Journal of Institute of Control, Robotics and Systems
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• v.18 no.6
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• pp.546-554
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• 2012

This paper suggests a design method of an improved phase control loop for tracking resonant frequency of solid type precision resonant gyroscope. In general, a low cost MEMS gyroscope adapts the automatic gain control loops by taking a velocity feedback configuration. This control technique for controlling the resonance amplitude shows a stable performance. But in terms of resonant frequency tracking, this technique shows an unreliable performance due to phase errors because the AGC method cannot provide an active phase control capability. For the resonance control loop design of a solid type precision resonant gyroscope, this paper presents a phase domain control loop based on linear PLL (Phase Locked Loop). In particular, phase control loop is exploited using a higher order PLL loop filter by extending the first order active PI (Proportion-Integral) filter. For the verification of the proposed loop design, a hemispherical resonant gyroscope is considered. Numerical simulation result demonstrates that the control loop shows a robust performance against initial resonant frequency gap between resonator and voltage control oscillator. Also it is verified that the designed loop achieves a stable oscillation even under the initial frequency gap condition of about 25 Hz, which amounts to about 1% of the natural frequency of a conventional resonant gyroscope.