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Study on the characteristics of ALD, ZrO2 thin film for next-generation high-density MOS devices (차세대 고집적 MOS 소자를 위한 ALD ZrO2 박막의 특성 연구)

  • Ahn, Seong-Joon;Ahn, Seung-Joon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.1
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    • pp.47-52
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    • 2008
  • As the packing density of IC devices gets ever higher, the thickness of the gate $SiO_2$ layer of the MOS devices is now required to be reduced down to 1 nm. For such a thin $SiO_2$ layer, the MOS device cannot operate properly because of tunneling current and threshold voltage shift. Hence there has been much effort to develop new dielectric materials which have higher dielectric constants than $SiO_2$ and is free from such undesirable effects. In this work, the physical and electrical characteristics of ALD $ZrO_2$ film have been studied. After deposition of a thin ALD $ZrO_2$ film, it went through thermal treatment in the presence of argon gas at $800^{\circ}C$ for 1 hr. The characteristics of morphology, crystallization kinetics, and interfacial layer of $Pt/ZrO_2/Si$ samples have been investigated by using the analyzing instruments like XRD, TEM and C-V plots. It has been found that the characteristics of the $Pt/ZrO_2/Si$ device was enhanced by the thermal treatment.

Effect of SiC and WC additon on Oxidation Behavior of Spark-Plasma-Sintered ZrB2

  • Kim, Chang-Yeoul;Choi, Jae-Seok;Choi, Sung-Churl
    • Journal of Powder Materials
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    • v.26 no.6
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    • pp.455-462
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    • 2019
  • ZrB2 ceramic and ZrB2 ceramic composites with the addition of SiC, WC, and SiC/WC are successfully synthesized by a spark plasma sintering method. During high-temperature oxidation, SiC additive form a SiO2 amorphous outer scale layer and SiC-deplete ZrO2 scale layer, which decrease the oxidation rate. WC addition forms WO3 during the oxidation process to result in a ZrO2/WO3 liquid sintering layer, which is known to improve the anti-oxidation effect. The addition of SiC and WC to ZrB2 reduces the oxygen effective diffusivity by one-fifth of that of ZrB2. The addition of both SiC and WC shows the formation of a SiO2 outer dense glass layer and ZrO2/WO3 layer so that the anti-oxidation effect is improved three times as much as that of ZrB2. Therefore, SiC- and WC-added ZrB2 has a lower two-order oxygen effective diffusivity than ZrB2; it improves the anti-oxidation performance 3 times as much as that of ZrB2.

Numerical Investigation of Supersonic Combustion on Two-dimensional Double Shear Layer (2차원 2단 혼합층에서의 초음속 연소에 관한 수치해석)

  • Kim, Dong-Min;Baek, Seung-Wook
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.05a
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    • pp.285-288
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    • 2008
  • The Present Study describes the numerical investigations concerning a fuel(Hydrogen), inert gas (Nitrogen) or supersonic air stream issued between each other. The basic flow configuration consists of a plane, double shear/mixing layer flow. For the numerical solution, a fully conservative unsteady $2^{nd}$ order time accurate sub-iteration method and a $2^{nd}$ order Total Variation Diminishing(TVD) scheme are used with the finite volume method(FVM). The results are consist of three categories ; single shear layer consist of fuel and supersonic air stream, inert gas stream issued between supersonic air and fuel stream, fuel gas stream issued between supersonic air and fuel stream. The numerical calculations has been carried out in case of 1,2, and 4mm thickness of center stream. The width of total gas stream is 4cm.

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White Organic Light Emitting Diodes using Red and Blue Phosphorescent Materials with Blocking Layer

  • Park, Jung-Hyun;Kim, Gu-Young;Lee, Seok-Jae;Seo, Ji-Hyun;Seo, Ji-Hoon;Kim, Young-Kwan
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.5
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    • pp.218-221
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    • 2007
  • High-efficiency white organic light-emitting diodes(WOLEDs) were fabricated with two emissive layers and an blocking layer was sandwiched between two phosphorescent dopants, bis(3,5-difluoro-2-(2-pyridyl)phenyl-(2-carboxypyridyl) iridium III(FIrpic) as the blue emission and a newly synthesized red phosphorescent material guest, bis(5-acetyl-2-phenylpyridinato-N,C2') acetylacetonate($(acppy)_2Ir(acac)$). This blocking layer prevented a T-T annihilation in a red emissive layer, and balanced with blue and red emission as blocking of hole carriers. The white device showed Commission Internationale d'Eclairage($CIE_{x,y}$) coordinates of (0.317, 0.425) at 22400 $cd/m^2$, a maximum luminance of 27300 $cd/m^2$ at 268 $mA/cm^2$, a maximum luminous efficiency and power efficiency of 26.9 cd/A and 18.6 lm/W.

Liquid Crystal Alignment on Multi-stacked Layer HfO2 Thin Films Using a Solution-process (용액 공정 기반의 다중 적층된 HfO2 박막 상에서의 액정 배향)

  • Kim, Dai-Hyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.11
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    • pp.821-825
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    • 2013
  • Effect of multi-stacked layer (MSL), 0.1 mol (M) and 0.3 mol (M) hafnium oxide ($HfO_2$) alignment layers were fabricated via a solution-process for LCs orientation. The solutions were spin-coated and annealed in a furnace. MSL consists of three sub-layers using 0.1 M solution, mono-layer (ML) is composed of 0.3 M $HfO_2$ solution. Then ion-beam irradiation was treated with 1.8 keV for 2 min. $HfO_2$-based LC cells were investigated through photographs, pre-tilt angle using crystal rotation method, X-ray photoelectron spectroscopy (XPS) measurement, and surface roughness using atomic force microscopy(AFM) for their characteristic research. Good LC orientation characteristics were observed on MSL $HfO_2$ surface. The LC alignment mechanism on MSL $HfO_2$ and ML $HfO_2$ surfaces was attributed to van der Waals (VDW) interaction between the LC molecular and substrate surface.

Tunneling Magnetoresistance in Si/$SiO_2$/NiFe/$Al_2$$O_3$/Co Thin Films (Si/$SiO_2$/NiFe/$Al_2$$O_3$/Co 박막의 투과자기저항 특성 연구)

  • 현준원;백주열
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.11
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    • pp.934-940
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    • 2001
  • Magnetic properties were investigated for Si/SiO$_2$/NiFe(300 )/A1$_2$O$_3$(t)/Co(200 ) junction related with the parameters of $Al_2$O$_3$. Insulating $Al_2$O$_3$ layer was formed by depositing a 5~40 thick Al layer, followed by a 90~120s RF plasma oxidation in an $O_2$ atmosphere. Magnetoresistance was not observed for tunnel junction with 5~10 thick Al layer, but magnetoresistance was observed large for tunnel junction with 15~40 thick Al layer. Oxidation time did not largely influence magnetoresistance. Tunnel magnetoresistance effect depended on magnetization behavior of two ferromagnetic layers. Tunneling junction was confirmed through nonlinear I-V curve. In this work, tunneling magnetoresistance(TMR) up to 30 % was observed. This apparent TMR is an artifact of the nonuniform current flow over the junction in the cross geometry of the electrodes.

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Micropower energy harvesting using high-efficiency indoor organic photovoltaics for self-powered sensor systems

  • Biswas, Swarup;Lee, Yongju;Kim, Hyeok
    • Journal of Sensor Science and Technology
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    • v.30 no.6
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    • pp.364-368
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    • 2021
  • We developed a highly efficient organic photovoltaic (OPV) cell with a poly[4,8-bis(5-(2-ethylhexyl)thiophen-2-yl)benzo[1,2-b;4,5-b']dithiophene-2,6-diyl-alt-(4-(2-ethylhexyl)-3-fluorothieno[3,4-b]thiophene-)-2-carboxylate-2-6-diyl)]:[6,6]-phenyl-C71-butyric acid methyl ester active layer for harvesting lower-intensity indoor light energy to power various self-powered sensor systems that require power in the microwatt range. In order to achieve higher power conversion efficiency (PCE), we first optimized the thickness of the active layer of the OPV cell through optical simulations. Next, we fabricated an OPV cell with optimized active layer thickness. The device exhibited a PCE of 12.23%, open circuit voltage of 0.66 V, short-circuit current density of 97.7 ㎂/cm2, and fill factor of 60.53%. Furthermore, the device showed a maximum power density of 45 ㎼/cm2, which is suitable for powering a low-power (microwatt range) sensor system.

Stabilizing Li2O-based Cathode/Electrolyte Interfaces through Succinonitrile Addition

  • Myeong Jun Joo;Yong Joon Park
    • Journal of Electrochemical Science and Technology
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    • v.14 no.3
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    • pp.231-242
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    • 2023
  • Li2O-based cathodes utilizing oxide-peroxide conversion are innovative next-generation cathodes that have the potential to surpass the capacity of current commercial cathodes. However, these cathodes are exposed to severe cathode-electrolyte side reactions owing to the formation of highly reactive superoxides (Ox-, 1 ≤ x < 2) from O2- ions in the Li2O structure during charging. Succinonitrile (SN) has been used as a stabilizer at the cathode/electrolyte interface to mitigate cathode-electrolyte side reactions. SN forms a protective layer through decomposition during cycling, potentially reducing unwanted side reactions at the interface. In this study, a composite of Li2O and Ni-embedded reduced graphene oxide (LNGO) was used as the Li2O-based cathode. The addition of SN effectively thinned the interfacial layer formed during cycling. The presence of a N-derived layer resulting from the decomposition of SN was observed after cycling, potentially suppressing the formation of undesirable reaction products and the growth of the interfacial layer. The cell with the SN additive exhibited an enhanced electrochemical performance, including increased usable capacity and improved cyclic performance. The results confirm that incorporating the SN additive effectively stabilizes the cathode-electrolyte interface in Li2O-based cathodes.

Sulfur Defect-induced n-type MoS2 Thin Films for Silicon Solar Cell Applications (실리콘 태양전지 응용을 위한 황 결핍 n형 MoS2 층 연구)

  • Inseung Lee;Keunjoo Kim
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.3
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    • pp.46-51
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    • 2023
  • We investigated the MoS2 thin film layer by thermolytic deposition and applied it to the silicon solar cells. MoS2 thin films were made by two methods of dipping and spin coating of (NH4)2MoS4 precursor solution. We implemented two types of substrates of microtextured and nano-microtextured 6-in. Si pn junction wafers. The fabricated MoS2 thin film layer was analyzed, and solar cells were fabricated by applying the standard silicon solar cell process. The MoS2 thin film layer of sulfur-deficient form was deposited on the n-type emitter layer, and electrons, which are minority carriers, were well transported at the interface and exhibited photovoltaic solar cell characteristics. The cell efficiencies were achieved at 5% for microtextured wafers and 2.56% for nano-microtextured wafers.

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Fabrication of Poly Seed Layer for Silicon Based Photovoltaics by Inversed Aluminum-Induced Crystallization (역 알루미늄 유도 결정화 공정을 이용한 실리콘 태양전지 다결정 시드층 생성)

  • Choi, Seung-Ho;Park, Chan-Su;Kim, Shin-Ho;Kim, Yang-Do
    • Korean Journal of Materials Research
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    • v.22 no.4
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    • pp.190-194
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    • 2012
  • The formation of high-quality polycrystalline silicon (poly-Si) on relatively low cost substrate has been an important issue in the development of thin film solar cells. Poly-Si seed layers were fabricated by an inverse aluminum-induced crystallization (I-AIC) process and the properties of the resulting layer were characterized. The I-AIC process has an advantage of being able to continue the epitaxial growth without an Al layer removing process. An amorphous Si precursor layer was deposited on Corning glass substrates by RF magnetron sputtering system with Ar plasma. Then, Al thin film was deposited by thermal evaporation. An $SiO_2$ diffusion barrier layer was formed between Si and Al layers to control the surface orientation of seed layer. The crystallinity of the poly-Si seed layer was analyzed by Raman spectroscopy and x-ray diffraction (XRD). The grain size and orientation of the poly-Si seed layer were determined by electron back scattering diffraction (EBSD) method. The prepared poly-Si seed layer showed high volume fraction of crystalline Si and <100> orientation. The diffusion barrier layer and processing temperature significantly affected the grain size and orientation of the poly Si seed layer. The shorter oxidation time and lower processing temperature led to a better orientation of the poly-Si seed layer. This study presents the formation mechanism of a poly seed layer by inverse aluminum-induced crystallization.