• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.183-186
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• 2004

The metal-ferroelectric-insulator-semiconductor(MFIS) capacitors were fabricated using a metalorganic decomposition (MOD)method. The $CeO_2$ thin films were deposited as a buffer layer on Si substrate and $Bi_{3.25}La_{0.75}Ti_3O_{12}$ (BLT) thin films were used as a ferroelectric layer. The electrical and structural properties of the MFIS structure were investigated by varying the $CeO_2$ layer thickness. The width of the memory window in the capacitance-voltage (C-V)curves for the MFIS structure decreased with increasing thickness of the $CeO_2$ layer. Auger electron spectroscopy (AES) and transmission electron microscopy (TEM) show no interdiffusion by using the $CeO_2$ film as buffer layer between the BLT film and Si substrate. The experimental results show that the BLT-based MFIS structure is suitable for non-volatile memory field-effect-transistors (FETs) with large memory window.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.64 no.10
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• pp.1469-1478
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• 2015

In this paper, The methodology of Type-2 fuzzy set-based Radial Basis Function Neural Network(T2RBFNN) is proposed for Sewage Treatment Process and the simulator is developed for application to the real-world sewage treatment plant by using the proposed model. The proposed model has robust characteristic than conventional RBFNN. architecture of network consist of three layers such as input layer, hidden layer and output layer of RBFNN, and Type-2 fuzzy set is applied to receptive field in contrast with conventional radial basis function. In addition, the connection weights of the proposed model are defined as linear polynomial function, and then are learned through Back-Propagation(BP). Type reduction is carried out by using Karnik and Mendel(KM) algorithm between hidden layer and output layer. Sewage treatment data obtained from real-world sewage treatment plant is employed to evaluate performance of the proposed model, and their results are analyzed as well as compared with those of conventional RBFNN.

• Fibers and Polymers
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• v.4 no.2
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• pp.49-53
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• 2003

Polyurethane (PU) layer and copolymer consisted of the different molecular weights (1000 and 2000 g/mol) of poly(propylene glycol) (PPG) were prepared. The damping and mechanical properties of these materials were compared with PU 1000 made by PPG having the molecular weight of 1000 g/mol. The optimum composition of PU2000 used for PU layer and copolymer was diphenylmethane diioscynate (MDI)/propylene glycol (PPG)/butanediol (BD) (1/0.3/0.7) based on the damping and mechanical properties. The damping peak of PU copolymer was higher than those of PU layer and PUI 1000 in low temperature range (-30- $10^{\circ}C$). For application in noise reduction, the transmission loss of the mechanical vibration through solid structure was measured. PU layer and copolymer were used as a damping layer. The transmission loss of PU copolymer was more effective than those of PU layer and PU 1000 in the experimental frequency range.

• Journal of Welding and Joining
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• v.8 no.4
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• pp.58-68
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• 1990

The formation of thermal stresses by plasma spraying is generally considered as adverse. Therefore, the knowledge of stress distribution in the deposited layer during and after plasma spraying will be of special interest. In this study finite difference heat transfer analysis and finite element stress analysis were carried out to predict the change of stress distribution in the plasma coated layer with the variations of preheat temperature, number of scan, particle size, and bond coat. The results of the numerical analysis were as follows: 1) Transient stresses developed in the coated layer were up to the level of yiedl strength at the temperature. 2) The tensile stresses were developed in the deposited layer and the surface of the substrate, but the compressive stresses were developed in the rest of the substrate. 3) Transient and residual stresses were significantly affected by the preheat temperature. 4) The variations of temperature of powder particle and number of torch scan changed tensile stress distribution, but made no difference on the magnitude of the stresses. 5) Bond coated layer reduced the stree level of deposited layer.

• Fashion & Textile Research Journal
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• v.11 no.2
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• pp.359-362
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• 2009

This study investigates the behavior of water vapor permeability of a layered system to find out a comfortable combination of a layered system for outdoor activities and examines the water vapor permeability of various types of outdoor clothing fabrics. The layered system includes the base layer such as sportswool and polyester/cotton fabrics, the middle layer such as single and double sided fleece fabrics, and the shell layer such as polyurethane-coated, PTFE-laminated and microfiber fabrics in this experiment. Results show that the layered system was applied, it was working together as a whole having some influence on each other layer, though every layer offered varying degree of water vapor permeability. Water vapor permeability of layered system exactly followed the same trend as the shell layer, which is all vapor permeable water repellent fabrics as a single layer. The rate of water vapor transfer through a layered system is mainly related to the type of vapor permeable water repellent fabrics used for the shell layer.

• Transactions of the Society of Information Storage Systems
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• v.3 no.1
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• pp.17-22
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• 2007

[ $TiO_2$ ] nanoparticles are added into UV curable resin to increase the refractive index of the cover-layer which is laminated on the media for cover-layer incident NFR. High refractive index is required for the cover-layer operating for the solid immersion lens optics with high effective numerical aperture. The eyepattern could be achieved from the cover-layer coated 20 GB ROM disc in which the refractive index of the cover-layer was 1.75, but the gap servo was unstable due to the rough surface of the cover-layer. Even though the light loss due to the nanoparticles is not serious, the rough microstructure is developed by adding the nanoparticles in the organic binder material. To achieve smooth surface for the stable gap servo, some special techniques should be added, for example the solubility of the nanoparticles should be enhanced by the optimization of the surface of the nanoparticles.

• Journal of the Korea Institute of Military Science and Technology
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• v.3 no.2
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• pp.179-188
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• 2000

Multi-disciplinary optimization design concept can provide a solution to many engineering problems. In the field of structural analysis, much development of size or topology optimization has been achieved in the application of research. This paper demonstrates an optimum design of a multi-layer cylindrical tube which behaves thermoelastically. A multi-layer cylindrical tube that has several different material properties at each layer is optimized within allowable stress and temperature range when mechanical and thermal loads are applied simultaneously. When thermal loads are applied to a multi-layer tube, stress phenomena become complicated due to each layer's thermal expansion and the layer thicknesses. Factors like temperature; stress; and material thermal thicknesses of each tube layer are very difficult undertaking. To analyze these problems using an efficient and precise method, the optimization theories are adopted to perform thermoelastic finite element analysis.

• Journal of Information Display
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• v.2 no.4
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• pp.8-14
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• 2001

Three types of conjugated polymers, poly(PZ-Pi), poly(PZ-BPI) and poly(PZ-NPI) were synthesized by Schiff-base reaction. These new conjugated polymers exhibited improved solubility in common organic solvents due to the presence of alkyl side chains as well as azomethine groups, Double layer LEDs made with the synthesized polymers as emitting layer and $Alq_3$, as electron transporting layer exhibited enhanced EL emission and efficiency compared to those of single layer LEDs. Double layer LEDs exhibited gradual shift in the emission peak th the single layer LED, made of only $Alq_3$ as the emitting layer as the thickness of $Alq_3$ layer increased.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.43 no.5
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• pp.795-801
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• 1994

The BiPbSrCaCuO superconductor was fabricated by diffusion of The dual layer composed of SrS12TCaS11TCuS12TOS1xT in upper layer and BiS12TPbSI0.3TCuS12TOS1yT in lower layer, and varified growh-mechanism of BiPbSrCaCuO superconducting phase. And, we produced optimum conditions of spread volume and each stage of sintering time were upper layer:Lower layer=1:0.2, 1:0.4, 1:0.6 and 24hr., 120hr., 210hr. From the result, the optimum conditions are spread volume(Upper layer:Lower layer=1:0.6), sintering time(210hrs.) at 820$^{\circ}C$.The BiPbSrCaCuO superconductor, fabricated optimum condition, showed zero resistance at critical temperature of 70k.