• Title/Summary/Keyword: lasers

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$C_{x}F_{y}$ Polymer Film Deposition in rf and dc $C_{7}F_{16}$ Vapor Plasmas

  • Sakai, Y.;Akazawa, M.;Sakai, Yosuke;Sugawara, H.;Tabata, M.;Lungu, C.P.;Lungu, A.M.
    • Transactions on Electrical and Electronic Materials
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    • v.2 no.1
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    • pp.1-6
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    • 2001

  • $C_{x}F_{y}$ polymer film was deposited in rf and dc Fluorinert vapor ($C_{7}F_{16}$) plasmas. In the plasma phase, the spatial distribution of optical emission spectra and the temporal concentration of decomposed species were monitored, and kinetics of the $C_{7}F_{16}$ decomposition process was discussed. Deposition of $C_{x}F_{y}$ film has been tried on substrates of stainless steel, glass, molybdenum and silicon wafers at room temperature in the vapor pressures of 40 and 100 Pa. The films deposited in the rf plasma showed excellent electrical properties as an insulator for multi-layered interconnection of deep-submicron LSI, i.e. the low dielectric constant ∼2.0, the dielectric strength ∼2 MV/cm and the high deposition rate ∼100nm/min at 100W input power.

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Characteristics of Nanoscale Modes Guided by the Total External Reflection of Surface Plasmon-Polaritons (표면 플라즈몬-폴라리톤의 외부-전반사에 의해 도파되는 나노 크기 모드의 특성)

  • Seol, Kang Hee;Song, Seok Ho
    • Korean Journal of Optics and Photonics
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    • v.23 no.1
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    • pp.36-41
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    • 2012

  • Total external reflection (TER), which does not occur on a dielectric interface, is a unique feature of surface plasmon-polaritons (SPP). We propose an SPP-TER waveguide structure consisting of low-index dielectric nanocore covered with high-index dielectric on a flat metal surface. The SPP mode confined in the nanocore by the TER effect has a mode size much smaller than wavelength scale. Numerical comparison of mode characteristics between the SPP-TER waveguides and other total-internal-reflection-based waveguides such as metal or high-index dielectric nanowires show that the SPP-TER structures can possess higher modal gain for applications of nanocavity lasers.

  • https://doi.org/10.3807/KJOP.2012.23.1.036 인용 PDF KSCI