• 한국레이저가공학회지
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• 제7권1호
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• pp.29-36
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• 2004

The dynamics of laser-induced plasma/shock wave and the interaction with a surface in the laser shock cleaning process are analyzed by optical diagnostics. Shock wave is generated by a Q-switched Nd:YAG laser in air or with N$_2$, Ar, and He injection into the focal spot. The shock speed is measured by monitoring the photoacoustic probe-beam deflection signal under different conditions. In addition, nanosecond time-resolved images of shock wave propagation and interaction with the substrate are obtained by the laser-flash shadowgraphy. The results reveal the effect of various operation parameters of the laser shock cleaning process on shock wave intensity, energy-conversion efficiency, and flow characteristics. Discussions are made on the cleaning mechanisms based on the experimental observations.

• 한국레이저가공학회지
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• 제6권2호
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• pp.27-33
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• 2003

A laser shock cleaning technology is a new dry cleaning methodology for the effective removal of small particles from the surface. This technique uses a plasma shock wave produced by a breakdown of air due to an intense laser pulse. In order to optimize the laser shock cleaning process, it needs to evaluate the cleaning performance quantitatively by using a monitoring technique. In this paper, an acoustic monitoring technique was attempted to investigate the laser shock cleaning process with an aim to optimize the cleaning process. A wide-band microphone with high sensitivity was utilized to detect acoustic signals during the cleaning process. It was found that the intensity of the shock wave was strongly dependent on the power density of laser beam and the gas species at the laser beam focus. As a power density was larger, the shock wave became stronger. It was also seen that the shock wave became stronger in the case of Ar gas compared with air and N$_2$ gas.

• 한국레이저가공학회지
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• 제12권4호
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• pp.17-25
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• 2009

The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

• 대한기계학회논문집B
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• 제32권11호
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• pp.832-840
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• 2008

Ablation occurs at irradiance beyond $10^9\;W/cm^2$ with nanosecond and short laser pulses focused onto any materials. Phenomenologically, the surface temperature is instantaneously heated past its vaporization temperature. Before the surface layer is able to vaporize, underlying material will reach its vaporization temperature. Temperature and pressure of the underlying material are raised beyond their critical values, causing the surface to explode. The pressure over the irradiated surface from the recoil of vaporized material can be as high as $10^5\;MPa$. The interaction of high power nanosecond laser with a thin metal in air has been investigated. The nanosecond pulse laser beam in atmosphere generates intensive explosions of the materials. The explosive ejection of materials make the surrounding gas compressed, which form a shock wave that travels at several thousand meters per second. To understand the laser ablation mechanism including the heating and ionization of the metal after lasing, the temporal evolution of shock waves is captured on an ICCD camera through laser flash shadowgraphy. The expansion of shock wave in atmosphere was found to agree with the Sedov's self-similar spherical blast wave solution.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2007년도 제34회 KOSCO SYMPOSIUM 논문집
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• pp.27-30
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave is generated from a localized spot of high intensity energy source. The resulting reactive shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is generating reactive shock wave and high strain rate deforming of thin metal foil for accelerating micro-particles to a very high speed on the orders of several thousand meter per second. Somce innovative applications of this device will be discussed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.1916-1919
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave propagates through the foil. The shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is applying shock wave and deformation of the thin foil from the ablation to accelerating micro-particles to a very high speed.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2008년도 춘계학술발표대회 및 제14회 신소재 심포지엄
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• pp.30.1-30.1
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• 2008

• 한국레이저가공학회지
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• 제6권3호
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• 한국추진공학회지
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• 제19권5호
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• pp.46-51
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• 2015

선형 화약 폭발의 전파 특성예측을 위해 다채널 동시 충격파 센싱 시스템을 개발하였다. 개발된 시스템은 펄스 레이저를 이용하여 초당 1000점에서 충격파 생성이 가능하며, 접촉식 센서를 이용하여 15개 채널에서 동시에 충격파 획득이 가능하다. 특히, 선형 화약의 폭파 시간에 상응한느 각 채널의 시간 지연을 사용자 요구에 따라 적절하게 적용할 수 있는 능력을 갖춤으로써 다양한 선형 화약의 폭발에 의한 충격파 전파를 예측할 수 있을 것으로 기대된다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.353-357
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• 2007

본 연구의 목표는 고 에너지원이 고 출력 펄스 레이저를 이용하여 금속 표면에서 발생하는 충격파를 분석하고 이를 다른 분야에 적용하는 것이다. 금속 표면 일정 단면에 펄스 레이저를 조사시키면 충격파가 발생하며 이 충격파는 음향 임피던스에 의해 레이저가 조사된 반대 방향으로 극 초음속(4000m/s 이상)으로 매우 짧은 시간동안 진행하며 다른 표면에서도 고 에너지에 의해 충격파가 발생한다. 이와 함께 얇은 금속은 순간 탄성변형을 일으킨다. 짧은 시간에 발생하는 모든 현상은 ICCD카메라를 통해 확인 할 수 있다. 이 실험의 목적은 고 에너지에 의해 발생한 충격파를 이용하여 미립자를 매우 빠른 속도로 가속하는데 있다.