• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.1
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• pp.22-31
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• 2002

A Safety Monitoring System using a laser and 2-D arrayed photo sensors is developed. To monitor of the deformation and small rotation of structure the developed optical system using 2-D photo sensor array was used to detect the variation of optical orbit of laser which was induced by deformation of the structure. Also, an operating program to manage the system and an algorithm for the data acquisition and the database are introduced. In this study, we demonstrated the capabilities of this system by laboratory experiments before applying the system to the field.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.45-48
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• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.4
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• pp.119-126
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• 1995

This paper presents a non-contact measuring system using one point measuring method to measure surface profiles of dies and clay models for practical use in the field of production engineering. The system has a laser beam probe similar to a measuring probe in a contact measuring system and CCD linear sensor used to detect 300mm measurement range, displacement of measured surfaces, from an origin. There is no mechanical interference between this measuring system and a measured surface in this system. In this measuring system, it was needed 500-600ms including data processing time to measure one point. The experiments showed that the standard deviation was 800 .mu.m and the reproducibility was also 100-210 .mu. m.

• Journal of the Optical Society of Korea
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• v.19 no.2
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• pp.169-174
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• 2015

Muscle vibration measurement has long been an unique scientific study, in general, and the direct reaction of animals to feel pain (algesia), either from vascular or muscle contraction, is a complex perceptual experience. Thus this paper proposes a way to measure animal algesia quantitatively, by measuring the changes in muscle vibration due to a pinprick on the surface of the skin of a Spodoptera litura larva. Using the laser optical triangulation measurement principle, along with a CMOS image sensor, linear laser, software analysis, and other tools, we quantify the subtle object point displacement, with a precision of up to $10{\mu}m$, for our chosen Spodoptera litura larva animal model, in which it is not easy to identify the tiny changes in muscle contraction dynamics with the naked eye. We inject different concentrations of formalin reagent (empty needle, 12% formalin, and 37% formalin) to obtain a variety of different muscle vibration frequencies as the experimental results. Because of the high concentrations of reagent applied, we see a high frequency shift of muscle vibration, which can be presented as pain indices, so that the algesia can be quantified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.415-418
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• 2005

In the semiconductor and optical industry, a new transport system which can replace the conventional transport systems is required. The transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required fur reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system fur levitating object are proposed. The 3D vibration profiles of the beam are measured by Laser scanning Vibrometer fur verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured for evaluating the performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.959-962
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• 2005

In the semiconductor and optical industry. a new transport system which can replace the conventional transport system is required. The Transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required for reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system for levitation object are proposed. The 3D vibration profiles of the beam are measured by Laser Scanning Vibrometer for verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured fore evaluating the performance.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.11
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• pp.1147-1156
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• 2011

A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein, in order to design an instrument for ensuring reliable contact conditions, the contact condition is analyzed by characterizing the signal distortion, observing the pressure distribution between the contacting surfaces, and measuring the motional errors of the sensor using a laser Doppler vibrometer (LDV). The manufactured instrument enables a CLECDiS to be used in an ultraprecise positioning system with improved reliability.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.25 no.10
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• pp.707-713
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• 2015

This paper proposes experimental results for control performance deterioration of a piezoelectric actuator under high temperature conditions due to external heat environment. In this work, a heat environment from 30 ℃ to 190 ℃ is established by a heat chamber which is capable of high temperature of heat environment. Inside the heat chamber, an experimental apparatus consisting of the stack type of piezoelectric actuator, laser sensor, gap sensor and temperature sensor is established. After evaluating temperature dependent blocking force, displacement and time response of a piezoelectric actuator inside the heat chamber, tracking control performances are evaluated under various temperature conditions via proportional-integral-derivative(PID) feedback controller. The desired position trajectory has a sinusoidal wave form with a fixed frequency. Control performances are experimentally evaluated at both room temperature and high temperature and presented in time domain.