• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Journal of Korean Society of Forest Science
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• v.99 no.5
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• pp.720-725
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• 2010

On the basis of vegetation data in the 9.12 ha (380 m ${\times}$ 240 m) permanent sample plot of the spruce-fir valley forest in Liangshui National Reserve of Xiaoxing'an Mountains, the study was conducted to evaluate spatial distribution pattern and spatial association by using point pattern analysis for living and dead trees of Larix gmelini by DBH size class. The number of L. gmelini were counted as 59 living stems/ha (6.42 $m^2$/ha of basal area) and 34 dead stems/ha (2.86 $m^2$/ha of basal area). The distributional curve of diameter class exhibited bimodal shape. The analysis of spatial distribution patterns of all living larch stems noted the clumped distribution on the whole. The size of larch aggregates of dead stems was decreased as diameter class was increased. The distribution of dead stems became gradually randomized with decreased clumped size as the scale increased. Living stems and dead stems of the larch had positive spatial association at most of scales, illustrating that the occurrence of mortality of the larch tree was closely related to the distribution pattern of living larch trees.

• Journal of Photoscience
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• v.5 no.1
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• pp.11-15
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• 1998

The texture change of non-linear optical molecules at the air/water interface was investigated as a function of surface pressure with Brewster angle microscopy. The texture change resulted from the aggregation of dye molecules is important to understand the film uniformity and grain formation process. The 4-Octadecylhydroxy-4'-nitrostilbene (OHNS) generated the small spots of size around 1$\mu$m. The spots exhibit high contrast with other film area and do not show angle dependent reflectivity change. It is interesting to observe that the size of the domain stays the same as the film pressure increases. At high surface pressure, the contrast ratio of domains becomes high, which means dense packing of OHNS. And, the size of domain grows. In the middle of domain, highly contrasted domains are formed. The first and the second order transitions of OHNS observed from surface pressure-area isotherm result from the two types of grains. The N,N-Dihexadecylcyanoaniline (DHCA) formed highly contrasted gains over entire region, and the grains are the double layers. The difference in Langmuir film of OHNS and DHCA at the air/water interface is consistent with the small tilt angle from the surface normal for OHNS and the large tilt angle for DHCA in the Langmuir-Blodgett films.

• Bulletin of the Korean Chemical Society
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• v.33 no.11
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• pp.3749-3754
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• 2012

Nanoporous carbons with a high specific surface area were prepared directly from thermoplastic acrylic resin as carbon precursor and MgO powder as template by carbonization over the temperature range, $500-1000^{\circ}C$. The effect of the carbonization temperature on the pore structure and $CO_2$ adsorption capacity of the obtained porous carbon was examined. The textural properties and morphology of the porous carbon materials were analyzed by $N_2/-196^{\circ}C$ and $CO_2/0^{\circ}C$ adsorption/desorption isotherms, SEM and TEM. The $CO_2$ adsorption capacity of the prepared porous carbon was measured at $25^{\circ}C$ and 1 bar and 30 bar. The specific surface area increased from 237 to $1251m^2/g$, and the total pore volumes increased from 0.242 to $0.763cm^3/g$ with increasing the carbonization temperature. The carbonization temperature acts mainly by generating large narrow micropores and mesopores with an average pore size dependent on the level of carbonization of the MgO-templated nanoporous carbons. The results showed that the MgO-templated nanoporous carbons at $900^{\circ}C$ exhibited the best $CO_2$ adsorption value of 194 mg/g at 1 bar.

• KIEAE Journal
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• v.14 no.5
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• pp.75-80
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• 2014

An attempt has been made to prove the so-called 'feature accumulation theory'. It is the theory describing that people tend to feel the same space with more identifiable objects much larger than that with fewer objects. Applying this theory to our cognition of spatial size, this paper made an experiment. Students were asked that if the lecture room they are sitting becomes a module (module 1), then how large are the questioned spaces in the campus. The result was striking. Through the mental image processing, they answered that the library and the architecture building looks much smaller than they actually are, and more surprisingly the basketball field much more smaller than it really is. This experiment shows that there is a strong tendency by which people regard the space much larger when there are more occupiable or behavior-causing elements in the space. In the case of basketball field, since there is nothing that can be occupied, this open space is seen as a small space for the subjects. This line of cognitive perception can be applied to the practice of urban planning and architectural planning. With the same size of given space, we can make it feel more rich and larger.

• Journal of the Korean Chemical Society
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• v.21 no.1
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• pp.44-52
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• 1977

The effects of specific surface area and pore size of dialysis membrane on the dialysis were studied. It was confirmed that the intermittent sampling method(in which any volume of dialyzing solution is sampled intermittently at every moment after any duration of the dialysis experiment) is suitable for the determination of a dialysis coefficient. It was also confirmed that the diffusion coefficient of a electrolyte through membrane is smaller than the free diffusion coefficient though the pore size of dialysis membrane is extremely large.

• Proceedings of the KIPE Conference
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• 2001.07a
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• pp.520-524
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• 2001

Recently, the demand of large capacity SMPS for industrial area is increasing. Full-bridge dc-dc converter with IGBT is most widely used for large capacity SMPS because IGBT has a low-conduction loss and large current capacity, But most large capacity Full-bridge do-dc converter using IGBT has low operating frequency because of switching loss at IGBT especially at turn-off by current tail and it's cause of relatively big converter size. MOSFET has low switching losses has been widely used for high frequency SMPS but it has a problem to apply to large capacity SMPS because it has large conduction resistance causing large on-time losses. In this paper, for reduction losses at switching device, MOSFET is applied at parallel with IGBT in full-bridge dc/dc converter.

• Land and Housing Review
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• v.1 no.1
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• pp.103-111
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• 2010

The purpose of the paper is to research issues and implications on a large-scale enlargement of urban area in city management plan. This study investigated laws and regulations in force and carried out case study for three cities such as Yangju-si, Gimpo-si, Whaseong-si. As a result of analysis, three points at issue were abstracted and improvement ideas for each of them were suggested as follows. First, to set up adequate size of urban area, it is necessary to consider resonable planning for population, spatial structure, zone of life and land use in city comprehensive plan and city management plan. Second, to decrease arguments about scope and bounds of urban area, it is important to make general and specific guidelines to set up them. Third, to manage new urban area and its surroundings efficiently, it is necessary to subdivide zoning of non-urban area strictly, to restraint individual location of factories or cattle sheds, to make a proper infrastructure plan in advance, to administer strongly the permission of development behavior and to control strictly consecutive and joining development in non-urban area.

• Proceedings of the KIEE Conference
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• 2001.07a
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• pp.443-445
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• 2001

As the new large buildings are continuously being built with the advanced technology and skills, an adequate size of electric room needs to be obtained so that engineers establish an efficient and reliable system in the electric room. Considering the current capacity, its expansion and its connecting system, the final size of it should be determined in order to bring an effective use of the building. Usually the extension of electricity capacity is on the increase after construction and it comes from the lack of scientific evaluation on the electric room. Later when the expansion of computer and important electric equipment that needs much capacity is impossible, it will cause a great deal of damage to the renting business of the building as well as becomes the unstable factors of the whole system. Therefore, it is important to have the exact method of calculating the effective size of electric room, the heart of the building, especially when the value of land price is very high. In addition, it should be calculated in an accurate way due to the diversification of the system and the compact size of the electricity equipment. However, the research on this area and the comparison and evaluation of the size after construction have not been made enough and the results of them have not been applied when calculating a new size of electric room. Accordingly, this study examines three methods prescribed in the standards of electricity installation technology through case analysis and suggests substantial data by system, capacity, and purpose.

• Korean Journal of Materials Research
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• v.20 no.10
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• pp.550-554
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• 2010

This work presents a fabrication procedure to make large-area, size-tunable, periodically different shape metal arrays using nanosphere lithography (NSL) combined with ashing and annealing. A polystyrene (PS, 580 ${\mu}m$) monolayer, which was used as a mask, was obtained with a mixed solution of PS in methanol by multi-step spin coating. The mask morphology was changed by oxygen RIE (Reactive Ion Etching) ashing and temperature processing by microwave heating. The Au or Pt deposition resulted in size tunable nano patterns with different morphologies such as hole and dots. These processes allow outstanding control of the size and morphology of the particles. Various sizes of hole patterns were obtained by reducing the size of the PS sphere through the ashing process, and by increasing the size of the PS sphere through annealing treatment, which resulted in tcontrolling the size of the metallic nanoparticles from 30 nm to 230 nm.