• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.130-135
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• 2023

Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

• 청정기술
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• 제6권1호
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• pp.71-78
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• 2000

본 연구는 광합성 균주인 C. thiosulfatophium을 이용한 황화수소의 생물학적 탈황공정시 광에너지를 저감시키기 위해 광원의 종류와 광조사 유형에 따른 탈황효율을 조사하였다. 광에너지를 저감시키기 위해서는 반응기내 광분산 효율을 극대화시켜야 한다. 광이용효율을 높이기 위해, 세균농도와 생성부산물의 증가에 의한 빛의 산란과 흡수가 세균성장에 미치는 영향에 관한 연구와 미생물이 필요로 하는 파장의 빛을 최대로 공급하기 위해 LED, 백열등, 태양광 등을 이용한 광원의 최적화 연구, 그리고 외부조사형 광반응기의 광투과 효율의 한계를 극복하기 위한 광섬유를 이용한 내부조사형 광반응기에 대한 연구를 수행하였다.

• 인지과학
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• 제16권4호
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• pp.323-331
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• 2005

본 논문은 조명 변화에 강인하며 중립 표정과 같은 표정 측정의 기준이 되는 단서 없이 다양한 내적상태 안에서 얼굴표정을 인식할 수 있는 개선된 시스템을 제안한다. 표정정보를 추출하기 위한 전처리 작업으로, 백색화(whitening) 단계가 적용되었다. 백색화 단계는 영상데이터들의 평균값이 0이며 단위분산 값으로 균일한 분포를 갖도록 하여 조명 변화에 대한 민감도를 줄인다. 백색화 단계 수행 후 제 1 주성분이 제외된 나머지 주성분들로 이루어진 PCA표상을 표정정보로 사용함으로써 중립 표정에 대한 단서 없이 얼굴표정의 특징추출을 가능하게 한다. 본 실험 결과는 또한 83개의 내적상태와 일치되는 다양한 얼굴표정들에서 임의로 선택된 표정영상들을 내적상태의 차원모델에 기반한 얼굴표정 인식을 수행함으로써 다양하고 자연스런 얼굴 표정 인식을 가능하게 하였다.

• Tuberculosis and Respiratory Diseases
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• 제57권1호
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• pp.72-77
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• 2004

연구배경 : 폐암의 말기에 관찰되는 기도 폐쇄는 호흡곤란, 기침, 객혈 및 발열 등을 일으키고 반복적인 호흡기계 감염의 원인이 되기도 한다. 그러나 대부분의 경우 방사선 치료, 항암화학요법 또는 수술적 치료를 받았기 때문에 더 이상 치료를 할 수 없는 어려움이 있다. 따라서 기도 폐쇄를 호전시키기 위한 보조적인 방법으로 광역동 치료가 한 방법임이 알려져 있다. 방 법 : 기도 폐쇄가 관찰되는 폐암 환자에게 기관지 내시경 시행 48시간 전에 광감작물질인 porfimer sodium (Photofrin$^{(R)}$)을 kg당 2mg으로 정맥주사 후 일광화상 및 광과민반응을 방지하기 위해 직사광선을 차단시켰다. Light source는 diode laser를 이용하였고, light dose는 180-200 $joul/cm^2$, 방사하는 빛의 강도는 400 $mW/cm^2$ 으로 하였으며 interstitial irradiation 및 cylindrical diffuser 를 이용하여 630nm의 레이져를 조사하였다. 시행 48시간 후 기관지내시경을 시행하여 괴사된 조직을 제거하고 남아있는 종양 부위에 대해 재조사를 시행하였다. 결 과 : 폐암 수술 후 수술부위의 국소적인 재발을 보인 경우가 1예, 기도 폐쇄로 인한 호흡곤란을 호전시키기 위해 시행한 경우가 4예였다. 광역동 치료를 통해 종양조직의 선택적인 괴사를 관찰할 수 있었고 괴사조직을 제거한 후에는 기도 폐쇄가 4예에서 호전되었다. 광역동 치료 종결 후 호흡곤란 및 활동도가 호전된 경우가 3예에서 관찰되었고 폐쇄성 폐렴으로 인한 객담 및 발열의 소견 및 기관지암에 의한 객혈의 경우에도 광역동 치료 후 호전되었다. 결 론 : 기도 폐쇄가 관찰되는 폐암 환자에서 보존적인 치료 방법으로 기관지내시경을 이용한 광역동 치료는 호흡곤란, 반복적인 호흡기계 감염 및 객혈 등을 호전시키기 위한 효과적인 방법 중의 하나이다.

• Journal of the Optical Society of Korea
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• 제7권4호
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• pp.230-233
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• 2003

This study describes the conceptual design of a soft x-ray microscope system based on a laserbased source for biomedical application with high resolution (${\leq}$50nm). The laboratory scale soft x-ray microscope consists of high power laser plasma x-ray source and grazing incidence mirrors with high reflectivity. The laser plasma source used for developing this system employs Q-switched Nd-YAG pulsed laser. The laser beam is focused on a tantalum (Ta) target. The Wolter type I mirror was used as condenser optics for sample illumination and as objective mirror for focusing on a detector. The fabrication of the Wolter type I mirror was direct internal cutting using ultraprecision DTM. A hydrated biological specimen was put between the two silicon wafers, the center of which was $Si_3N_4$ windows of 100㎚ thickness. The main issues in the future development work are to make a stable, reliable and reproducible x-ray microscope system.

• 치과방사선
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• 제27권2호
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• pp.83-90
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• 1997

This study was performed to demonstrate the effect of linear or nonlinear contrast enhancement on subtraction images. Three different textures were radiograped on dental film. The first radiograph was taken without the presence of an object. the second, which showed trabucular bone, was taken of the molar area of a human. the third radiograph was taken of the coronal part of molars. Each film was digitized into a 1312 x 1024 pixel x 8 bit depth matrix by means of a Nikon 35 mm film scanner(LS-3510AF, Japan) with fixed gain and internal dark current correction to maintain constant illumination. The scanner was interfaced to a Macintosh Le ill computer(Apple Computer, Charlotte, N.C) This resulted in three pairs of images, including different textures-plain, bone and enamel. Digital regular, linearly and nonlinearly enhanced subtraction was performed. Computer software was ,used to simulate lesions in the shape of a 2D-Gaussian curve on each of a pair of images. The each subtraction images were presented in a random sequence to two groups of 10 observers(students and dentists). ROC analysis was used to compare observer performance. The following results were obtained ; 1. All of LCE subtraction, equalized subtraction and regular subtraction images of plain texture were diagnosed the best by far. 2. The data revealed a siginificant LCE effect in both the student group and the expert group. 3. Clinical expertise was a helphul factor for the observers in this study.

• 한국유체기계학회 논문집
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• 제16권5호
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• pp.24-28
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• 2013

Visualization of internal flow of a regenerative blower has been made by injecting a tracer directly into the flow. For the convenience of visualization, working fluid has been replaced by water and marbling color oil has been used as a tracer. Oil droplet has been injected near the inlet of the blower and the streak has been recorded using a high speed camera with the illumination of high power light sources. At first, droplets have irregular motion in the near inlet area and enter into a groove of the impeller. Then the droplets circulate inside the groove while translated by the rotational motion of the impeller. When the droplets get out of the impeller groove, their speed is lower than that of impeller. And the droplets repeatedly enter into the groove and circulate inside the grooves. Then the droplets either flow to the outlet or reenter into the inlet area through stripper. Through this experimental study, internally circulating motion of the flow inside a regenerative blower has been characterized.

• 한국생산제조학회지
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• 제20권4호
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• pp.452-457
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• 2011

The internal temperature of an operating room had to keep within $20^{\circ}C$. However, the doctor who is wearing operating gown and mask caused to rise temperature because of the thermal occurrence of dental LED light source. At first, the surgery environment is getting worse. And then last, it would increase bleeding rate by the expansion of patient's exposured blood vessel. A surgical operator can distribute the patient's tissue through such surgery environment, exactly. It can do accurate surgery. So, it gave to effect that surgical operator's eye condition is getting better and it could keep a mutual assistance system. For this research, we develop the LED dental light source module of high color rendition. It performed simulation for replacing established the method of Halogen lamp and Plazma lamp of light source. We analyzed intensity of illumination and the change of viability by changing the height of light source module.

• 치과방사선
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• 제27권1호
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• pp.17-24
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• 1997

The purpose of the present study was to use digital profile image features and digital image analysis of fixed-dimension bone regions, extracted from standardized periapical radiographs of the maxilla, to determine whether differences exist in alveolar bone of younger women(mean age: 59.23±7.34 years) and just menopaused women(mean age: 59.23±7.34). Periapical films were used from two groups of 20 randomly selected women. None of the subjects had a remarkable medical history. To simplify protocol, we chose one interproximal bone area between the maxillary right canine and lateral incisor for study. Ech film was digitized into a 1312 x 1024 pixel x 8 bit depth matrix by means of a Nikon 35 mm film scanner(LS-35lOAF, Japan) with fixed gain and internal dark current correction to maintain constant illumination. The scanner was interfaced to a Macintosh LC III computer(Apple Computer, Charlotte, N.C.). Area and profile orientation were selected with a NIMH Image 1.37(NIH Research Services Branch, Bethesda, Md.). Histogram features were extracted from each profile and area. The results of this study indicate that mean pixel intensities didn't differ significantly between two groups and there was a high correlarion-coefficient between digitized radiographic profile features and area features.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.1111-1114
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• 2003

In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of argon gas pressure. The RF output was applied in the range of $5{\sim}50W$ at 13.56MHz. The internal plasma voltage of the chamber and the probe current were measured while varying the supply voltage to the Langmuir probe in the range of $-100V{\sim}+100V$. When the pressure of argon gas was increased, electric current was decreased. There was a significant electric current increase from l0W to 30W. Also, when the RF power was increased, electron density was increase. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.