• Title/Summary/Keyword: interface states injected carriers

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Electrical Characteristics of Poly-Si TFT`s with Improved Degradation (열화가 억제된 다결정 실리콘 박막 트랜지스터의 전기적 특성)

  • 변문기;이제혁;백희원;김동진;김영호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.457-460
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    • 1999
  • The effects of electrical positive stress on n-channel LDD and offset structured poly-Si TFT\`s have been systematically investigated in order to analyze the transfer curve\`s shift mechanism. It has been found that the LDD and offset regions behave as a series resistance that reduce the electric field near drain. Hot carrier effects are reduced because of these results. After electrical stress transfer curve’s shift and variation of the off-current are dependent upon the offset length rather than offset region’s doping concentration. Variation of the subthreshold slope is dependent upon offset region’s doping concentration as well as offset length.

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