• 제목/요약/키워드: interface roughness

검색결과 324건 처리시간 0.022초

극한 환경 MEMS용 2" 3C-SiC기판의 직접접합 특성 (Direct Bonding Characteristics of 2" 3C-SiC Wafers for Harsh Environment MEMS Applications)

  • 정귀상
    • 한국전기전자재료학회논문지
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    • 제16권8호
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    • pp.700-704
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    • 2003
  • This paper describes on characteristics of 2" 3C-SiC wafer bonding using PECVD (plasma enhanced chemical vapor deposition) oxide and HF (hydrofluoride acid) for SiCOI (SiC-on-Insulator) structures and MEMS (micro-electro-mechanical system) applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si (001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR (attenuated total reflection Fourier transformed infrared spectroscopy). The root-mean-square suface roughness of the oxidized SiC layers was measured by AFM (atomic force microscope). The strength of the bond was measured by tensile strength meter. The bonded interface was also analyzed by IR camera and SEM (scanning electron microscope), and there are no bubbles or cavities in the bonding interface. The bonding strength initially increases with increasing HF concentration and reaches the maximum value at 2.0 % and then decreases. These results indicate that the 3C-SiC wafer direct bonding technique will offers significant advantages in the harsh MEMS applications.ions.

리블렛 표면에서 유적의 젖음성에 대한 수치 해석 (Wettability Simulation of Oil Droplet on Riblet Surface)

  • 김태완
    • Tribology and Lubricants
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    • 제35권2호
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    • pp.94-98
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    • 2019
  • The riblet structure like shark skin has been widely studied owing to its drag reduction and anti-fouling properties. In this study we simulated the wettability of an oil droplet on a riblet surface. We developed a numerical analysis method using the Wenzel equation and Cassie-Baxter equation that can estimate the contact angle with a penetrated depth of the droplet on rough surfaces. Riblet surfaces with nine scales composed of five hemi-elliptical ribs are generated numerically. The variation of contact angles with fractional depth of penetration for the generated riblet surfaces with and without coatings is demonstrated in the condition of solid-air-oil and solid-water-oil interfaces. The contact angle for the uncoated surface decreases with increasing fractional depth of penetration more drastically than that for the coated surface. For the effect of surface roughness on the contact angle of the droplet, the oleophilic surface gives lower contact angle when the surface is rougher, whereas the oleoophobic surface gives higher contact angle with higher roughness To verify the analysis results, the wetting angle was measured in the solid-air-oil interface and solid-water-oil interface for the shark-skin template and shark-skin replica. The effects of teflon coating were also evaluated. It is shown that the simulation results cover the experimental ones.

Synthesis and characterization of silanized-SiO2/povidone nanocomposite as a gate insulator: The influence of Si semiconductor film type on the interface traps by deconvolution of Si2s

  • Hashemi, Adeleh;Bahari, Ali
    • Current Applied Physics
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    • 제18권12호
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    • pp.1546-1552
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    • 2018
  • The polymer nanocomposite as a gate dielectric film was prepared via sol-gel method. The formation of crosslinked structure among nanofillers and polymer matrix was proved by Fourier transform infrared spectroscopy (FT-IR). Differential thermal analysis (DTA) results showed significant increase in the thermal stability of the nanocomposite with respect to that of pure polymer. The nanocomposite films deposited on the p- and n-type Si substrates formed very smooth surface with rms roughness of 0.045 and 0.058 nm respectively. Deconvoluted $Si_{2s}$ spectra revealed the domination of the Si-OH hydrogen bonds and Si-O-Si covalence bonds in the structure of the nanocomposite film deposited on the p- and n-type Si semiconductor layers respectively. The fabricated n-channel field-effect-transistor (FET) showed the low threshold voltage and leakage currents because of the stronger connection between the nanocomposite and n-type Si substrate. Whereas, dominated hydroxyl groups in the nanocomposite dielectric film deposited on the p-type Si substrate increased trap states in the interface, led to the drop of FET operation.

Effectiveness of bond strength between normal concrete as substrate and latex-modified sand concrete reinforced with sisal fibers as a repair material

  • Oday Z. Jaradat;Karima Gadri;Bassam A. Tayeh;Ahmed M. Maglad;Abdelhamid Guettala
    • Advances in concrete construction
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    • 제15권6호
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    • pp.431-444
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    • 2023
  • This study investigated the use of latex-modified sand concrete reinforced with sisal fibers (LMSC) as a repair material. Notably, no prior research has explored the application of LMSC for this purpose. This paper examines the interface bond strength and the type of failure between LMSC as a repair material and the normal concrete (NC) substrate utilising four different surfaces: without surface preparation as a reference (SR), hand hammer (HA), sandblasted (SB), and grooved (GR). The bond strength was measured by bi-surface shear, splitting tensile, and pull-off strength tests at 7, 28, and 90 days. Scanning electron microscopy analysis was also performed to study the microstructure of the interface between the normal concrete substrate and the latex-modified sand concrete reinforced with sisal fibers. The results of this study indicate that LMSC has bonding strength with NC, especially for HR and SB surfaces with high roughness. Therefore, substrate NC surface roughness is essential in increasing the bonding strength and adhesion. Eventually, The LMSC has the potential to repair and rehabilitate concrete structures.

Surface Preparation and Activation Only by Abrasion and Its Effect on Adhesion Strength

  • Ali Gursel;Salih Yildiz
    • 접착 및 계면
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    • 제23권4호
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    • pp.101-107
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    • 2022
  • Adhesive joints have many advantages such as weight savings, corrosion and fatigue resistance and now developed even withstand of high impact and dynamic loads. However, an adhesion has cumbersome and complicated surface preparation processes. The surface preparation step is critical in adhesive joint manufacturing in order to obtain the prescribed strength for adhesive joints. In this study, it was attempted to simplify and reduce the number of surface preparation steps, and abrasion and rapid adhesive application (ARAA) process is developed for an alternative solution. The abrasion processes are performed only for creating surface roughness in standard procedures (SP), although the abrasion processes cause surface activation itself. The results showed that there is no need the long procedures in laboratory or chemical agents for adhesion. After the abrasion process, the attracted and highly reactive fresh surface layer obtained, and its effect on bonding success is observed and analyzed in this research, in light of the essential physic and adhesion theories. Al 6061 aluminum adherends and epoxy-based adhesives were chosen for bonding processes, which is mostly used in light vehicle parts. The adherends were cleaned, treated and activated only with abrasion, and after the adhesive application the specimens were tested under quasi-static loading. The satisfied ARAA results were compared with that of the specimens fabricated by the standard procedure (SP) of adhesion processes of high impact loads.

전부도재관용 지르코니아의 표면처리에 따른 표면특성 및 계면특성 관찰 (Interface and Surface Properties by Surface Treatment of Zirconia for All Ceramic Crown)

  • 김치영;정인성;최성민
    • 대한치과기공학회지
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    • 제35권2호
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    • pp.137-142
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    • 2013
  • Purpose: This study was to observe the surface and interfacial characteristic of Zirconia by surface treatment. And it was observed the roughness and contact angle according to processing, and the interfacial properties by surface treatment on zirconia. Methods: The oxide formation and ion diffusion between core and veneer ceramic were determined by the X-ray Dot Mapping of EPMA(Electron probe micro analyzer). The roughness was measured by 3D Digital microscope and the contact angle according to processing of zirconia was observed using distilled water on the surface. Results: The surface roughness of the specimens Z04, Z12, Z15 was measured $0.67({\pm}0.03){\mu}m$, $0.50({\pm}0.12){\mu}m$, $0.35({\pm}0.09){\mu}m$, respectively. As results of contact angle test, Z04, Z12, Z15 of specimen group without binder treatment was measured $46.79({\pm}3.17)^{\circ}$, $57.47({\pm}4.83)^{\circ}$, $56.19({\pm}2.66)^{\circ}$, respectively. but, L04, L12, L15 of specimen group without binder treatment was measured $63.84({\pm}2.20)^{\circ}$, $66.08({\pm}0.16)^{\circ}$, $65.10({\pm}1.01)^{\circ}$, respectively. Average contact angle of L15 was measured $65.10({\pm}1.01)^{\circ}$. In X-ray Dot Mapping results, thickness of binder including Al element was measured that each of L04, L12, L15 were $20{\mu}m$, $15{\mu}m$, $10{\mu}m$. Conclusion: The more rough surface increases the wettability, but the sintered exclusive binder decreases the wettability.

저수축제 및 이형제가 벌크몰드컴파운드의 표면형태 및 물성에 미치는 영향 (Effect of the Low Profile Agent and Release Agent on the Surface Morphology and Property of Bulk Mold Compound)

  • 김성룡;권기준
    • 접착 및 계면
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    • 제12권4호
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    • pp.144-150
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    • 2011
  • 폴리스티렌을 저수축제로 사용하고 Zn-stearate를 이형제로 사용하여 함량변화에 따라 벌크 몰드컴파운드의 표면형태 및 기계적 물성에 미치는 영향을 고찰하였다. XPS, 접촉각 측정기 등을 이용하여 표면과 깊이 방향에 대한 원소함량과 접촉각을 측정하였고, 표면형태는 FESEM을 이용하여 관찰하였으며, 표면조도 측정은 AFM을 이용하였다. 저수축제를 첨가하지 않은 경우에 비교하여 저수축제를 9.0 wt% 첨가하였을 경우에는 체적수축률은 0.35%에서 0.05%로 감소하였으며, 표면조도는 $0.27{\mu}m$에서 $0.12{\mu}m$로 감소하였다. 이형제의 함량을 1.8 wt%에서 3.6 wt%로 증가시켰을 경우에는 이형제가 주로 표면에 존재하고 표면조도를 증가시키는 것을 확인하였다. 저수축제의 함량을 5.0 wt%에서 9.0 wt%로 증가시킴에 따라 굴곡탄성율과 충격강도가 약 30% 감소하였다.

폴리아릴레이트 섬유의 표면처리에 의한 폴리에틸렌 나프탈레이트 수지와의 계면접착특성 (Interfacial Adhesion Properties of Surface Treated Polyarylate Fiber with Polyethylene Naphthalate)

  • 용다경;최한나;양지우;이승구
    • 접착 및 계면
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    • 제13권1호
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    • pp.24-30
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    • 2012
  • 폴리아릴레이트(polyarylate, PAR) 섬유의 산 처리와 자외선 조사 처리에 의한 섬유표면의 미세구조 변화를 SEM과 AFM을 통하여 살펴보고 RMS roughness로 분석하였으며, 접촉각 측정을 하였다. 또한, PAR 섬유의 표면개질이 폴리에틸렌 나프탈레이트(polyethylene naphthalate, PEN) 수지와의 계면접착력에 어떠한 영향을 미치는지를 섬유 풀-아웃 시험(Fiber Pull-out)을 통해 분석하였다. 산처리 농도와 자외선 조사 처리 시간이 증가함에 따라 PAR 섬유의 표면에 에칭이나 크랙이 발생하면서 표면의 거칠기가 증가하는 양상을 보였으며, 물에 대한 접촉각은 감소하는 결과를 보였다. PEN 수지와의 계면접착력을 분석한 결과, 산 처리 농도의 증가와 자외선 조사처리 시간이 경과에 따라 증가하였고 특히, 산 처리 농도 pH 3, 자외선 조사 처리시간이 24 h일 때 최대 계면접착력을 보였다. 이는 섬유표면조도의 증가에 따른 섬유 표면적의 증가로, 계면에서 상호작용할 수 있는 면적이 증가하기 때문이라고 볼 수 있다.

Effect of the Friction Characteristics of Sliding Contacts on Electrical Signal Transmission

  • Jang, Ho;Park, Hyung Kyu
    • KSTLE International Journal
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    • 제2권1호
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    • pp.22-28
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    • 2001
  • A resin bonded copper-graphite brush was investigated to evaluate the characteristics electrical signal transmission through a sliding contact as a function of the relative amount of graphite and copper in the brush. Particular attention was given to the correlation between electrical signal fluctuation and tribological properties in an electrical sliding contact system. A ring-on-block type tribotester was used for this experiment and the ring was made from pure copper. Results showed that a copper-graphite brush at a particular composition range exhibited the most stable frictional behavior with a minimum voltage drop. The amount of voltage drop at the friction interface was affected by the surface roughness, transfer film formation at the friction interface, and the real area of contact. Microscopic observations and the surface analysis showed a good agreement with the results from this experiment. The results also indicated that the electrical signal flunctuation was directly associated with the oscillation of the coefficient of friction during sliding by nanoscale variation of contacts at the friction interface.

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The Substrate Effects on Kinetics and Mechanism of Solid-Phase Crystallization of Amorphous Silicon Thin Films

  • Song, Yoon-Ho;Kang, Seung-Youl;Cho, Kyoung-Ik;Yoo, Hyung-Joun
    • ETRI Journal
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    • 제19권1호
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    • pp.26-35
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    • 1997
  • The substrate effects on solid-phase crystallization of amorphous silicon (a-Si) films deposited by low-pressure chemical vapor deposition (LPCVD) using $Si_2H_6$ gas have been extensively investigated. The a-Si films were prepared on various substrates, such as thermally oxidized Si wafer ($SiO_2$/Si), quartz and LPCVD-oxide, and annealed at 600$^{\circ}C$ in an $N_2$ ambient for crystallization. The crystallization behavior was found to be strongly dependent on the substrate even though all the silicon films were deposited in amorphous phase. It was first observed that crystallization in a-Si films deposited on the $SiO_2$/Si starts from the interface between the a-Si and the substrate, so called interface-interface-induced crystallization, while random nucleation process dominates on the other substrates. The different kinetics and mechanism of solid-phase crystallization is attributed to the structural disorderness of a-Si films, which is strongly affected by the surface roughness of the substrates.

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