• Journal of the Microelectronics and Packaging Society
• /
• v.28 no.1
• /
• pp.39-46
• /
• 2021

The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

• Korean Journal of Optics and Photonics
• /
• v.18 no.6
• /
• pp.452-460
• /
• 2007

Ultra-low loss ZERODUR and fused silica mirrors were manufactured and their light scattering characteristics were investigated. For this purpose, ZERODUR and fused silica substrates were super-polished by the bowl feed method. The surface roughness were 0.292 ${\AA}$ and 0.326 ${\AA}$ in rms for ZERODUR and fused silica, respectively. To obtain the high reflectivity, 22 thin film layers of $SiO_2$ and $Ta_2O_5$ were deposited by Ion Beam Sputtering. The measured light scattering of ZERODUR and fused silica mirror were 30.9 ppm and 4.6 ppm, respectively. This shows that the substrate surface roughness is not the only parameter which determines the light scattering of the mirror. In order to investigate the mechanism for additional light scattering of the ZERODUR mirror, the surface roughness of the mirror was measured by AFM and was found to be 2.3 times higher than that of the fused silica mirror. It is believed that there is some mismatch at the interface between the substrate and the first thin film layer which leads to the increased mirror surface roughness. To clarify this, the contact angle measurements were performed by SEO 300A, based on the Giriflaco-Good-Fowkes-Young method. The fused silica substrates with 0.46 ${\AA}$ in its physical surface roughness shows lower contact angle than that of the ZERODUR substrate with 0.31 ${\AA}$. This indicates that the thin film surface roughness is determined by not only its surface roughness but also the surface energy of the substrate, which depends on the chemical composition or crystalline orientation of the materials. The surface energy of each substrate was calculated from a contact angle measurement, and it shows that the higher the surface energy of the substrate, the better the surface roughness of the thin film.

• Advances in concrete construction
• /
• v.2 no.1
• /
• pp.13-27
• /
• 2014

The principal objective of this study is to deepen the characterization studies already led on sand concretes in previous works. Indeed, it consists in studying the effect of the sand type on the main properties of sand concrete: fracture and mechanical properties. We particularly insist on the determination of the fracture characteristics of this material which apparently have not been studied. To carry out this study, four different types of sand have been used: dune sand (DS), river sand (RS), crushed sand (CS) and river-dune sand (RDS). These sands differ in mineralogical nature, grain shape, angularity, particle size, proportion of fine elements, etc. The obtained results show that the particle size distribution of sand has marked its influence in all the studied properties of sand concrete since the sand having the highest diameter and the best particle size distribution has given the best fracture and mechanical properties. The grain shape, the angularity and the nature of sand have also marked their influence: thanks to its angularity and its limestone nature, crushed sand yielded good results compared to river and dune sands which are characterized by rounded shape and siliceous nature. Finally, it should further be noted that the sand concrete presents values of fracture and mechanical properties slightly lower than those of ordinary concrete. Compared to mortar, although the mechanical strength is lower, the fracture parameters are almost comparable. In all cases, the sand grains are debonded from the paste cement during the fracture which means that the crack goes through the paste-aggregate interface.

• Journal of the Korean Ceramic Society
• /
• v.50 no.1
• /
• pp.50-56
• /
• 2013

Phosphorescent materials coated with titanium dioxide were fabricated and photocatalytic reactions between these materials and VOCs gases were examined. A thin film (approx. 100 nm) of nanosized $TiO_2$ was deposited on the $Sr_4Al_{14}O_{25}$ : $Eu^{2+}$, $Dy^{3+}$, $Ag^+$ phosphor using low-pressure chemical vapor deposition (LPCVD). The characteristics of the photocatalytic reaction were examined in terms of the decomposition of benzene gas using a gas chromatography (GC) system under ultraviolet (${\lambda}$ = 365 nm) and visible light (${\lambda}$ > 420 nm) irradiation. $TiO_2$-coated $Sr_4Al_{14}O_{25}$ : $Eu^{2+}$, $Dy^{3+}$, $Ag^+$ phosphor showed different photocatalytic behavior compared with pure $TiO_2$. $TiO_2$-coated phosphorescent materials showed a much faster photocatalytic decomposition of benzene gas under visible irradiation compared to the pure $TiO_2$ for which the result was practically negligible. This suggests that the extension of the absorption wavelength to visible light occurred through energy band bending by a heterojunction at the interface of the $Sr_4Al_{14}O_{25}-TiO_2$ composite. Also, the $Sr_4Al_{14}O_{25}-TiO_2$ composite showed the photocatalytic decomposition of benzene in darkness due to the photon light emitted from the $Sr_4Al_{14}O_{25}$ phosphors.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.389-390
• /
• 2012

In this study, we fabricate a superhydrophobic surface made of hierarchical nanostructures that combine wax crystalline structure with moth-eye structure using vacuum cluster system and measure their hydrophobicity and durability. Since the lotus effect was found, much work has been done on studying self-cleaning surface for decades. The surface of lotus leaf consists of multi-level layers of micro scale papillose epidermal cells and epicuticular wax crystalloids [1]. This hierarchical structure has superhydrophobic property because the sufficiently rough surface allows air pockets to form easily below the liquid, the so-called Cassie state, so that the relatively small area of water/solid interface makes the energetic cost associated with corresponding water/air interfaces smaller than the energy gained [2]. Various nanostructures have been reported for fabricating the self-cleaning surface but in general, they have the problem of low durability. More than two nanostructures on a surface can be integrated together to increase hydrophobicity and durability of the surface as in the lotus leaf [3,5]. As one of the bio-inspired nanostructures, we introduce a hierarchical nanostructure fabricated with a high vacuum cluster system. A hierarchical nanostructure is a combination of moth-eye structure with an average pitch of 300 nm and height of 700 nm, and the wax crystalline structure with an average width and height of 200 nm. The moth-eye structure is fabricated with deep reactive ion etching (DRIE) process. $SiO_2$ layer is initially deposited on a glass substrate using PECVD in the cluster system. Then, Au seed layer is deposited for a few second using DC sputtering process to provide stochastic mask for etching the underlying $SiO_2$ layer with ICP-RIE so that moth-eye structure can be fabricated. Additionally, n-hexatriacontane paraffin wax ($C_{36}H_{74}$) is deposited on the moth-eye structure in a thermal evaporator and self-recrystallized at $40^{\circ}C$ for 4h [4]. All of steps are conducted utilizing vacuum cluster system to minimize the contamination. The water contact angles are measured by tensiometer. The morphology of the surface is characterized using SEM and AFM and the reflectance is measured by spectrophotometer.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.9 no.1
• /
• pp.89-93
• /
• 1999

The properties and effects of the electrodeposited CdTe compound film on the porous silicon. To find ways to achieve good mechanical contact on the nanostructure porous silicon layer while keeping the interface transparent, we tried to electrodeposit a CdTe compound film on the porous silicon surface. The CdTe compound film was fabricated with -2.3V vs. Ag/AgCl potential difference in the electrolyte solution containing 1M of $CdSO_4$and 1 mM of $TeO_4$. X-ray diffraction results confirmed the existence of CdTe compound film on the porous silicon surface. Auger depth profile showed that Cd and Te were uniformly distributed up to a 80 nm distance from the surface. The photoluminescence of the sample with a CdTe compound film was weaker in intensity than that without the film and the maximum wavelength was shifted to the higher energy. These results indicate that the contacting CdTe compound film was infiltrated to the nanostructure of porous silicon.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.26 no.1
• /
• pp.1-7
• /
• 2016

RE : YAG ($RE=Nd^{3+}$, $Er^{3+}$) single crystals are laser diodes and generally grown by Czochralski method with controlling the various growth parameter. Since the defects occurred by temperature gradient or the rotation speed of solid-liquid growth interface act as the decline of crystal optical property during the growth procedure, crystalline quality improvement via defects analysis is necessary. The etch pit density (EPD) analysis was used to confirm the surface defect of grown RE : YAG single crystal and to select the area of transmission electron microscopy (TEM) analysis. Defects in the specimen produced by tripod polishing method such as buckling, rod shaped, bend contours by internal stress, segregation and others were observed by using 200 kV TEM and 300 kV FE-TEM.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.40 no.9
• /
• pp.1808-1818
• /
• 2015

Recently, the wind power has experienced great attentions and growths among many renewable energy sources. To increase the power generation performance and economic feasibility, the size of wind turbine (WT) is getting bigger and most of wind power plants are being constructed on offshore. Therefore, the maintenance cost is relatively high because boats or helicopters are needed operators to reach the WT. In order to combat this kind of problem, remote monitoring and control system for the WT is needed. In this paper, the small-scale WT monitoring and control system is implemented using wireless sensor network technologies. To do this, sensor devices are installed to measure and send the WT status and control device is installed to receive control message for specific operation. The WT is managed by control center through graphic user interface (GUI) based monitoring and control software. Also, smart device based web-program is implemented to make the remote monitoring of the WT possible even though operators are not in control room.

• Journal of Digital Convergence
• /
• v.16 no.8
• /
• pp.263-267
• /
• 2018

In this study, it is aimed to solve the problems of energy depletion, environmental pollution, climate change and traffic congestion in the coming generations. In Korea, the usage of public bicycle, which is a short-distance transportation system, is continuously increasing. Therefore, we analyzed the public bicycles of 'Taungryei' in Seoul and 'Nubiza' in Changwon City. We also conducted in-depth interviews with Stephen Anderson based on six principles of Creating Pleasurable Interfaces. As a result, users' discomfort was found in the functional part and the usability part of the public bicycle. Also, it was confirmed that the users were satisfied with the public bicycle in the meaningful part. Therefore, public bicycles should consider the user experience aspects to complement functional and usability parts for users.

• Applied Chemistry for Engineering
• /
• v.10 no.5
• /
• pp.789-795
• /
• 1999

In this study, carbon fiber reinforced cement composites(CFRCs) reinforced with short noncircular type carbon fibers were fabricated and properties(drying shrinkage, resistance to freezing and thawing, and fracture toughness) were compared with those of the CFRCs reinforced with circular type carbon fibers. It was found that these properties greatly depended on the shape and length of carbon fibers. The drying shrinkage of CFRCs reinforced with C-type carbon fiber was superior to other CFRCs. This effect was increased with a high aspect ratio of fiber. The resistance to freezing and thawing was increased with the fiber length and fiber volume percent, but there was on remarkable effect to fiber shape. Fracture toughness and resistance to crack propagation of CFRCs reinforced with C-CFs were improved compared with other CFRCs. It was believed that the more absorption of fracture energy into the larger interface caused an increase in fracture toughness and resistance to crack propagation.