• Smart Structures and Systems
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• 제5권6호
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• pp.633-644
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• 2009

A simple method has been developed to detect the bonding condition of active fiber composites (AFC) adhered to the surface of a host structure. Large deformation actuating capability is one of important features of AFC. Edge delamination in adhesive layer due to large interfacial shear stress at the free edge is typically resulted from axial strain mismatch between bonded materials. AFC patch possesses very good flexibility and toughness. When an AFC patch is partially delaminated from host structure, there remains sensing capability in the debonded part. The debonding size can be determined through axial resonance measured by the interdigitated electrodes symmetrically aligned on opposite surfaces of the patch. The electrical impedance and modal response of the AFC patch in part adhered to an aluminum plate were investigated in a broad frequency range. Debonding ratio of the AFC patch is in inverse proportion to the resonant frequency of the fundamental mode. Feasibility of in-situ detecting the progressive delamination between AFC patch and host plate is demonstrated.

• 센서학회지
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• 제32권5호
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• pp.280-284
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• 2023

In this study, a prototype micro-scale photomask and microfluidic channel mold were fabricated using the thermal shrinkage of the polymer. A polystyrene (PS) sheet was used as the heat-shrink polymer, and the patterns of the photomask and microchannel are interdigitated electrodes. Patterns were formed on the PS sheets using a commercial laser printer. The contraction ratio of the PS sheet was approximately 60% at a temperature of 150 ℃, and the transmittance was reduced by approximately 0% at a wavelength of 365 nm. The microfluidic channel had a round shape. The proposed technique is simple, facile, and inexpensive for fabricating a micro-scale photomask and microfluidic channel mold and does not involve the use of any harmful materials. Thus, this technique is well-suited for fabricating diverse micro-scale patterns and channels for prototype devices, including sensors.

• 한국정보전자통신기술학회논문지
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• 제12권4호
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• pp.366-372
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• 2019

본 논문에서는 불소가 함유된 상용 폴리이미드를 사용하여 빗살형 전극을 갖는 정전용량형 습도센서를 제작하고 특성 측정 및 분석을 수행하였다. 먼저 상용 폴리이미드의 성분 분석을 위해 실리콘 웨이퍼 상에 패턴닝을 하고 열처리 공정을 수행한 후 EDS 분석을 수행하였다. 분석 결과 탄소(C) 62.48 Wt%, 산소(O) 9.38 Wt% 그리고 불소(F) 성분이 평균 8.44 Wt% 포함되어있는 것을 알 수 있었다. IDT구조에 대한 설계값을 토대로 제작된 습도센서의 면적은 $1.56{\times}1.66mm^2$이며, 전극의 넓이와 전극간 폭은 동일하게 각각 $3{\mu}m$, 센서의 감도를 높이기 위해 전극 수를 166개, 길이를 1.294mm로 제작하였다. 제작된 센서에 대한 기본특성 측정 결과 감도는 24 fF/%RH, 선형 특성 < ${\pm}2.5%RH$ 그리고 히스테리시스는 < ${\pm}4%RH$로 나타났으며, 주파수 특성은 10kHz, 20kHz, 50kHz, 100kHz에서 습도변화에 따른 용량값 변화를 측정한 결과 주파수가 증가할수록 동일 습도에서 용량값은 작아지는 것을 확인할 수 있었으며 10kHz와 100kHz의 습도변화에 따른 용량값 편차는 평균 0.3pF으로 측정되었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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• pp.51.3-51.3
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• 2010

Due to the recent public awareness of global warming and sustainable economic growth, there has been a growing interest in alternative clean energy sources. Hydrogen is considered as a clean fuel for the next generation. One of the technical challenges related to the use of hydrogen is safe monitoring of the hydrogen leak during separation, purification and transportation. For detecting various gases, chemiresistor-type gas sensors have been widely studied and used due to their well-established detection scheme and low cost. However, it is known that many of them have the limited sensitivity and slow response time, when used at low temperature conditions. In our work, a sensor based on Schottky barriers at the electrode/sensing material interface showed promising results that can be utilized for developing fast and highly sensitive gas sensors. Our hydrogen sensor was designed and fabricated based on indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanoparticles with platinum (Pt) nanoclusters in combination with interdigitated electrodes. The sensor showed the sensitivity as high as $10^7%$ (Rair/Rgas) and the detection limit as low as 30 ppm. The sensor characteristics could be obtained via optimized materials synthesis route and sensor electrode design. Not only the contribution of electrical resistance from the film itself but also the interfacial effect was identified as an important factor that contribute significantly to the overall sensor characteristics. This promises the applicability of the developed sensor for monitoring hydrogen leak at room temperature.

• 센서학회지
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• 제23권5호
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• pp.291-294
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• 2014

In this study, a chemiresistive sensor based on one-dimensional $WO_3$ nanostructures is presented for application in non-invasive medical diagnostics. $WO_3$ nanostructures were used as an active gas sensing layer and were deposited onto a $SiO_2/Si$substrate using Pt interdigitated electrodes (IDEs). The IDE spacing was $5{\mu}m$ and deposition was performed using RF sputter with glancing angle deposition mode. Pt IDEs fabricated by photolithography and dry etching. In comparison with thin film sensor, sensing performance of nanostructure sensor showed an enhanced response of more than 20 times when exposed to 50 ppm acetone at $400^{\circ}C$. Such a remarkable faster response can pave the way for a new generation of exhaled breath analyzers based on chemiresistive sensors which are less expensive, more reliable, and less complicated to be manufactured. Moreover, presented sensor technology has the potential of being used as a personalized medical diagnostics tool in the near future.

• 한국세라믹학회지
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• 제43권12호
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• pp.798-804
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• 2006

Co-planar type single chamber solid oxide fuel cell with patterned electrode on a surface of electrolyte has been fabricated by robo-dispensing method and microfluidic lithography. The cells were composed of NiO-GDC-Pd or NiO-SDC cermet anode, $(La_{0.7}Sr_{0.3})_{0.95}MnO_3$ cathode, and yttria stablized zirconia electrolyte. The cell performance at $900^{\circ}C$ was investigated as a function of electrode geometries, such as anode-to-cathode distance, numbers of electrode pairs. Relationship between OCV and I-V characteristics at the optimized operation condition was also studied by DC source meter under the mixed gas condition of methane, air, and nitrogen. An increase of anode-facing-cathode area leads to lower OCV due to intermixing between product gases of anode and cathode, which in turn decreases the oxygen partial pressure difference.

• 한국재료학회지
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• 제32권6호
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• pp.307-312
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• 2022

Metal halide perovskite (MHP) nanocrystals (NCs) have emerged as promising materials for various optoelectronic applications including photovoltaics, light-emitting devices, and photodetectors because of their high absorption coefficient, high diffusion length, and photoluminescence quantum yield. However, understanding the morphological evolution of the MHP NCs as well as their controlled assembly into optoelectronic devices is still challenging and will require further investigation of the colloidal chemistry. In this study, we found that the amount of n-octylamine (the capping agent) plays a crucial role in inducing further growth of the MHP NCs into one-dimensional nanowires during the aging process. In addition, we demonstrate that the dielectrophoresis process can permit self-alignment of the MHP nanowires with uniform distribution and orientation on interdigitated electrodes. A strong light-matter interaction in the MHP NWs array was observed under UV illumination, indicating the photo-induced activation of their luminescence and electrical current in the self-aligned MHP nanowire arrays.

• 한국기계가공학회지
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• 제21권4호
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• pp.107-113
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• 2022

At present, it is possible to manufacture electrodes down to several micrometers (~ ㎛) using inkjet printing technology owing to the development of precision ejection heads. Inkjet printing technology is also used in the manufacturing of bio-sensors, electronic sensors, and flexible displays. To reduce the difference between the electrode design/simulation performance and actual printing pattern performance, it is necessary to analyze and optimize the processable area of the ink material, which is a fluid. In this study, process optimization was conducted to manufacture an IDE pattern and fabricate an impedance sensor. A total of 25 IDE patterns were produced, with five for each lamination process. Electrode line width and height changes were measured by stacking the designed IDE pattern with a nanoparticle-based conductive ink multilayer. Furthermore, the optimal process area for securing a performance close to the design result was analyzed through impedance and capacitance. It was observed that the increase in the height of stack layer 4 was the lowest at 4.106%, and the increase in capacitance was measured to be the highest at 44.08%. The proposed stacking process pattern, which is optimized in terms of uniformity, reproducibility, and performance, can be efficiently applied to bio-applications such as biomaterial sensing with an impedance sensor.

• 센서학회지
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• 제20권5호
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• pp.357-362
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• 2011

This paper demonstrates a novel electrodynamic technique to remove particles from the wall of microchannels. Dielectrohporesis(DEP) is generated by applying alternating electric potentials to the interdigitated electrodes integrated at the bottom of the micro-channel. The proposed technique is applied to a general microfluidic channel as a feasibility test. To examine the wall loss reduction efficiency, 10 ${\mu}m$ diameter Polystyrene latexes(PSL) were supplied to the inlet of the device. Then, the concentration of collected particles through devices was measured. In the experiment for 10 ${\mu}m$ diameter PSL particles, the concentration of the injected particles was $174.25{\times}10^4$ particles/ml. However, the concentration of collected particles at the outlet was $52.25{\times}10^4$ particles/ml. Only 30 % of particles had arrived at the outlet and 70 % of particles had adhered to the wall of the microfluidic channel. By applying alternating electric potentials from 0 to 20 $V_{pp}$ at 3 MHz, the concentration of injected particles was 135.00${\times}10^4$ particles/ml, the concentration of collected particles was increased as $105.25{\times}10^4$ particles/ml at 20 $V_{pp}$ at the outlet. When the electric potential was 20 $V_{pp}$, the particle loss was decreased by 39 % (initial loss: 70 %, loss at 20 Vpp: 31 %) with 10 ${\mu}m$ particle. The particle loss was decreased along to the incensement of electric potentials and the enlargement of the diameter of particles. According to these measured results, it was confirmed that the proposal of using DEP technique could be a good candidate for particle loss reduction in micro-particle processing chip application. Moreover, it is expected that the proposed technique could enhance performance of microfluidic and biochip devices.

• 센서학회지
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• 제23권1호
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• pp.15-18
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• 2014

We present gas sensing performance based on $2{\times}2$ sensor array with four different elements ($TiO_2$, $SnO_2$, $WO_3$ and $In_2O_3$ thin films) fabricated by rf sputter. Each thin film was deposited onto the selected $SiO_2$/Si substrate with Pt interdigitated electrodes (IDEs) of $5{\mu}m$ spacing which were fabricated on a $SiO_2$/Si substrate using photolithography and dry etching. For 5 ppm $NO_2$ and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, $2{\times}2$ sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.