• Tribology and Lubricants
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• v.35 no.5
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• Journal of Positioning, Navigation, and Timing
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• v.12 no.1
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• pp.23-35
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• 2023

Korea Augmentation Satellite System (KASS) is a satellite-based augmentation system (SBAS) that provides approach procedure with vertical guidance-I (APV-I) level corrections and integrity information to Korea territory. KASS is used to monitor navigation performance in real-time, and this paper introduces the design, implementation, and verification process of mission monitoring (MIMO) in KASS. MIMO was developed in compliance with the Minimum Operational Performance Standards of the Radio Technical Commission for Aeronautics for Global Positioning System (GPS)/SBAS airborne equipment. In this study, the MIMO system was verified by comparing and analyzing the outputs of reference tools. Additionally, the definition and derivation method of accuracy, integrity, continuity, and availability subject to MIMO were examined. The internal and external interfaces and functions were then designed and implemented. The GPS data pre-processing was minimized during the implementation to evaluate the navigation performance experienced by general users. Subsequently, tests and verification methods were used to compare the obtained results based on reference tools. The test was performed using the KASS dataset, which included GPS and SBAS observations. The decoding performance of the developed MIMO was identical to that of the reference tools. Additionally, the navigation performance was verified by confirming the similarity in trends. As MIMO is a component of KASS used for real-time monitoring of the navigation performance of SBAS, the KASS operator can identify whether an abnormality exists in the navigation performance in real-time. Moreover, the preliminary identification of the abnormal point during the post-processing of data can improve operational efficiency.

• Physical Therapy Korea
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• v.26 no.3
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• pp.57-66
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• 2019

Background: Visual and somatosensory integration processing is needed to reduce pusher behavior (PB) and improve postural control in hemiplegic patients with acute stroke. Objects: This study aimed to investigate the effects of game-based postural vertical training (GPVT) on PB, postural control, and activity daily living (ADL) in acute stroke patients. Methods: Fourteen participants with acute stroke (<2 months post-stroke) who had PB according to the Burke lateropulsion scale (BLS) (score>2) were randomly divided into the GPVT group ($n_1=7$) and conventional postural vertical training (CPVT) group ($n_2=7$). The GPVT group performed game-based postural vertical training using a whole-body tilt apparatus. while the CPVT group performed conventional postural vertical training to reduce PB (30 minutes/session, 2 times/day, 5 days/week for 3 consecutive weeks). The BLS was evaluated to assess the severity of PB. And each subject's postural control ability and ADL level were assessed using the postural assessment scale for stroke (PASS), balance posture ratio (BPR), and Korean-modified Barthel index (K-MBI). Outcomes were measured pre- and post-intervention. Results: Comparison of the pre- and post-intervention assessment results showed that both interventions led to the following significant changes: decreased severity of PB scores and increased PASS, BPR, and K-MBI scores (p<.05). In particular, statistical analysis between the two groups, the BLS score was significantly decreased in the GPVT group (p<.05). And PASS, BPR, and K-MBI scores were significantly improved in the GPVT group than in the CPVT group (p<.01, respectively). Conclusion: This study demonstrated that GPVT lessened PB severity and improved postural control ability and ADL levels in acute stroke patients.

• Journal of KIISE:Databases
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• v.31 no.6
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• pp.650-663
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• 2004

In molecular biology, DNA sequence searching is one of the most crucial operations. Since DNA databases contain a huge volume of sequences, a fast indexing mechanism is essential for efficient processing of DNA sequence searches. In this paper, we first identify the problems of the suffix tree in aspects of the storage overhead, search performance, and integration with DBMSs. Then, we propose a new index structure that solves those problems. The proposed index consists of two parts: the primary part represents the trie as bit strings without any pointers, and the secondary part helps fast accesses of the leaf nodes of the trio that need to be accessed for post processing. We also suggest an efficient algorithm based on that index for DNA sequence searching. To verify the superiority of the proposed approach, we conducted a performance evaluation via a series of experiments. The results revealed that the proposed approach, which requires smaller storage space, achieves 13 to 29 times performance improvement over the suffix tree.

• Journal of Korean Home Economics Education Association
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• v.26 no.1
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• pp.1-16
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• 2014

The purpose of this research is to develop a theme-based integrated teaching/learning plan in clothing, food, and housing in home economics and to apply the developed process in classes for evaluation in order to identify the suitability in schools. The theme-based integrated teaching/learning plan developed on the basis of textbooks consist four sub-themes; choosing($1^{st}$ and $2^{nd)$ lessons), using($3^{rd}$ lesson), processing ($4^{th}$ lesson), and alternatives($5^{th}$ and $6^{th}$ lessons) under the main theme of 'green family life'. The results from 20 individual and group activities showed that the students actively solved the problems when the presented cases were related to their own lives or experiences. The opportunity to implement green life through activities motivated students' willingness to proceed in real life. However, it is vital to assist integrated thinking through various examples before beginning due to students with difficulties connecting the issue from one area to the other during the problem-focused activity. The students' ability to solve the activity workbook had been improved as the lessons continued. From the survey questions on the theme-based integrated lessons, all items associated with integration of clothing, foods, and housing were positively responded. Also, questions regarding general understanding, suitability and satisfaction on the teaching/learning process were marked positive. The conclusion could be that the integrated theme related to clothing, food, and housing in our life would be appropriate for green family life. The theme-based integrated teaching/learning plan is effective in understanding the occurrence of green family life in relation with clothing, food, and housing, identifying the practical ideas implementing green life in those areas, and improving the integrated ability to solve the green life related problems. However, this research has its weakness in generalizing the results due to its limited survey respondents and post-evaluation being the only assessment conducted.

• Journal of the Korean Association of Geographic Information Studies
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• v.9 no.4
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• pp.34-44
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• 2006

Simulation models allow researchers to model large hydrological catchment for comprehensive management of the water resources and explication of the diffuse pollution processes, such as land-use changes by development plan of the region. Recently, there have been reported many researches that examine water body quality using Geographic Information System (GIS) and dynamic watershed models such as AGNPS, HSPF, SWAT that necessitate handling large amounts of data. The aim of this study is to develop a watershed based water quality estimation system for the impact assessment on stream water quality. KBASIN-HSPF, proposed in this study, provides easy data compiling for HSPF by facilitating the setup and simulation process. It also assists the spatial interpretation of point and non-point pollutant information and thiessen rainfall creation and pre and post processing for large environmental data An integration methodology of GIS and water quality model for the preprocessing geo-morphologic data was designed by coupling the data model KBASIN-HSPF interface comprises four modules: registration and modification of basic environmental information, watershed delineation generator, watershed geo-morphologic index calculator and model input file processor. KBASIN-HSPF was applied to simulate the water quality impact by variation of subbasin pollution discharge structure.

• Spatial Information Research
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• v.9 no.2
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• pp.291-307
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• 2001

In today's environmental engineering practice, many technologies such as GIS have been adopted to analyze chemical and biological process in water bodies and pollutants movements on the land surface. However, the linkage between spatially represented land surface pollutants and the in-stream processes has been relatively weak. This lack of continuity needs to develop a method in order to link the spatially-based pollutant source characterization with the water quality modeling. The objective of this thesis was to develop a two-way(forward and backward) link between ArcView GIS software and the USEPA water quality model, WASP5. This thesis includes a literature review, the determination of the point source and non-point source loadings from WASP5 modeling, and the linkage of a GIS with WASP5 model. The GIS and model linkage includes pre-processing of the input data within a GIS to provide necessary information for running a model in the forms of external input files. The model results has been post-processed and stored in the GIS database to be reviewed in a user defined form such as a chart, or a table. The interface developed from this study would provide efficient environment to support the easier decision making form water quality management.