• JSTS:Journal of Semiconductor Technology and Science
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• 제13권1호
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• 대한기계학회논문집A
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• 제26권10호
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• pp.2187-2193
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• 2002

We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

• 센서학회지
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• 제12권2호
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• pp.88-94
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• 2003

근전도는 근육의 수축을 관장하는 신경다발의 전기적 흥분에 의해 생기는 생체전기신호이다. 따라서 근육운동에 따라 발생하는 근전도 신호를 측정, 분석하면 운동기능의 정상여부를 판단할 수 있을 뿐 아니라 사용자의 동작에 의해 컴퓨터나 전자장치를 작동시키는 인간-기계 인터페이스(man-machine interface)용 입력신호로도 사용할 수 있다. 본 연구에서는 사용자의 일상생활에서의 자연스러운 동작과 관련된 근전도 신호를 측정할 수 있는 소형의 무선 생체신호 측정시스템을 개발하였다. 기존의 근전도 측정 시스템에서 전극과 증폭기 사이에 존재하는 전선은 동적잡음의 원인이 되고 사용자의 동작을 방해할 수 있으므로 소형의 증폭회로를 전극 바로 위에 일체형으로 제작하였고 증폭기와 컴퓨터 사이에 무선 데이터 전송을 사용하여 사용자의 일상적인 원활한 동작을 가능케 하였다. 개발된 측정 시스템의 크기는 $60{\times}40{\times}25mm$이고 무게는 100g이다. 개발된 시스템에 대한 성능 평가결과 컴퓨터를 위한 새로운 인터페이스 장치, 운동선수의 훈련결과 분석, 환자의 재활훈련 성과 측정 그리고 가상현실 입력장비 등의 용도로 사용될 수 있음을 확인하였다.

• Journal of Electrochemical Science and Technology
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• 제14권1호
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• pp.1-14
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• 2023

The overuse of pesticides in agricultural sectors exposes people to food contamination. Pesticides are toxic to humans and can have both acute and chronic health effects. To protect food consumers from the adverse effects of pesticides, a rapid monitoring system of the residues is in dire need. Molecularly imprinted polymer (MIP) on a screen-printed electrode (SPE) is a leading and promising electrochemical sensing approach for the detection of several residues including pesticides. Despite the huge development in analytical instrumentation developed for contaminant detection in recent years such as HPLC and GC/MS, these conventional techniques are time-consuming and labor-intensive. Additionally, the imprinted SPE detection system offers a simple portable setup where all electrodes are integrated into a single strip, and a more affordable approach compared to MIP attached to traditional rod electrodes. Recently, numerous reviews have been published on the production and sensing applications of MIPs however, the research field lacks reviews on the use of MIPs on electrochemical sensors utilizing the SPE technology. This paper presents a distinguished overview of the MIP technique used on bare and modified SPEs for the detection of pesticides from four recent publications which are malathion, chlorpyrifos, paraoxon and cyhexatin. Different molecular imprint routes were used to prepare these biomimetic sensors including solution polymerization, thermal polymerization, and electropolymerization. The unique characteristics of each MIP-modified SPE are discussed and the comparison among the findings of the papers is critically reviewed.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.259-267
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• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

• 대한치과보철학회지
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• 제25권1호
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• pp.213-226
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• 1987

The purpose of this study was to standardize and classify the coordination pattern among the left and right masseter and anterior temporal muscles, in terms of integrated EMG values per stroke during gum chewing in normal subjects. In this study, 20 normal subjects were selected to chew a piece of gum and integrated EMG from middle portion of the masseter and anterior temporal muscles on both sides were recorded 20 times during each of the right and left chewing respectively. And the Bioelectric Processor Model EM2 (Myo-tronies Research, Inc., U.S.A.) with the surface electrodes was used to record the EMG activity during all experimental procedures. The results were as follows; 1. In all subjects, the chewing side masseter muscle was predominantly active among the four muscles examined. 2. The integrated EMG value of the middle of masseter muscle was significantly predominant than those of the anterior temporal muscle (p<0.0001) on the chewing side, but no significant predominant was observed on the nonchewing side (p<0.98). 3. In comparison with same muscles on the chewing and nonchewing side, low correlation coefficient was found between the middle of masseter muscles (R=0.317), but high correlation coefficient was found between the anterior temporal muscles (R=0.738). Between two muscles on the same side, there were significant correlation in the chewing (R=0.557) and nonchewing side (R=0.625). 4. In the coordination patterns among four muscles examined, distinct individual differences were found, but in an identical subject one fixed pattern appeared with significant reproducibility.

• 한국안광학회지
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• 제3권1호
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• pp.27-31
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• 1998

펄스형 방전플라즈마 발생장치인 플라스마 포커스장치에서 발생하는 가시광선영역의 빛을 시간분해분석법과 시간적분분석법으로 분광분석하였다. 플라스마포커스장치는 전극이 동축형으로 사용되었고, 시간 용해분석법은 고정된 파장의 광펄스를 오실로스코프로 분석하였으며, 시간 적분법을 일정한 범위의 파장대를 필림에 현상하여 densitometer로 분석하였다. 가시광선발생은 방전전압과 기체압력을 변수로 측정하여 방전전압은 17 kV이고 기체압력은 아르곤기체일 경우 0.5 torr가 최적조건이었다.

• 전기화학회지
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• 제11권3호
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• pp.165-169
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• 2008

CODH(Carbon Monoxide Dehydrogenase)에 의한 이산화탄소 환원에 있어서 작업전극을 유리탄소전극을 사용한 경우와 금전극을 사용한 경우를 비교하여 그 영향을 관찰하였다. 금전극을 사용한 경우에는 수소발생과 섞이기 때문에 전기분해의 전위를 잘 선택해야 효율적인 이산화탄소의 환원 반응을 관찰할 수 있는데 반하여, 유리탄소전극은 금전극보다 수소 환원에 대한 과전압이 크기 때문에 -650 mV vs. NHE 까지도 중성수용액에서 수소발생 없이, 효율적인 이산화탄소의 환원을 관찰할 수 있었다. CODH를 이용한 이산화탄소의 환원에는 가해주는 전기분해 전위가 큰 영향을 미침을 알 수 있었는데, $-570{\sim}600\;mV$ vs. NHE 근처가 가장 효율적임을 알 수 있었고 이보다 더 음의 전위를 걸어주었을 때는 효소활성의 감소 및 수소발생이 복합적으로 영향을 미쳐 일산화탄소 생성의 전류효율이 급격히 감소함을 알 수 있었다.

• Bulletin of the Korean Chemical Society
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• 제27권5호
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• pp.672-678
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• 2006

A new approach to fabricate an enzyme electrode was described based on the immobilization of horseradish peroxidase (HRP) on dithiobis-N-succinimidyl propionate (DTSP) self-assembled monolayer (SAM) formed on gold-nanoparticles (Au-NPs) which were electrochemically deposited onto glassy carbon electrode (GCE) surface. The overall surface area and average size of Au-NPs could be controlled by varying deposition time and were examined by Field Emission-Scanning Electron Microscope (FE-SEM). The $O_2$ reduction capability of the surface demonstrated that Au-NPs were thermodynamically stable enough to stay on GCE surface. The immobilized HRP electrode based on Au-NPs/GCE presented faster, more stable and sensitive amperometric response in the reduction of hydrogen peroxide than a HRP immobilized on DTSP/gold plate electrode not containing Au-NPs. The effects of operating potential, mediator concentration, and pH of buffer electrolyte solution on the performance of the HRP biosensor were investigated. In the optimized experimental conditions, the HRP immobilized GCE incorporating smaller-sized Au-NPs showed higher electrocatalytic activity due to the high surface area to volume ratio of Au-NPs in the biosensor. The HRP electrode showed a linear response to $H_2O_2$ in the concentration range of 1.4 $\mu$M-3.1 mM. The apparent Michaelis-Menten constant ($K _M\; ^{app}$) determined for the immobilized HRP electrodes showed a trend to be decreased by decreasing size of Au-NPs electrodeposited onto GCE.

• 대한치과보철학회지
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• 제27권2호
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• pp.37-52
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• 1989

The purpose of this study was to investigate the relationship between sternocleidomastoid (SCM) and masseter muscles during occlusal functions by means of EMG recordings of examined muscles. For the study, eighteen normal subjects were selected and the Bio-electric Processor EM2 (Myo-tronics Research, Inc., U.S.A.) with the surface electrodes was used to record the EMG activity from the right and left middle of masseter and insertion of SCM of each subject during right and left gum-chewing and isometric contraction by changing the biting force at right eccentric position of jaw. The amount of biting force ranged from 5 to 70kg during isometric contraction were measured by use of Jaw Force Meter. (Nihon Koden Kogyo, Japan.) The results were as follows: 1. The activity onset of SCM and masseter on the same side was almost at the same time, and integrated EMG values of two muscles on the chewing side were higher than the same named muscles on the non-chewing side during gum-chewing. (p<0.01) 2. The regression correlation was not present between both masseters (p>0.05), but between both SCM muscles or muscles of two kinds on the chewing or non-chewing side. ($p{\leqq}0.05$) 3. The integrated EMG value of SCM on chewing or non-chewing side were about 10 percent of that of ipsilateral masseter. 4. Mean voltage of each examined muscles were almost proportional to biting force during isometric contraction and the slope of voltage/biting force line was steepest at the ipsilateral masseter, followed by contalateral masseter, ipsi- and contra-lateral SCM muscles. 5. Mean voltage of ipsilateral masseter was highest during isometric contraction, followed by ipsilateral masseter, contra- and ipsi-lateral SCM muscles.