Indium Tin Oxide (ITO) Nano Thin Films Deposited by a Modulated Pulse Sputtering at Room Temperature (모듈레이티드 펄스 스퍼터링으로 상온 증착한 Indium-Tin-Oxide (ITO) 나노 박막)
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- Journal of the Korean institute of surface engineering
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- v.47 no.3
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- pp.109-115
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- 2014